Precise annealing of focal plane arrays for optical detection

Bender, Daniel A.

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Title: Precise annealing of focal plane arrays for optical detection

Abstract

Precise annealing of identified defective regions of a Focal Plane Array ("FPA") (e.g., exclusive of non-defective regions of the FPA) facilitates removal of defects from an FPA that has been hybridized and/or packaged with readout electronics. Radiation is optionally applied under operating conditions, such as under cryogenic temperatures, such that performance of an FPA can be evaluated before, during, and after annealing without requiring thermal cycling.

Inventors:: Bender, Daniel A.

Issue Date:: 2017-10-17

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1399862

Patent Number(s):: 9793177

Application Number:: 14/824,621

Assignee:: National Technology & Engineering Solutions of Sandia, LLC

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23K - SOLDERING OR UNSOLDERING

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

Show more

B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23K - SOLDERING OR UNSOLDERING
B23K26/354 - by melting

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L22/12 - {for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
H01L22/14 - {for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means}
H01L22/20 - {Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps}
H01L27/14649 - {Infra-red imagers}
H01L27/14698 - {Post-treatment for the devices, e.g. annealing, impurity-gettering, shor-circuit elimination, recrystallisation}

Show less

DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Resource Relation:: Patent File Date: 2015 Aug 12

Country of Publication:: United States

Language:: English

Subject:: 47 OTHER INSTRUMENTATION; 36 MATERIALS SCIENCE

Citation Formats


                    Bender, Daniel A. Precise annealing of focal plane arrays for optical detection.  United States: N. p., 2017. 
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                    Bender, Daniel A. Precise annealing of focal plane arrays for optical detection.  United States.

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                    Bender, Daniel A. Tue .  
        "Precise annealing of focal plane arrays for optical detection".  United States.  https://www.osti.gov/servlets/purl/1399862.

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@article{osti_1399862,

  title        = {Precise annealing of focal plane arrays for optical detection},

  author       = {Bender, Daniel A.},

  abstractNote = {Precise annealing of identified defective regions of a Focal Plane Array ("FPA") (e.g., exclusive of non-defective regions of the FPA) facilitates removal of defects from an FPA that has been hybridized and/or packaged with readout electronics. Radiation is optionally applied under operating conditions, such as under cryogenic temperatures, such that performance of an FPA can be evaluated before, during, and after annealing without requiring thermal cycling.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2017},

  month        = {10}

}

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Works referenced in this record:

Compact, thermally efficient focal plane array and testing and repair thereof
patent, September 1992

Kornrumpf, William P.; Marcinkiewicz, Walter M.; Davern, William E.
US Patent Document 5,146,303
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5146303

A-dual band IR sensor having two monolithically integrated staring detector arrays for simultaneous, coincident image readout
patent, April 1996

Yanka, Robert; Noble, Milton L.
US Patent Document 5,512,750
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5512750

Method of improving the spectral response and dark current characteristics of an image gathering detector
patent, November 1998

Russell, Stephen D.; Sexton, Douglas A.; Kelley, Eugene P.
US Patent Document 5,840,592
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5840592

Method for correcting a defect in a liquid crystal panel
patent, November 1999

Kato, Yosihisa; Shikanai, Masazumi; Morita, Hidehiro
US Patent Document 5,991,002
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5991002

Non-thermal process for annealing crystalline materials
patent, December 1999

Manka, Charles K.; Grun, Jacob; Covington, Billy Charles
US Patent Document 6,001,715
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6001715

Infrared focal plane array
patent, February 2000

Kimata, Masafumi; Ishikawa, Tomohiro; Tsutsumi, Kazuhiko
US Patent Document 6,031,231
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6031231

Digital offset corrector
patent, August 2001

Butler, Neal R.
US Patent Document 6,274,869
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6274869

Thermal mismatch compensation technique for integrated circuit assemblies
patent, January 2004

Robillard, Gene A.; Holland, Richard; Graney, Robert N.
US Patent Document 6,675,600
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6675600

Filtering systems and methods for infrared image processing
patent, May 2012

Hughes, Gary B.; Högasten, Nicholas; Nagahawatte, Nuwan
US Patent Document 8,189,050
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8189050

Staring focal plane sensor systems and methods for imaging large dynamic range scenes
patent, July 2014

