Carbon nanotube temperature and pressure sensors

Ivanov, Ilia N.; Geohegan, David B.

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Title: Carbon nanotube temperature and pressure sensors

Abstract

The present invention, in one embodiment, provides a method of measuring pressure or temperature using a sensor including a sensor element composed of a plurality of carbon nanotubes. In one example, the resistance of the plurality of carbon nanotubes is measured in response to the application of temperature or pressure. The changes in resistance are then recorded and correlated to temperature or pressure. In one embodiment, the present invention provides for independent measurement of pressure or temperature using the sensors disclosed herein.

Inventors:: Ivanov, Ilia N.; Geohegan, David B.

Issue Date:: 2017-09-12

Research Org.:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1390067

Patent Number(s):: 9759622

Application Number:: 14/035,105

Assignee:: UT-BATTELLE, LLC

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

G - PHYSICS G01 - MEASURING G01K - MEASURING TEMPERATURE

Show more

B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
B82Y15/00 - Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
B82Y30/00 - Nanotechnology for materials or surface science, e.g. nanocomposites

G - PHYSICS G01 - MEASURING G01K - MEASURING TEMPERATURE
G01K2211/00 - Thermometers based on nanotechnology
G01K7/00 - Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat
G01K7/021 - {Particular circuit arrangements
G01K7/028 - {using microstructures, e.g. made of silicon}
G01K7/18 - the element being a linear resistance, e.g. platinum resistance thermometer

G - PHYSICS G01 - MEASURING G01L - MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
G01L1/20 - by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids
G01L19/00 - Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
G01L9/00 - Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements {
G01L9/0001 - {Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
G01L9/0002 - {using variations in ohmic resistance
G01L9/0005 - {using variations in capacitance

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10S977/742 - Carbon nanotubes, CNTs
Y10S977/955 - Of thermal property
Y10S977/956 - Of mechanical property

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DOE Contract Number:: AC05-00OR22725

Resource Type:: Patent

Resource Relation:: Patent File Date: 2013 Sep 24

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; 47 OTHER INSTRUMENTATION

Citation Formats


                    Ivanov, Ilia N., and Geohegan, David B. Carbon nanotube temperature and pressure sensors.  United States: N. p., 2017. 
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                    Ivanov, Ilia N., & Geohegan, David B. Carbon nanotube temperature and pressure sensors.  United States.

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                    Ivanov, Ilia N., and Geohegan, David B. Tue .  
        "Carbon nanotube temperature and pressure sensors".  United States.  https://www.osti.gov/servlets/purl/1390067.

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@article{osti_1390067,

  title        = {Carbon nanotube temperature and pressure sensors},

  author       = {Ivanov, Ilia N. and Geohegan, David B.},

  abstractNote = {The present invention, in one embodiment, provides a method of measuring pressure or temperature using a sensor including a sensor element composed of a plurality of carbon nanotubes. In one example, the resistance of the plurality of carbon nanotubes is measured in response to the application of temperature or pressure. The changes in resistance are then recorded and correlated to temperature or pressure. In one embodiment, the present invention provides for independent measurement of pressure or temperature using the sensors disclosed herein.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2017},

  month        = {9}

}

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Alcohol Vapor Sensors Based on Single-Walled Carbon Nanotube Field Effect Transistors
journal, July 2003

Someya, Takao; Small, Joshua; Kim, Philip
Nano Letters, Vol. 3, Issue 7, p. 877-881
https://doi.org/10.1021/nl034061h

Computational design of carbon nanotube electromechanical pressure sensors
journal, April 2004

Wu, Jian; Zang, Ji; Larade, Brian
Physical Review B, Vol. 69, Issue 15, Article No. 153406
https://doi.org/10.1103/PhysRevB.69.153406

Nanoelectronic Carbon Dioxide Sensors
journal, October 2004

Star, A.; Han, T.-R.; Joshi, V.
Advanced Materials, Vol. 16, Issue 22, p. 2049-2052
https://doi.org/10.1002/adma.200400322

Piezoresistance of carbon nanotubes on deformable thin-film membranes
journal, February 2005

