High resistivity iron-based, thermally stable magnetic material for on-chip integrated inductors

Title: High resistivity iron-based, thermally stable magnetic material for on-chip integrated inductors

An on-chip magnetic structure includes a palladium activated seed layer and a substantially amorphous magnetic material disposed onto the palladium activated seed layer. The substantially amorphous magnetic material includes nickel in a range from about 50 to about 80 atomic % (at. %) based on the total number of atoms of the magnetic material, iron in a range from about 10 to about 50 at. % based on the total number of atoms of the magnetic material, and phosphorous in a range from about 0.1 to about 30 at. % based on the total number of atoms of the magnetic material. The magnetic material can include boron in a range from about 0.1 to about 5 at. % based on the total number of atoms of the magnetic material.

Inventors:: Deligianni, Hariklia; Gallagher, William J.; Mason, Maurice; O'Sullivan, Eugene J.; Romankiw, Lubomyr T.; Wang, Naigang

Issue Date:: 2017-10-17

OSTI Identifier:: 1399783

Assignee:: INTERNATIONAL BUSIENSS MACHINES CORPORATION OSTI

Patent Number(s):: 9,793,336

Application Number:: 15/410,987

Contract Number:: B601996

Resource Relation:: Patent File Date: 2017 Jan 20

Research Org:: International Business Machines Corporation, Armonk, NY (United States)

Sponsoring Org:: USDOE

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

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Other works cited in this record:

High resistivity soft magnetic material for miniaturized power converter
patent, September 2016

Deligianni, Hariklia; Gallagher, William; Kellock, Andrew
US Patent Document 9,437,668
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F9437668

High resistivity iron-based, thermally stable magnetic material for on-chip integrated inductors
patent, March 2017

Deligianni, Hariklia; Gallagher, William; Mason, Maurice
US Patent Document 9,590,026
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F9590026

High Resistivity Iron-Based, Thermally Stable Magnetic Material For On-Chip Integrated Inductors
patent-application, September 2016

Deligianni, Hariklia; Gallagher, William; Mason, Maurice
US Patent Application 14/666612; 20160284786
URL: http://appft.uspto.gov/netacgi/nph-Parser?Sect1=PTO1&Sect2=HITOFF&d=PG01&p=1&u=%2Fnetahtml%2FPTO%2Fsrchnum.html&r=1&f=G&l=50&s1=%2220160284786%22.PGNR.&OS=DN/20160284786&RS=DN/20160284786

High Resistivity Iron-Based, Thermally Stable Magnetic Material For On-Chip Integrated Inductors
patent-application, September 2016

Deligianni, Hariklia; Gallagher, William; Mason, Maurice
US Patent Application 14/744124; 20160284787
URL: http://appft.uspto.gov/netacgi/nph-Parser?Sect1=PTO1&Sect2=HITOFF&d=PG01&p=1&u=%2Fnetahtml%2FPTO%2Fsrchnum.html&r=1&f=G&l=50&s1=%2220160284787%22.PGNR.&OS=DN/20160284787&RS=DN/20160284787

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