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Title: MEMS vibrating-beam accelerometer with piezoelectric drive

A high-temperature drive component for a double-ended tuning fork (DETF). The drive component attaches to a surface of at least one of the tines. The drive component includes at least one piezoelectric trace sandwiched at least partially between two electrical traces. At least one of the tines includes a doped silicon base with drive component located thereon. One of the electrical traces is electrically connected to the doped silicon base and the other is electrically isolated from the doped silicon base.
Inventors:
;
Issue Date:
OSTI Identifier:
1390062
Assignee:
Honeywell International Inc. DOEEE
Patent Number(s):
9,759,739
Application Number:
13/019,913
Contract Number:
EE0002754
Resource Relation:
Patent File Date: 2011 Feb 02
Research Org:
Honeywell International Inc. Morris Plains, NJ (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 47 OTHER INSTRUMENTATION

Other works cited in this record:

Force-Transducers
patent, June 1972

Microresonator of double-ended tuning fork configuration
patent, September 1984

Counting scale and load cell assembly therefor
patent, August 1995

Vibrating beam force-frequency transducer
patent, November 1996

Tuning fork with symmetrical mass balancing and reduced quadrature error
patent, March 2004

Trapped charge field bias vibrating beam accelerometer
patent, April 2005

Actuator having doped silicon arms and method of making the same
patent, May 2006

Optically coupled resonant pressure sensor
patent, May 2008

Optical and electronic interface for optically coupled resonators
patent, October 2008

Method of manufacturing a tuning fork with reduced quadrature errror and symmetrical mass balancing
patent, April 2009

Optically coupled resonator
patent, October 2009

Double-ended tuning fork type piezoelectric resonator and pressure sensor
patent, March 2010

Methods for manufacturing tuning-fork type piezoelectric vibrating devices
patent, August 2010

Acceleration sensor
patent, September 2010

Anchor/support design for MEMS resonators
patent, August 2011

Pressure sensor
patent, January 2012

Pressure sensor element and pressure sensor
patent, January 2012

Tuning fork and method with reduced quadrature error and symmetrical mass balancing
patent-application, February 2002

Optically Coupled Resonator
patent-application, September 2006

Acceleration Sensor
patent-application, April 2008

Double-Ended Tuning Fork Type Piezoelectric Resonator And Pressure Sensor
patent-application, June 2009

Angular Velocity Sensor And Method Of Manufacturing The Same
patent-application, January 2010

Angular Velocity Sensor
patent-application, February 2010

Manufacturing Method Of Piezoelectric Device
patent-application, July 2011

Acceleration Sensor And Acceleration Detecting Apparatus
patent-application, July 2011

Acceleration Sensor
patent-application, September 2011

An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer
journal, February 2009
  • Chen, Deyong; Wu, Zhengwei; Liu, Lei
  • Sensors, Vol. 9, Issue 3, p. 1330-1338
  • DOI: 10.3390/s90301330

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