Grow, Randal J.; Wang, Qian; Cao, Jien
Applied Physics Letters, Vol. 86, Issue 9, Article No. 093104
https://doi.org/10.1063/1.1872221

Fabrication of Single-Walled Carbon-Nanotube-Based Pressure Sensors
journal, February 2006

Stampfer, C.; Helbling, T.; Obergfell, D.
Nano Letters, Vol. 6, Issue 2, p. 233-237
https://doi.org/10.1021/nl052171d

Carbon Nanotube-Based Sensors
journal, March 2006

Sinha, Niraj; Ma, Jiazhi; Yeow, John T. W.
Journal of Nanoscience and Nanotechnology, Vol. 6, Issue 3, p. 573-590
https://doi.org/10.1166/jnn.2006.121

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Title: Carbon nanotube temperature and pressure sensors

Abstract

Citation Formats

Fluid temperature measuring device patent, January 1993

Composite condition detection apparatus for detecting static pressure, differential pressure and temperature of a process patent, October 1997

Sensor array-based system and method for rapid materials characterization patent, March 2003

Semiconductor and device nanotechnology and methods for their manufacture patent, September 2005

Optical polarized light source device and method of making same patent, October 2005

Quantum devices based on crystallized electron pairs and methods for their manufacture and use patent, March 2006

Nanowire, circuit incorporating nanowire, and methods of selecting conductance of the nanowire and configuring the circuit patent, August 2006

Resistance element, method of manufacturing the same, and thermistor patent, May 2007

Nanowire Filament patent, November 2007

Nanoscale wires and related devices patent, November 2007

Nanotube semiconductor structures with varying electrical properties patent, December 2007

Programmable crossbar signal processor with op-amp outputs patent, June 2008

Combined pressure and temperature sensor patent, October 2008

Contactless interconnect for transducers patent, March 2010

Molecular transistor circuits compatible with carbon nanotube sensors and transducers patent, December 2010

Nanotube and graphene semiconductor structures with varying electrical properties patent, October 2011

Thin film ceramic thermocouples patent, November 2011

Thermistor and electrical device employed with same patent, November 2011

Electromagnetic and thermal sensors using carbon nanotubes and methods of making same patent, February 2012

Circuit substrate for mounting electronic component and circuit substrate assembly having same patent, October 2012

Apparatus and associated methods patent, January 2014

Nanotube resonator devices patent, May 2014

Fabrication of twisted and non-twisted nanofiber yarns patent, January 2015

Hybrid fibers, devices using hybrid fibers, and methods for making hybrid fibers patent, January 2015

Integrated microelectronic package temperature sensor patent, May 2015

Method of preparing graphene nanoribbon arrays and sensor comprising the same patent, March 2017

Defect controlled nanotube sensor and method of production patent-application, February 2005

Electrosurgical instrument with replaceable cartridge patent-application, July 2005

Sensor Assemblies patent-application, September 2005

Probe for scanning thermal microscope patent-application, April 2007

Electronic component with heat transfer by boiling and condensation and method for producing same patent-application, January 2008

Hot-wire nano-anemometer patent-application, April 2008

Energy storage devices and composite articles associated with the same patent-application, September 2008

Systems And Methods For Electrical Contacts To Arrays Of Vertically Aligned Nanorods patent-application, September 2008

Molecular Transistor Circuits Compatible With Carbon Nanotube Sensors And Transducers patent-application, September 2008

Electromagnetic and Thermal Sensors Using Carbon Nanotubes and Methods of Making Same patent-application, October 2008

Methods And Devices For Controlling Thermal Conductivity And Thermoelectric Power Of Semiconductor Nanowires patent-application, January 2009

Temporary Planar Electrical Contact Device And Method Using Vertically-Compressible Nanotube Contact Structures patent-application, May 2009

Methods of Fabricating Nanostructures snd Nanowires snd Devices Fabricated Therefrom patent-application, January 2010

Flexible Thin Metal Film Thermal Sensing System patent-application, May 2010

Use of Noble Metal Nanoparticles As Light Absorbers and Heat Generators In Thermal Photodetectors, Sensors and Microelecromechanical Devices patent-application, May 2010

