Metallic dielectric photonic crystals and methods of fabrication
Abstract
A metallic-dielectric photonic crystal is formed with a periodic structure defining a plurality of resonant cavities to selectively absorb incident radiation. A metal layer is deposited on the inner surfaces of the resonant cavities and a dielectric material fills inside the resonant cavities. This photonic crystal can be used to selectively absorb broadband solar radiation and then reemit absorbed radiation in a wavelength band that matches the absorption band of a photovoltaic cell. The photonic crystal can be fabricated by patterning a sacrificial layer with a plurality of holes, into which is deposited a supporting material. Removing the rest of the sacrificial layer creates a supporting structure, on which a layer of metal is deposited to define resonant cavities. A dielectric material then fills the cavities to form the photonic crystal.
- Inventors:
- Issue Date:
- Research Org.:
- Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1411388
- Patent Number(s):
- 9837953
- Application Number:
- 15/343,030
- Assignee:
- Massachusetts Institute of Technology (Cambridge, MA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- SC0001299; FG02-09ER46577
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2016 Nov 03
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Chou, Jeffrey Brian, and Kim, Sang-Gook. Metallic dielectric photonic crystals and methods of fabrication. United States: N. p., 2017.
Web.
Chou, Jeffrey Brian, & Kim, Sang-Gook. Metallic dielectric photonic crystals and methods of fabrication. United States.
Chou, Jeffrey Brian, and Kim, Sang-Gook. Tue .
"Metallic dielectric photonic crystals and methods of fabrication". United States. https://www.osti.gov/servlets/purl/1411388.
@article{osti_1411388,
title = {Metallic dielectric photonic crystals and methods of fabrication},
author = {Chou, Jeffrey Brian and Kim, Sang-Gook},
abstractNote = {A metallic-dielectric photonic crystal is formed with a periodic structure defining a plurality of resonant cavities to selectively absorb incident radiation. A metal layer is deposited on the inner surfaces of the resonant cavities and a dielectric material fills inside the resonant cavities. This photonic crystal can be used to selectively absorb broadband solar radiation and then reemit absorbed radiation in a wavelength band that matches the absorption band of a photovoltaic cell. The photonic crystal can be fabricated by patterning a sacrificial layer with a plurality of holes, into which is deposited a supporting material. Removing the rest of the sacrificial layer creates a supporting structure, on which a layer of metal is deposited to define resonant cavities. A dielectric material then fills the cavities to form the photonic crystal.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2017},
month = {12}
}
Works referenced in this record:
Solar thermophotovoltaic power conversion method and apparatus
patent, August 1999
- Stone, Kenneth W.; Schneider, Stanley; Schmitt, Raymond J.
- US Patent Document 5,932,029
Systems and methods of manufacturing integrated photonic circuit devices
patent-application, July 2003
- Salerno, Jack P.
- US Patent Application 10/032702; 2003012382
High-speed optical modulator
patent-application, August 2004
- Pearsall, Thomas P.
- US Patent Application 10/664517; 20040150873
Systems and methods for improving luminescent concentrator performance
patent-application, September 2008
- Xiang, Xiao-Dong; Shan, Wei
- US Patent Application 11/975071; 20080223438
Photovoltaic Devices With Integrated Color Interferometric Film Stacks
patent-application, April 2009
- Kothari, Manish; Xu, Gang; Khazeni, Kasra
- US Patent Application 11/966850; 20090101192
Resonant cavity color conversion el device and organic el display device using the same
patent-application, August 2009
- Terao, Yutaka
- US Patent Application 12/379001; 20090212696
Solar Modules Including Spectral Concentrators and Related Manufacturing Methods
patent-application, September 2010
- Kenney, John; Wang, Jian Jim; Pfenninger, William
- US Patent Application 12/708502; 20100224248
Power Supply Device And Vehicle Including The Same, Control Method For Power Supply Device, And Computer-Readable Recording Medium Having Program For Causing Computer To Execute That Control Method Recorded Thereon
patent-application, September 2010
- Yamada, Kenji; Hanada, Hideto; Katoh, Satoru
- US Patent Application 12/681259; 20100224428
Planar Plasmonic Device For Light Reflection, Diffusion And Guiding
patent-application, October 2010
- Ji, Jin; Spitzer, Mark; Kaufman, Lawrence
- US Patent Application 12/758373; 20100259826
Thin-Film Integrated Spectrally-Selective Plasmonic Absorber/ Emitter For Solar Thermophotovoltaic Applications
patent-application, December 2012
- Shvets, Gennady; Wu, Chih-Hui
- US Patent Application 13/306975; 20120312360
Three-dimensional self-assembled photonic crystals with high temperature stability for thermal emission modification
journal, October 2013
- Arpin, Kevin A.; Losego, Mark D.; Cloud, Andrew N.