Bluzer, Nathan; Halvis, James
US Patent Document 8,780,420
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8780420

Modified hybrid infrared focal plane array architecture for large scaling
patent, September 2015

Hatcher, Ryan M.; Segal, Brent M.; Bowen, Robert Chris
US Patent Document 9,123,607
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9123607

Monolithic infrared focal plane array detectors
patent-application, June 2003

Boieriu, Paul; Ashokan, Renganathan; Chen, Yuanping
US Patent Document 09/833363; 20030102432
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030102432

Infrared detector array with improved spectral range and method for making the same
patent-application, April 2004

Barton, Jeffrey B.; Hoelter, Theodore R.
US Patent Document 10/259046; 20040061056
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040061056

Method and apparatus for image processing using weighted defective pixel replacement
patent-application, May 2004

Alderson, Timothy; Tener, Gene D.; Davis, Jeffrey M.
US Patent Document 10/294608; 20040096125
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040096125

Infrared radiation imager having sub-pixelization and detector interdigitation
patent-application, February 2006

D'Souza, Arvind I.; Stapelbroek, Maryn G.; Dawson, Larry C.
US Patent Document 11/206937; 20060038128
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060038128

Localized surface annealing of components for substrate processing chambers
patent-application, January 2007

Bhatnagar, Ashish; Murugesh, Laxman; Gopalakrishnan, Padma
US Patent Document 11/181041; 20070014949
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070014949

Microlensed focal plane array (FPA) using sub-pixel de-selection for improved operability
patent-application, August 2007

Lee, Donald L.; Tennant, William E.
US Patent Document 11/347536; 20070176082
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070176082

Method for Assessment of Material Defects
patent-application, December 2009

Holland, Orin W.; Golding, Terry D.; Hellmer, Ronald P.
US Patent Document 12/137151; 20090309623
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090309623

Defect Detection and Response
patent-application, March 2010

Zhao, Guoheng; Zapalac, Jr., George H.; Ngai, Samuel S.H.
US Patent Document 12/336704; 20100074515
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100074515

Digital readout method and apparatus
patent-application, September 2010

Kelly, Michael; Tyrrell, Brian; Colonero, Curtis
US Patent Document 11/978351; 20100226495
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100226495

Complementary Pixel Reconstruction
patent-application, December 2011

Powell, Calvin L.; Williams, Kevin F.; Snead, Michael C.
US Patent Document 13/165702; 20110310275
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110310275

Photodetection
patent-application, March 2012

Kar, Aravinda; Manzur, Tariq
US Patent Document 12/964072; 20120051378
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120051378

Device and Method for Manufacturing Active Matrix Substrate, and Device and Method for Manufacturing Display Panel
patent-application, March 2012

Tajima, Yoshimitsu
US Patent Document 13/322826; 20120077408
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120077408

Uncooled Infrared Imaging Element and Manufacturing Method Thereof
patent-application, September 2012

Ogata, Masako; Fujiwara, Ikuo; Honda, Hiroto
US Patent Document 13/235388; 20120228496
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120228496

Method of Cadmium Molecular Beam Based Anneals for Manufacture of HgCdTe Photodiode Arrays
patent-application, October 2012

Wan, Chang-Feng
US Patent Document 13/421860; 20120264254
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120264254

System and Method for Removing Oxide from a Sensor Clip Assembly
patent-application, November 2012

Hampp, Andreas; Harris, Sean F.; Sadighi, Talieh H.
US Patent Document 13/107195; 20120285923
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120285923

Focal Plane Array and Method for Manufacturing the Same
patent-application, January 2013

Lapadatu, Adriana; Kittilsland, Gjermund
US Patent Document 13/582120; 20130026592
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130026592

Self Correcting Portable Digital Radiography Detector, Methods and Systems for Same
patent-application, July 2013

Topfer, Karin; Chang, Jeff Hsin; Heiler, Gregory N.
US Patent Document 13/349881; 20130182934
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130182934

Thermal Imaging Camera with Repositionable Active Portions of Focal Plane Array
patent-application, May 2014

Schmidt, Matthew F.; Johnson, Kirk R.
US Patent Document 13/673640; 20140132774
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140132774

Response of machining-damaged single-crystalline silicon wafers to nanosecond pulsed laser irradiation
journal, March 2007

