Title: High resistivity iron-based, thermally stable magnetic material for on-chip integrated inductors

Abstract

An on-chip magnetic structure includes a palladium activated seed layer and a substantially amorphous magnetic material disposed onto the palladium activated seed layer. The substantially amorphous magnetic material includes nickel in a range from about 50 to about 80 atomic % (at. %) based on the total number of atoms of the magnetic material, iron in a range from about 10 to about 50 at. % based on the total number of atoms of the magnetic material, and phosphorous in a range from about 0.1 to about 30 at. % based on the total number of atoms of the magnetic material. The magnetic material can include boron in a range from about 0.1 to about 5 at. % based on the total number of atoms of the magnetic material.

Inventors:

Deligianni, Hariklia; Gallagher, William J.; Mason, Maurice; O'Sullivan, Eugene J.; Romankiw, Lubomyr T.; Wang, Naigang

Issue Date:

2017-10-17

Research Org.:

International Business Machines Corp., Armonk, NY (United States)

Sponsoring Org.:

USDOE

OSTI Identifier:

1399783

Patent Number(s):

9793336

Application Number:

15/410,987

Assignee:

INTERNATIONAL BUSIENSS MACHINES CORPORATION

Patent Classifications (CPCs):

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01F - MAGNETS

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H01L23/5227 - {Inductive arrangements or effects of, or between, wiring layers
H01L23/53242 - {the principal metal being a noble metal, e.g. gold}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01F - MAGNETS

H01F1/04 - metals or alloys
H01F1/047 - Alloys characterised by their composition
H01F41/02 - for manufacturing cores, coils, or magnets

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H01L28/10 - {Inductors}
H01L21/288 - from a liquid, e.g. electrolytic deposition

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01F - MAGNETS

H01F41/26 - using electric currents {, e.g. electroplating}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H01L23/53209 - {based on metals, e.g. alloys, metal silicides

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01F - MAGNETS

H01F41/046 - {structurally combined with ferromagnetic material}

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DOE Contract Number:  

B601996

Resource Type:

Patent

Resource Relation:

Patent File Date: 2017 Jan 20

Country of Publication:

United States

Language:

English

Subject:

36 MATERIALS SCIENCE