- Nature Communications, Vol. 4, Article No. 2630
Broadband polarization-independent resonant light absorption using ultrathin plasmonic super absorbers
journal, November 2011
- Aydin, Koray; Ferry, Vivian E.; Briggs, Ryan M.
- Nature Communications, Vol. 2, Article No. 517
Design and global optimization of high-efficiency thermophotovoltaic systems
journal, January 2010
- Bermel, Peter; Ghebrebrhan, Michael; Chan, Walker
- Optics Express, Vol. 18, Issue S3, p. A314-A334
Sharp thermal emission and absorption from conformally coated metallic photonic crystal with triangular lattice
journal, August 2008
- Biswas, R.; Zhou, D.; Puscasu, I.
- Applied Physics Letters, Vol. 93, Issue 6, Article No. 063307
Design and optimization of one-dimensional photonic crystals for thermophotovoltaic applications
journal, January 2004
- Celanovic, Ivan; O’Sullivan, Francis; Ilak, Milos
- Optics Letters, Vol. 29, Issue 8, p. 863-865
Resonant-cavity enhanced thermal emission
journal, August 2005
- Celanovic, Ivan; Perreault, David; Kassakian, John
- Physical Review B, Vol. 72, Issue 7, Article No. 075127
Two-dimensional tungsten photonic crystals as selective thermal emitters
journal, May 2008
- Celanovic, Ivan; Jovanovic, Natalija; Kassakian, John
- Applied Physics Letters, Vol. 92, Issue 19, Article No. 193101
Toward high-energy-density, high-efficiency, and moderate-temperature chip-scale thermophotovoltaics
journal, February 2013
- Chan, W. R.; Bermel, P.; Pilawa-Podgurski, R. C. N.
- Proceedings of the National Academy of Sciences, Vol. 110, Issue 14, p. 5309-5314
Low aspect ratio nanophotonic filled cavities with Q-matching for scalable thermophotovoltaic power conversion
conference, September 2013
- Chou, J. B.; Smyth, Katherine; Kim, Sang-Gook
- 2013 IEEE Photonics Conference
Ultrabroadband Light Absorption by a Sawtooth Anisotropic Metamaterial Slab
journal, February 2012
- Cui, Yanxia; Fung, Kin Hung; Xu, Jun
- Nano Letters, Vol. 12, Issue 3, p. 1443-1447
All-metallic three-dimensional photonic crystals with a large infrared bandgap
journal, May 2002
- Fleming, J. G.; Lin, S. Y.; El-Kady, I.
- Nature, Vol. 417, Issue 6884, p. 52-55
Surfaces with holes in them: new plasmonic metamaterials
journal, January 2005
- Garcia-Vidal, F. J.; Martín-Moreno, L.; Pendry, J. B.
- Journal of Optics A: Pure and Applied Optics, Vol. 7, Issue 2, p. S97-S101
Tailoring thermal emission via matching of photonic crystal resonances
journal, March 2011
- Ghebrebrhan, M.; Bermel, P.; Yeng, Y. X.