Yan, Jiwang; Asami, Tooru; Kuriyagawa, Tsunemoto
Semiconductor Science and Technology, Vol. 22, Issue 4, p. 392-395
https://doi.org/10.1088/0268-1242/22/4/016

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Similar Records

Title: Precise annealing of focal plane arrays for optical detection

Abstract

Citation Formats

Compact, thermally efficient focal plane array and testing and repair thereof patent, September 1992

A-dual band IR sensor having two monolithically integrated staring detector arrays for simultaneous, coincident image readout patent, April 1996

Method of improving the spectral response and dark current characteristics of an image gathering detector patent, November 1998

Method for correcting a defect in a liquid crystal panel patent, November 1999

Non-thermal process for annealing crystalline materials patent, December 1999

Infrared focal plane array patent, February 2000

Digital offset corrector patent, August 2001

Thermal mismatch compensation technique for integrated circuit assemblies patent, January 2004

Filtering systems and methods for infrared image processing patent, May 2012

Staring focal plane sensor systems and methods for imaging large dynamic range scenes patent, July 2014

Modified hybrid infrared focal plane array architecture for large scaling patent, September 2015

Monolithic infrared focal plane array detectors patent-application, June 2003

Infrared detector array with improved spectral range and method for making the same patent-application, April 2004

Method and apparatus for image processing using weighted defective pixel replacement patent-application, May 2004

Infrared radiation imager having sub-pixelization and detector interdigitation patent-application, February 2006

Localized surface annealing of components for substrate processing chambers patent-application, January 2007

Microlensed focal plane array (FPA) using sub-pixel de-selection for improved operability patent-application, August 2007

Method for Assessment of Material Defects patent-application, December 2009

Defect Detection and Response patent-application, March 2010

Digital readout method and apparatus patent-application, September 2010

Complementary Pixel Reconstruction patent-application, December 2011

Photodetection patent-application, March 2012

Device and Method for Manufacturing Active Matrix Substrate, and Device and Method for Manufacturing Display Panel patent-application, March 2012

Uncooled Infrared Imaging Element and Manufacturing Method Thereof patent-application, September 2012

Method of Cadmium Molecular Beam Based Anneals for Manufacture of HgCdTe Photodiode Arrays patent-application, October 2012

System and Method for Removing Oxide from a Sensor Clip Assembly patent-application, November 2012

Focal Plane Array and Method for Manufacturing the Same patent-application, January 2013

Self Correcting Portable Digital Radiography Detector, Methods and Systems for Same patent-application, July 2013

Thermal Imaging Camera with Repositionable Active Portions of Focal Plane Array patent-application, May 2014

Response of machining-damaged single-crystalline silicon wafers to nanosecond pulsed laser irradiation journal, March 2007

Compact, thermally efficient focal plane array and testing and repair thereof
patent, September 1992

A-dual band IR sensor having two monolithically integrated staring detector arrays for simultaneous, coincident image readout
patent, April 1996

Method of improving the spectral response and dark current characteristics of an image gathering detector
patent, November 1998

Method for correcting a defect in a liquid crystal panel
patent, November 1999

Non-thermal process for annealing crystalline materials
patent, December 1999

Infrared focal plane array
patent, February 2000

Digital offset corrector
patent, August 2001

Thermal mismatch compensation technique for integrated circuit assemblies
patent, January 2004

Filtering systems and methods for infrared image processing
patent, May 2012

Staring focal plane sensor systems and methods for imaging large dynamic range scenes
patent, July 2014

Modified hybrid infrared focal plane array architecture for large scaling
patent, September 2015

Monolithic infrared focal plane array detectors
patent-application, June 2003

Infrared detector array with improved spectral range and method for making the same
patent-application, April 2004

Method and apparatus for image processing using weighted defective pixel replacement
patent-application, May 2004

Infrared radiation imager having sub-pixelization and detector interdigitation
patent-application, February 2006

Localized surface annealing of components for substrate processing chambers
patent-application, January 2007

Microlensed focal plane array (FPA) using sub-pixel de-selection for improved operability
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Method for Assessment of Material Defects
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Defect Detection and Response
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Digital readout method and apparatus
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Complementary Pixel Reconstruction
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Device and Method for Manufacturing Active Matrix Substrate, and Device and Method for Manufacturing Display Panel
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Uncooled Infrared Imaging Element and Manufacturing Method Thereof
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