High resistivity iron-based, thermally stable magnetic material for on-chip integrated inductors
Abstract
An on-chip magnetic structure includes a palladium activated seed layer and a substantially amorphous magnetic material disposed onto the palladium activated seed layer. The substantially amorphous magnetic material includes nickel in a range from about 50 to about 80 atomic % (at. %) based on the total number of atoms of the magnetic material, iron in a range from about 10 to about 50 at. % based on the total number of atoms of the magnetic material, and phosphorous in a range from about 0.1 to about 30 at. % based on the total number of atoms of the magnetic material. The magnetic material can include boron in a range from about 0.1 to about 5 at. % based on the total number of atoms of the magnetic material.
- Inventors:
- Issue Date:
- Research Org.:
- International Business Machines Corp., Armonk, NY (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1399783
- Patent Number(s):
- 9793336
- Application Number:
- 15/410,987
- Assignee:
- INTERNATIONAL BUSIENSS MACHINES CORPORATION
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01F - MAGNETS
- DOE Contract Number:
- B601996
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2017 Jan 20
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Deligianni, Hariklia, Gallagher, William J., Mason, Maurice, O'Sullivan, Eugene J., Romankiw, Lubomyr T., and Wang, Naigang. High resistivity iron-based, thermally stable magnetic material for on-chip integrated inductors. United States: N. p., 2017.
Web.
Deligianni, Hariklia, Gallagher, William J., Mason, Maurice, O'Sullivan, Eugene J., Romankiw, Lubomyr T., & Wang, Naigang. High resistivity iron-based, thermally stable magnetic material for on-chip integrated inductors. United States.
Deligianni, Hariklia, Gallagher, William J., Mason, Maurice, O'Sullivan, Eugene J., Romankiw, Lubomyr T., and Wang, Naigang. Tue .
"High resistivity iron-based, thermally stable magnetic material for on-chip integrated inductors". United States. https://www.osti.gov/servlets/purl/1399783.
@article{osti_1399783,
title = {High resistivity iron-based, thermally stable magnetic material for on-chip integrated inductors},
author = {Deligianni, Hariklia and Gallagher, William J. and Mason, Maurice and O'Sullivan, Eugene J. and Romankiw, Lubomyr T. and Wang, Naigang},
abstractNote = {An on-chip magnetic structure includes a palladium activated seed layer and a substantially amorphous magnetic material disposed onto the palladium activated seed layer. The substantially amorphous magnetic material includes nickel in a range from about 50 to about 80 atomic % (at. %) based on the total number of atoms of the magnetic material, iron in a range from about 10 to about 50 at. % based on the total number of atoms of the magnetic material, and phosphorous in a range from about 0.1 to about 30 at. % based on the total number of atoms of the magnetic material. The magnetic material can include boron in a range from about 0.1 to about 5 at. % based on the total number of atoms of the magnetic material.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2017},
month = {10}
}
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