- Physical Review A, Vol. 83, Issue 3, Article No. 033810
Coherent emission of light by thermal sources
journal, March 2002
- Greffet, Jean-Jacques; Carminati, Rémi; Joulain, Karl
- Nature, Vol. 416, Issue 6876, p. 61-64
High performance optical absorber based on a plasmonic metamaterial
journal, June 2010
- Hao, Jiaming; Wang, Jing; Liu, Xianliang
- Applied Physics Letters, Vol. 96, Issue 25, Article No. 251104
Experimental Verification of Designer Surface Plasmons
journal, April 2005
- Hibbins, A. P.; Evans, Benjamin R.; Sambles, J. Roy
- Science, Vol. 308, Issue 5722, p. 670-672
Progress in Development of High-Temperature Solar-Selective Coating
conference, August 2005
- Kennedy, C. E.; Price, H.
- ASME 2005 International Solar Energy Conference, p. 749-755
Hafnia-plugged microcavities for thermal stability of selective emitters
journal, June 2013
- Lee, Heon-Ju; Smyth, Katherine; Bathurst, Stephen
- Applied Physics Letters, Vol. 102, Issue 24, Article No. 241904
Scalable photonic crystal chips for high sensitivity protein detection
journal, January 2013
- Liang, Feng; Clarke, Nigel; Patel, Parth
- Optics Express, Vol. 21, Issue 26, p. 32306-32312
Development of metal etch mask by single layer lift-off for silicon nitride photonic crystals
journal, June 2011
- Lim, Kang-mook; Gupta, Shilpi; Ropp, Chad
- Microelectronic Engineering, Vol. 88, Issue 6, p. 994-998
A three-dimensional photonic crystal operating at infrared wavelengths
journal, July 1998
- Lin, S. Y.; Fleming, J. G.; Hetherington, D. L.
- Nature, Vol. 394, Issue 6690, p. 251-253
Infrared Perfect Absorber and Its Application As Plasmonic Sensor
journal, July 2010
- Liu, Na; Mesch, Martin; Weiss, Thomas
- Nano Letters, Vol. 10, Issue 7, p. 2342-2348
Large Area, 38 nm Half-Pitch Grating Fabrication by Using Atomic Spacer Lithography from Aluminum Wire Grids
journal, December 2006
- Liu, Xiaoming; Deng, Xuegong; Sciortino, Paul
- Nano Letters, Vol. 6, Issue 12, p. 2723-2727
Taming the Blackbody with Infrared Metamaterials as Selective Thermal Emitters
journal, July 2011
- Liu, Xianliang; Tyler, Talmage; Starr, Tatiana
- Physical Review Letters, Vol. 107, Issue 4, Article No. 045901
Optical properties and structure of HfO2 thin films grown by high pressure reactive sputtering
journal, August 2007
- Martínez, F. L.; Toledano-Luque, M.; Gandía, J. J.
- Journal of Physics D: Applied Physics, Vol. 40, Issue 17, p. 5256-5265
Three-dimensional photonic-crystal emitter for thermal photovoltaic power generation
journal, July 2003
- Lin, S. Y.; Moreno, J.; Fleming, J. G.
- Applied Physics Letters, Vol. 83, Issue 2, p. 380-382
Solar thermophotovoltaic energy conversion systems with two-dimensional tantalum photonic crystal absorbers and emitters
journal, March 2014
- Nam, Youngsuk; Yeng, Yi Xiang; Lenert, Andrej
- Solar Energy Materials and Solar Cells, Vol. 122, p. 287-296
Mimicking Surface Plasmons with Structured Surfaces
journal, August 2004
- Pendry, J. B.; Martín-Moreno, L.; Garcia-Vidal, F. J.
- Science, Vol. 305, Issue 5685, p. 847-848
Photonic crystal enhanced narrow-band infrared emitters
journal, December 2002
- Pralle, M. U.; Moelders, N.; McNeal, M. P.
