Laser patterning of laminated structures for electroplating
Abstract
A process for laser patterning of a substrate so that it can be subsequently electroplated or electrolessly plated. The process utilizes a laser to treat an inactive (inert) layer formed over an active layer to either combine or remove the inactive layer to produce a patterned active layer on which electrodeposition can occur. The process is carried out by utilizing laser alloying and laser etching, and involves only a few relatively high yield steps and can be performed on a very small scale. 9 figures.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of California (United States)
- OSTI Identifier:
- 140711
- Patent Number(s):
- 5264108
- Assignee:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 23 Nov 1993
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; SUBSTRATES; ETCHING; ELECTROPLATING; LASER RADIATION; COMPOSITE MATERIALS; LAYERS
Citation Formats
Mayer, S T, and Evans, L B. Laser patterning of laminated structures for electroplating. United States: N. p., 1993.
Web.
Mayer, S T, & Evans, L B. Laser patterning of laminated structures for electroplating. United States.
Mayer, S T, and Evans, L B. Tue .
"Laser patterning of laminated structures for electroplating". United States.
@article{osti_140711,
title = {Laser patterning of laminated structures for electroplating},
author = {Mayer, S T and Evans, L B},
abstractNote = {A process for laser patterning of a substrate so that it can be subsequently electroplated or electrolessly plated. The process utilizes a laser to treat an inactive (inert) layer formed over an active layer to either combine or remove the inactive layer to produce a patterned active layer on which electrodeposition can occur. The process is carried out by utilizing laser alloying and laser etching, and involves only a few relatively high yield steps and can be performed on a very small scale. 9 figures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 23 00:00:00 EST 1993},
month = {Tue Nov 23 00:00:00 EST 1993}
}
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