Ultrananocrystalline diamond contacts for electronic devices
Abstract
A method of forming electrical contacts on a diamond substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The mixture of gases include a source of a p-type or an n-type dopant. The plasma ball is disposed at a first distance from the diamond substrate. The diamond substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the diamond substrate for a first time, and a UNCD film, which is doped with at least one of a p-type dopant and an n-type dopant, is disposed on the diamond substrate. The doped UNCD film is patterned to define UNCD electrical contacts on the diamond substrate.
- Inventors:
- Issue Date:
- Research Org.:
- Brookhaven National Laboratory (BNL), Upton, NY (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1413200
- Patent Number(s):
- 9842958
- Application Number:
- 15/339,295
- Assignee:
- UChicago Argonne, LLC (Chicago, IL); Brookhaven Science Associates, LLC (Upton, NY); The Research Foundation for the State University of New York (Albany, NY)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- DOE Contract Number:
- AC02-98CH10886; SC0012704; AC02-06CH11357
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2016 Oct 31
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Sumant, Anirudha V., Smedley, John, and Muller, Erik. Ultrananocrystalline diamond contacts for electronic devices. United States: N. p., 2017.
Web.
Sumant, Anirudha V., Smedley, John, & Muller, Erik. Ultrananocrystalline diamond contacts for electronic devices. United States.
Sumant, Anirudha V., Smedley, John, and Muller, Erik. Tue .
"Ultrananocrystalline diamond contacts for electronic devices". United States. https://www.osti.gov/servlets/purl/1413200.
@article{osti_1413200,
title = {Ultrananocrystalline diamond contacts for electronic devices},
author = {Sumant, Anirudha V. and Smedley, John and Muller, Erik},
abstractNote = {A method of forming electrical contacts on a diamond substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The mixture of gases include a source of a p-type or an n-type dopant. The plasma ball is disposed at a first distance from the diamond substrate. The diamond substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the diamond substrate for a first time, and a UNCD film, which is doped with at least one of a p-type dopant and an n-type dopant, is disposed on the diamond substrate. The doped UNCD film is patterned to define UNCD electrical contacts on the diamond substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2017},
month = {12}
}
Works referenced in this record:
Semiconducting diamond and process for producing the same
patent, March 1991
- Imai, Takahiro; Nakahata, Hideaki; Fujimori, Naoji
- US Patent Document 5,001,452
Method of manufacturing diamond thermistors
patent, February 1993
- Yamazaki, Shunpei
- US Patent Document 5,183,530
Heat-resisting ohmic contact on semiconductor diamond layer
patent, July 1995
- Hayashi, Kazushi; Tachibana, Takeshi
- US Patent Document 5,436,505
Passivation/patterning of PZR diamond films for high temperature operability
patent, April 1997
- Kurtz, Anthony D.; Ned, Alexander A.; Vergel de Dios, Timoteo I.
- US Patent Document 5,622,902
X-ray beam position monitor and its position measurement method
patent, February 1998
- Kitamura, Hideo; Yamamoto, Yoshiyuki; Tanabe, Keiichiro
- US Patent Document 5,717,214
Method for synthesizing n-type diamond having low resistance
patent, January 2002
- Yoshida, Hiroshi
- US Patent Document 6,340,393
Method to grow pure nanocrystalline diamond films at low temperatures and high deposition rates
patent, July 2009
- Carlisle, John; Gruen, Dieter M.; Auciello, Orlando H.
- US Patent Document 7,556,982
Electrical switching device and method of embedding catalytic material in a diamond substrate
patent, August 2010
- Taylor, Gareth Andrew
- US Patent Document 7,781,257
Ultrananocrystalline diamond films with optimized dielectric properties for advanced RF MEMS capacitive switches
patent, January 2013
- Sumant, Anirudha V.; Auciello, Orlando H.; Mancini, Derrick C.
- US Patent Document 8,354,290
Nano-crystal diamond film, manufacturing method thereof, and device using nano-crystal diamond film
patent, April 2013
- Gamo, Hidenori; Ando, Toshihiro
- US Patent Document 8,420,043
Method for producing nanocrystalline diamond coatings on gemstones and other substrates
patent, August 2015
- Neogi, Suneeta; Neogi, Jayant
- US Patent Document 9,108,888
Diamond transmission dynode and photomultiplier or imaging device using same
patent-application, April 2002
- Tomasetti, Charles M.; Caracciolo, Robert; Beetz, Charles B.
