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Title: Electroless atomic layer deposition

A method of electroless atomic layer deposition is described. The method electrolessly generates a layer of sacrificial material on a surface of a first material. The method adds doses of a solution of a second material to the substrate. The method performs a galvanic exchange reaction to oxidize away the layer of the sacrificial material and deposit a layer of the second material on the surface of the first material. The method can be repeated for a plurality of iterations in order to deposit a desired thickness of the second material on the surface of the first material.
Inventors:
; ; ; ;
Issue Date:
OSTI Identifier:
1406567
Assignee:
National Technology & Engineering Solutions of Sandia, LLC SNL-A
Patent Number(s):
9,803,285
Application Number:
14/189,866
Contract Number:
AC04-94AL85000
Resource Relation:
Patent File Date: 2014 Feb 25
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Other works cited in this record:

Hydrogen absorption induced metal deposition on palladium and palladium-alloy particles
patent, March 2009

Methods for forming palladium alloy thin films and optical hydrogen sensors employing palladium alloy thin films
patent-application, August 2005

Platinum Nanofilm Formation by EC-ALE via Redox Replacement of UPD Copper:  Studies Using in-Situ Scanning Tunneling Microscopy
journal, September 2006
  • Kim, Youn-Geun; Kim, Jay Y.; Vairavapandian, Deepa
  • The Journal of Physical Chemistry B, Vol. 110, Issue 36, p. 17998-18006
  • DOI: 10.1021/jp063766f

Electroless Patterned Assembly of Metal Nanoparticles on Hydrogen-Terminated Silicon Surfaces for Applications in Photoelectrocatalysis
journal, December 2012
  • Fabre, Bruno; Hennous, Leila; Ababou-Girard, Soraya
  • ACS Applied Materials & Interfaces, Vol. 5, Issue 2, p. 338-343
  • DOI: 10.1021/am302226q

Electroless deposition of Pt at a Pd electrode by reaction with sorbed H in Pd/H
journal, July 2000

Atomic-Layer Electroless Deposition: A Scalable Approach to Surface-Modified Metal Powders
journal, April 2014
  • Cappillino, Patrick J.; Sugar, Joshua D.; El Gabaly, Farid
  • Langmuir, Vol. 30, Issue 16, p. 4820-4829
  • DOI: 10.1021/la500477s

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