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Title: Laser-induced gas plasma machining

Techniques for removing material from a substrate are provided. A laser beam is focused at a distance from the surface to be treated. A gas is provided at the focus point. The gas is dissociated using the laser energy to generate gas plasma. The substrate is then brought in contact with the gas plasma to enable material removal.
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Issue Date:
OSTI Identifier:
Lawrence Livermore National Security, LLC LLNL
Patent Number(s):
Application Number:
Contract Number:
Resource Relation:
Patent File Date: 2013 Mar 12
Research Org:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org:
Country of Publication:
United States

Other works cited in this record:

Thin film deposition using plasma-generated source gas
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Axial flow laser plasma spraying
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patent-application, February 2009

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patent-application, April 2009

Method and Apparatus for Laser Ablation
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