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Title: Laser patterning of laminated structures for electroplating

A process for laser patterning of a substrate so that it can be subsequently electroplated or electrolessly plated. The process utilizes a laser to treat an inactive (inert) layer formed over an active layer to either combine or remove the inactive layer to produce a patterned active layer on which electrodeposition can occur. The process is carried out by utilizing laser alloying and laser etching, and involves only a few relatively high yield steps and can be performed on a very small scale. 9 figures.
Inventors:
;
Issue Date:
OSTI Identifier:
140711
Assignee:
USDOE, Washington, DC (United States) PTO; SCA: 360601; PA: EDB-94:053650; SN: 94001164757
Patent Number(s):
US 5,264,108/A/
Contract Number:
W-7405-ENG-48
Resource Relation:
Other Information: PBD: 23 Nov 1993
Research Org:
University of California
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; SUBSTRATES; ETCHING; ELECTROPLATING; LASER RADIATION; COMPOSITE MATERIALS; LAYERS