- US Patent Application 09/885716; 20020041154
Polycrystal diamond thin film and photocathode and electron tube using the same
patent-application, January 2003
- Niigaki, Minoru; Uchiyama, Shoichi; Kan, Hirofumi
- US Patent Application 10/223378; 20030001498
Patterning Of Nanocrystalline Diamond Films For Diamond Microstructures Useful In Mems And Other Devices
patent-application, July 2004
- Gruen, Dieter M.; Busmann, Hans-Gerd; Meyer, Eva-Maria
- US Patent Application 10/169879; 20040129202
Single crystal diamond prepared by CVD
patent-application, November 2004
- Scarsbrook, Geoffrey Alan; Martineau, Philip Maurice; Collins, John Lloyd
- US Patent Application 10/777633; 20040221795
All diamond self-aligned thin film transistor
patent-application, March 2006
- Gerbi, Jennifer
- US Patent Document 11/226703; 20060060864
Electrode and electron emission applications for n-type doped nanocrystalline materials
patent-application, June 2006
- Gruen, Dieter M.; Auciello, Olando H.; Swain, Greg M.
- US Patent Application 10/398329; 20060131588
Transparent thin film transistor (TFT) and its method of manufacture
patent-application, March 2007
- Jeong, Jae Kyeong; Shin, Hyun Soo; Mo, Yeon Gon
- US Patent Application 11/513090; 20070057261
Novel ultrananocrystalline diamond probes for high-resolution low-wear nanolithographic techniques
patent-application, September 2007
- Sumant, Anirudha; Carpick, Robert; Auciello, Orlando
- US Patent Application 11/542812; 20070220959
Diamond Semiconductor Element And Process For Producing The Same
patent-application, June 2008
- Kasu, Makoto; Makimoto, Toshiki; Ueda, Kenji
- US Patent Application 12/023660; 20080134960
Nanowire-based sensor configurations
patent-application, May 2009
- Hamilton, James M.; Dubrow, Robert S.; Chow, Calvin Y.H.
- US Patent Application 11/399218; 20090124025
Process and apparatus for diamond synthesis
patent-application, September 2009
- Asmussen, Jes; Grotjohn, Timothy; Reinhard, Donnie
- US Patent Application 12/381270; 20090239078
Method For Preparing A Semiconductor Ultrananocrystalline Diamond Film And A Semiconductor Ultrananocrystalline Diamond Film Prepared Therefrom
patent-application, March 2010
- Lin, I-Nan; Tai, Nyan-Hwa
- US Patent Application 12/391563; 20100051964
Printable, Flexible and Stretchable Diamond for Thermal Management
patent-application, March 2010
- Rogers, John A.; Kim, Tae Ho; Choi, Won Mook
- US Patent Application 12/418071; 20100052112
Nano-crystal diamond film, manufacturing method thereof, and device using nano-crystal diamond film
patent-application, November 2006
- Gamo, Hidenori; Ando, Toshihiro
- US Patent Application 11/598680; 20100084634
Apparatus And Method For Diamond Film Growth
patent-application, July 2010
- D'Evelyn, Mark Philip; Blouch, John Dewey; Haber, Ludwig Christian
- US Patent Application 12/359083; 20100189924
Semiconductor Component Having Diamond-Containing Electrodes and Use Thereof
patent-application, December 2012
- Kusterer, Joachim; Kohn, Erhard
- US Patent Document 13/384070; 20120312353
Diamond Semiconductor System and Method
patent-application, January 2013
- Khan, Adam
- US Patent Application 13/273467; 20130026492
Graphene on Semiconductor Detector
patent-application, April 2013
- Kub, Francis J.; Anderson, Travis; Hobart, Karl D.
