Methods to introduce sub-micrometer, symmetry-breaking surface corrugation to silicon substrates to increase light trapping
Abstract
Provided is a method for fabricating a nanopatterned surface. The method includes forming a mask on a substrate, patterning the substrate to include a plurality of symmetry-breaking surface corrugations, and removing the mask. The mask includes a pattern defined by mask material portions that cover first surface portions of the substrate and a plurality of mask space portions that expose second surface portions of the substrate, wherein the plurality of mask space portions are arranged in a lattice arrangement having a row and column, and the row is not oriented parallel to a [110] direction of the substrate. The patterning the substrate includes anisotropically removing portions of the substrate exposed by the plurality of spaces.
- Inventors:
- Issue Date:
- Research Org.:
- STC.UNM, Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1433847
- Patent Number(s):
- 9941426
- Application Number:
- 15/389,936; CHE-1231046
- Assignee:
- STC.UNM (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2016 Dec 23
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Han, Sang Eon, Hoard, Brittany R., Han, Sang M., and Ghosh, Swapnadip. Methods to introduce sub-micrometer, symmetry-breaking surface corrugation to silicon substrates to increase light trapping. United States: N. p., 2018.
Web.
Han, Sang Eon, Hoard, Brittany R., Han, Sang M., & Ghosh, Swapnadip. Methods to introduce sub-micrometer, symmetry-breaking surface corrugation to silicon substrates to increase light trapping. United States.
Han, Sang Eon, Hoard, Brittany R., Han, Sang M., and Ghosh, Swapnadip. Tue .
"Methods to introduce sub-micrometer, symmetry-breaking surface corrugation to silicon substrates to increase light trapping". United States. https://www.osti.gov/servlets/purl/1433847.
@article{osti_1433847,
title = {Methods to introduce sub-micrometer, symmetry-breaking surface corrugation to silicon substrates to increase light trapping},
author = {Han, Sang Eon and Hoard, Brittany R. and Han, Sang M. and Ghosh, Swapnadip},
abstractNote = {Provided is a method for fabricating a nanopatterned surface. The method includes forming a mask on a substrate, patterning the substrate to include a plurality of symmetry-breaking surface corrugations, and removing the mask. The mask includes a pattern defined by mask material portions that cover first surface portions of the substrate and a plurality of mask space portions that expose second surface portions of the substrate, wherein the plurality of mask space portions are arranged in a lattice arrangement having a row and column, and the row is not oriented parallel to a [110] direction of the substrate. The patterning the substrate includes anisotropically removing portions of the substrate exposed by the plurality of spaces.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {4}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Flat Light Concentration Device with Reduced Thickness
patent-application, February 2010
- Thony, Philippe
- US Patent Application 12/593696; 20100037954
Solar Cells and Methods of Forming the Same
patent-application, March 2010
- Ktm, Yun-Gi
- US Patent Application 12/562400; 20100071764
Solar cell apparatus having the transparent conducting layer with the structure as a plurality of nano-level well-arranged arrays
patent-application, March 2012
- Tseng, Ping-Chen; Yu, Peichen; Kuo, Hao-Chung
- US Patent Application 12/929218; 20120073641
Silicon Nanoparticle Dispersions
patent-application, December 2012
- Kambe, Nobuyuki; Honeker, Christian C.; Blum, Yigal Dov
- US Patent Application 13/594345; 20120319053
Nanostructured Arrays for Radiation Capture Structures
patent-application, January 2013
- Han, Sang Eon; Mavrokefalos, Anastassios; Branham, Matthew Sanders
- US Patent Application 13/513928; 20130014814
Complex Chiral Colloids and Surfaces via High-Index Off-Cut Silicon
journal, April 2014
- McPeak, Kevin M.; van Engers, Christian D.; Blome, Mark
- Nano Letters, Vol. 14, Issue 5, p. 2934-2940