Nanoscale wires and related devices patent-application, June 2010

Monitoring devices and processes based on transformation, destruction and conversion of nanostructures patent-application, January 2011

EMI/RF Shielding of Thermocouples patent-application, January 2011

Temporary Planar Electrical Contact Device And Method Using Vertically-Compressible Nanotube Contact Structures patent-application, January 2011

Spatially Resolved Temperature Measurement Inside A Spatial Detection Region patent-application, May 2011

PH Measurement For Sequencing Of DNA patent-application, July 2011

Reestanding Carbon Nanotube Networks Based Temperature Sensor patent-application, September 2011

Sensing System and Method patent-application, January 2012

Warming Therapy Device Including Heated Mattress Assembly patent-application, January 2012

SPM Probe and Inspection Device for Light Emission Unit patent-application, March 2012

Temperature Sensor Using Temperature Sensing Devices patent-application, August 2012

Electrochemical Methods For Wire Bonding patent-application, June 2013

Temperature Sensor patent-application, August 2013

Nanowire Thermoelectric Infrared Detector patent-application, September 2013

Hybrid Nanostructure Array patent-application, October 2013

Systems And Methods For Structural Sensing patent-application, September 2014

Nanowire Thermoelectric Infrared Detector patent-application, November 2014

Mono-Metallic Thermocouples patent-application, November 2014

Connecting and Bonding Adjacent Layers with Nanostructures patent-application, December 2014

Thermoelectric Micro-Platform for Cooling and Temperature Sensing patent-application, July 2015

Ammonia Nanosensors, and Environmental Control System patent-application, May 2016

The effect of annealing on the electrical and thermal transport properties of macroscopic bundles of long multi-wall carbon nanotubes journal, January 2007

Metallic resistivity in crystalline ropes of single-wall carbon nanotubes journal, February 1997

Metal-insulator transition in doped single-wall carbon nanotubes journal, April 2005

Alcohol Vapor Sensors Based on Single-Walled Carbon Nanotube Field Effect Transistors journal, July 2003

Computational design of carbon nanotube electromechanical pressure sensors journal, April 2004

Nanoelectronic Carbon Dioxide Sensors journal, October 2004

Piezoresistance of carbon nanotubes on deformable thin-film membranes journal, February 2005

Fabrication of Single-Walled Carbon-Nanotube-Based Pressure Sensors journal, February 2006

Carbon Nanotube-Based Sensors journal, March 2006

Fluid temperature measuring device
patent, January 1993

Composite condition detection apparatus for detecting static pressure, differential pressure and temperature of a process
patent, October 1997

Sensor array-based system and method for rapid materials characterization
patent, March 2003

Semiconductor and device nanotechnology and methods for their manufacture
patent, September 2005

Optical polarized light source device and method of making same
patent, October 2005

Quantum devices based on crystallized electron pairs and methods for their manufacture and use
patent, March 2006

Nanowire, circuit incorporating nanowire, and methods of selecting conductance of the nanowire and configuring the circuit
patent, August 2006

Resistance element, method of manufacturing the same, and thermistor
patent, May 2007

Nanowire Filament
patent, November 2007

Nanoscale wires and related devices
patent, November 2007

Nanotube semiconductor structures with varying electrical properties
patent, December 2007

Programmable crossbar signal processor with op-amp outputs
patent, June 2008

Combined pressure and temperature sensor
patent, October 2008

Contactless interconnect for transducers
patent, March 2010

Molecular transistor circuits compatible with carbon nanotube sensors and transducers
patent, December 2010

Nanotube and graphene semiconductor structures with varying electrical properties
patent, October 2011

Thin film ceramic thermocouples
patent, November 2011

Thermistor and electrical device employed with same
patent, November 2011

Electromagnetic and thermal sensors using carbon nanotubes and methods of making same
patent, February 2012

Circuit substrate for mounting electronic component and circuit substrate assembly having same
patent, October 2012

Apparatus and associated methods
patent, January 2014

Nanotube resonator devices
patent, May 2014

Fabrication of twisted and non-twisted nanofiber yarns
patent, January 2015

Hybrid fibers, devices using hybrid fibers, and methods for making hybrid fibers
patent, January 2015