- US Patent Application 13/630257; 20130082241
Nanowire Stress Sensors And Stress Sensor Integrated Circuits, Design Structures For A Stress Sensor Integrated Circuit, And Related Methods
patent-application, June 2013
- Bryant, Andres; Gunawan, Oki; Lo, Shih-Hsien
- US Patent Application 13/764169; 20130145857
Vacuum Encapsulated, High Temperature Diamond Amplified Cathode Capsule and Method for Making Same
patent-application, December 2013
- Rao, Triveni; Walsh, John; Gangone, Elizabeth
- US Patent Application 13/896459; 20130320295
Appendage Mountable Electronic Devices COnformable to Surfaces
patent-application, December 2013
- Rogers, John A.; Ying, Ming; Bonifas, Andrew
- US Patent Application 13/853770; 20130333094
X-Ray Monitoring Optical Elements
patent-application, April 2015
- Stoupin, Stanislav; Shvydko, Yury; Katsoudas, John
- US Patent Application 14/041831; 20150092925
Piezoresistivity in vapor‐deposited diamond films
journal, June 1992
- Aslam, M.; Taher, I.; Masood, A.
- Applied Physics Letters, Vol. 60, Issue 23, p. 2923-2925
Planar ultrananocrystalline diamond field emitter in accelerator radio frequency electron injector: Performance metrics
journal, November 2014
- Baryshev, Sergey V.; Antipov, Sergey; Shao, Jiahang
- Applied Physics Letters, Vol. 105, Issue 20, Article No. 203505
Optically Transparent Diamond Electrode for Use in IR Transmission Spectroelectrochemical Measurements
journal, October 2007
- Dai, Yingrui; Proshlyakov, Denis A.; Zak, Jerzy K.
- Analytical Chemistry, Vol. 79, Issue 19, p. 7526-7533
Band structure, deformation potentials, and carrier mobility in strained Si, Ge, and SiGe alloys
journal, August 1996
- Fischetti, M. V.; Laux, S. E.
- Journal of Applied Physics, Vol. 80, Issue 4, p. 2234-2252
Electrical contacts to ultrananocrystalline diamond
journal, September 2003
- Gerbi, J. E.; Auciello, O.; Birrell, J.
- Applied Physics Letters, Vol. 83, Issue 10, p. 2001-2003
Direct Low-Temperature Integration of Nanocrystalline Diamond with GaN Substrates for Improved Thermal Management of High-Power Electronics
journal, February 2012
- Goyal, Vivek; Sumant, Anirudha V.; Teweldebrhan, Desalegne
- Advanced Functional Materials, Vol. 22, Issue 7, p. 1525-1530
Configurational, electronic entropies and the thermoelectric properties of nanocarbon ensembles
journal, April 2008
- Gruen, Dieter M.; Bruno, Paola; Xie, Ming
- Applied Physics Letters, Vol. 92, Issue 14, Article No. 143118
Giant piezoresistance effect in silicon nanowires
journal, October 2006
- He, Rongrui; Yang, Peidong
- Nature Nanotechnology, Vol. 1, Issue 1, p. 42-46
Silicon Device Scaling to the Sub-10-nm Regime
journal, December 2004
- Ieong, Meikei; Doris, Bruce; Kedzierski, Jakub
- Science, Vol. 306, Issue 5704, p. 2057-2060
High quantum efficiency ultrananocrystalline diamond photocathode for photoinjector applications
journal, September 2014
- Pérez Quintero, Kenneth J.; Antipov, Sergey; Sumant, Anirudha V.
- Applied Physics Letters, Vol. 105, Issue 12, Article No. 123103
Properties of Hydrogen Terminated Diamond as a Photocathode
journal, March 2011
- Rameau, J. D.; Smedley, J.; Muller, E. M.
- Physical Review Letters, Vol. 106, Issue 13, Article No. 137602
Synthesis and characterization of highly-conducting nitrogen-doped ultrananocrystalline diamond films
journal, September 2001
- Bhattacharyya, S.; Auciello, O.; Birrell, J.
- Applied Physics Letters, Vol. 79, Issue 10, p. 1441-1443
Optical and Electrochemical Properties of Optically Transparent, Boron-Doped Diamond Thin Films Deposited on Quartz
journal, December 2002
- Stotter, Jason; Zak, Jerzy; Behler, Zack
- Analytical Chemistry, Vol. 74, Issue 23, p. 5924-5930
Polycrystalline diamond films as prospective UV photocathodes
conference, December 2000
- Tremsin, Anton S.; Siegmund, Oswald H. W.
- Instrumentation for UV/EUV Astronomy and Solar Missions
Review on diamond based piezoresistive sensors
conference, January 1998
- Werner, M.; Gluche, P.; Adamschik, M.