Global to push GA events into
skip to main content

Title: MEMS vibrating-beam accelerometer with piezoelectric drive

A high-temperature drive component for a double-ended tuning fork (DETF). The drive component attaches to a surface of at least one of the tines. The drive component includes at least one piezoelectric trace sandwiched at least partially between two electrical traces. At least one of the tines includes a doped silicon base with drive component located thereon. One of the electrical traces is electrically connected to the doped silicon base and the other is electrically isolated from the doped silicon base.
Inventors:
;
Issue Date:
OSTI Identifier:
1390062
Assignee:
Honeywell International Inc. DOEEE
Patent Number(s):
9,759,739
Application Number:
13/019,913
Contract Number:
EE0002754
Resource Relation:
Patent File Date: 2011 Feb 02
Research Org:
Honeywell International Inc. Morris Plains, NJ (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 47 OTHER INSTRUMENTATION

Works referenced in this record:

Acceleration Sensor
patent-application, September 2011

An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer
journal, February 2009
  • Chen, Deyong; Wu, Zhengwei; Liu, Lei
  • Sensors, Vol. 9, Issue 3, p. 1330-1338
  • DOI: 10.3390/s90301330