Integrated microelectronic package temperature sensor
patent, May 2015

Method of preparing graphene nanoribbon arrays and sensor comprising the same
patent, March 2017

Defect controlled nanotube sensor and method of production
patent-application, February 2005

Electrosurgical instrument with replaceable cartridge
patent-application, July 2005

Sensor Assemblies
patent-application, September 2005

Probe for scanning thermal microscope
patent-application, April 2007

Electronic component with heat transfer by boiling and condensation and method for producing same
patent-application, January 2008

Hot-wire nano-anemometer
patent-application, April 2008

Energy storage devices and composite articles associated with the same
patent-application, September 2008

Systems And Methods For Electrical Contacts To Arrays Of Vertically Aligned Nanorods
patent-application, September 2008

Molecular Transistor Circuits Compatible With Carbon Nanotube Sensors And Transducers
patent-application, September 2008

Electromagnetic and Thermal Sensors Using Carbon Nanotubes and Methods of Making Same
patent-application, October 2008

Methods And Devices For Controlling Thermal Conductivity And Thermoelectric Power Of Semiconductor Nanowires
patent-application, January 2009

Temporary Planar Electrical Contact Device And Method Using Vertically-Compressible Nanotube Contact Structures
patent-application, May 2009

Methods of Fabricating Nanostructures snd Nanowires snd Devices Fabricated Therefrom
patent-application, January 2010

Flexible Thin Metal Film Thermal Sensing System
patent-application, May 2010

Use of Noble Metal Nanoparticles As Light Absorbers and Heat Generators In Thermal Photodetectors, Sensors and Microelecromechanical Devices
patent-application, May 2010

Nanoscale wires and related devices
patent-application, June 2010

Monitoring devices and processes based on transformation, destruction and conversion of nanostructures
patent-application, January 2011

EMI/RF Shielding of Thermocouples
patent-application, January 2011

Temporary Planar Electrical Contact Device And Method Using Vertically-Compressible Nanotube Contact Structures
patent-application, January 2011

Spatially Resolved Temperature Measurement Inside A Spatial Detection Region
patent-application, May 2011

PH Measurement For Sequencing Of DNA
patent-application, July 2011

Reestanding Carbon Nanotube Networks Based Temperature Sensor
patent-application, September 2011

Sensing System and Method
patent-application, January 2012

Warming Therapy Device Including Heated Mattress Assembly
patent-application, January 2012

SPM Probe and Inspection Device for Light Emission Unit
patent-application, March 2012

Temperature Sensor Using Temperature Sensing Devices
patent-application, August 2012

Electrochemical Methods For Wire Bonding
patent-application, June 2013

Temperature Sensor
patent-application, August 2013

Nanowire Thermoelectric Infrared Detector
patent-application, September 2013

Hybrid Nanostructure Array
patent-application, October 2013

Systems And Methods For Structural Sensing
patent-application, September 2014

Nanowire Thermoelectric Infrared Detector
patent-application, November 2014

Mono-Metallic Thermocouples
patent-application, November 2014

Connecting and Bonding Adjacent Layers with Nanostructures
patent-application, December 2014

Thermoelectric Micro-Platform for Cooling and Temperature Sensing
patent-application, July 2015

Ammonia Nanosensors, and Environmental Control System
patent-application, May 2016

The effect of annealing on the electrical and thermal transport properties of macroscopic bundles of long multi-wall carbon nanotubes
journal, January 2007

Metallic resistivity in crystalline ropes of single-wall carbon nanotubes
journal, February 1997

Metal-insulator transition in doped single-wall carbon nanotubes
journal, April 2005

Alcohol Vapor Sensors Based on Single-Walled Carbon Nanotube Field Effect Transistors
journal, July 2003

Computational design of carbon nanotube electromechanical pressure sensors
journal, April 2004

Nanoelectronic Carbon Dioxide Sensors
journal, October 2004

Piezoresistance of carbon nanotubes on deformable thin-film membranes
journal, February 2005

Fabrication of Single-Walled Carbon-Nanotube-Based Pressure Sensors
journal, February 2006

Carbon Nanotube-Based Sensors
journal, March 2006