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Title: Laser process and corresponding structures for fabrication of solar cells with shunt prevention dielectric

Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thicknesses.
Inventors:
; ; ; ; ;
Issue Date:
OSTI Identifier:
1410533
Assignee:
SunPower Corporation (San Jose, CA) GFO
Patent Number(s):
9,831,359
Application Number:
14/989,989
Contract Number:
FC36-07GO17043
Resource Relation:
Patent File Date: 2016 Jan 07
Research Org:
SunPower Corporation, San Jose, CA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 14 SOLAR ENERGY