- Applied Physics Letters, Vol. 81, Issue 25, p. 4685-4687
Absorber and emitter for solar thermo-photovoltaic systems to achieve efficiency exceeding the Shockley-Queisser limit
journal, January 2009
- Rephaeli, Eden; Fan, Shanhui
- Optics Express, Vol. 17, Issue 17, p. 15145-15159
Tungsten black absorber for solar light with wide angular operation range
journal, May 2008
- Rephaeli, Eden; Fan, Shanhui
- Applied Physics Letters, Vol. 92, Issue 21, Article No. 211107
Large-area fabrication of high aspect ratio tantalum photonic crystals for high-temperature selective emitters
journal, January 2013
- Rinnerbauer, Veronika; Ndao, Sidy; Xiang Yeng, Yi
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 31, Issue 1, Article No. 011802
High-temperature resistive surface grating for spectral control of thermal radiation
journal, March 2003
- Sai, Hitoshi; Kanamori, Yoshiaki; Yugami, Hiroo
- Applied Physics Letters, Vol. 82, Issue 11, p. 1685-1687
Solar selective absorbers based on two-dimensional W surface gratings with submicron periods for high-temperature photothermal conversion
journal, August 2003
- Sai, Hitoshi; Yugami, Hiroo; Kanamori, Yoshiaki
- Solar Energy Materials and Solar Cells, Vol. 79, Issue 1, p. 35-49
Thermophotovoltaic generation with selective radiators based on tungsten surface gratings
journal, October 2004
- Sai, Hitoshi; Yugami, Hiroo
- Applied Physics Letters, Vol. 85, Issue 16, p. 3399-3401
Design of wide-angle solar-selective absorbers using aperiodic metal-dielectric stacks
journal, January 2009
- Sergeant, Nicholas P.; Pincon, Olivier; Agrawal, Mukul
- Optics Express, Vol. 17, Issue 25, p. 22800-22812
Omnidirectional absorption in nanostructured metal surfaces
journal, April 2008
- Teperik, T. V.; García de Abajo, F. J.; Borisov, A. G.
- Nature Photonics, Vol. 2, Issue 5, p. 299-301
Palladium-Based Plasmonic Perfect Absorber in the Visible Wavelength Range and Its Application to Hydrogen Sensing
journal, October 2011
- Tittl, Andreas; Mai, Patrick; Taubert, Richard
- Nano Letters, Vol. 11, Issue 10, p. 4366-4369
High-temperature metal coating for modification of photonic band edge position
journal, January 2009
- Walsh, Timothy A.; Bur, James A.; Kim, Yong-Sung
- Journal of the Optical Society of America B, Vol. 26, Issue 7, p. 1450-1455
Metamaterial Electromagnetic Wave Absorbers
journal, May 2012
- Watts, Claire M.; Liu, Xianliang; Padilla, Willie J.
- Advanced Materials, Vol. 24, Issue 23, p. OP98-OP120
Spoof surface plasmon waveguide forces
journal, January 2014
- Woolf, David; Kats, Mikhail A.; Capasso, Federico
- Optics Letters, Vol. 39, Issue 3, p. 517-520
Large-area wide-angle spectrally selective plasmonic absorber
journal, August 2011
- Wu, Chihhui; Neuner, Burton; Shvets, Gennady
- Physical Review B, Vol. 84, Issue 7, Article No. 075102
Enabling high-temperature nanophotonics for energy applications
journal, January 2012
- Yeng, Y. X.; Ghebrebrhan, M.; Bermel, P.
- Proceedings of the National Academy of Sciences, Vol. 109, Issue 7, p. 2280-2285
Performance analysis of experimentally viable photonic crystal enhanced thermophotovoltaic systems
journal, January 2013
- Yeng, Yi Xiang; Chan, Walker R.; Rinnerbauer, Veronika
- Optics Express, Vol. 21, Issue S6, p. A1035-A1051