Particle and chemical control using tunnel flow
Abstract
An apparatus for contaminant control, having: a first optical assembly including: a first light homogenizer tunnel with: a first end connected to an extreme ultra-violet light source, a second end in communication with a destination chamber, a first enclosed space, and, a first gas input arranged to introduce a first gas such that the first gas flows in a first direction toward the first end and in a second direction toward the second end. The apparatus alternately having: a second optical assembly including: a second light homogenizer tunnel with: a third end connected to an extreme ultra-violet light source, a fourth end in communication with a destination chamber, a second enclosed space, a diffusion barrier tube including: a fifth end facing the fourth end and a sixth end in communication with a destination chamber, and a second gas input between the second light homogenizer tunnel and the diffusion tube.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1389856
- Patent Number(s):
- 9759912
- Application Number:
- 14/034,273
- Assignee:
- KLA-Tencor Corporation
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2013 Sep 23
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Chilese, Frank, Delgado, Gildardo R., Wack, Daniel, and Torczynski, John R. Particle and chemical control using tunnel flow. United States: N. p., 2017.
Web.
Chilese, Frank, Delgado, Gildardo R., Wack, Daniel, & Torczynski, John R. Particle and chemical control using tunnel flow. United States.
Chilese, Frank, Delgado, Gildardo R., Wack, Daniel, and Torczynski, John R. Tue .
"Particle and chemical control using tunnel flow". United States. https://www.osti.gov/servlets/purl/1389856.
@article{osti_1389856,
title = {Particle and chemical control using tunnel flow},
author = {Chilese, Frank and Delgado, Gildardo R. and Wack, Daniel and Torczynski, John R.},
abstractNote = {An apparatus for contaminant control, having: a first optical assembly including: a first light homogenizer tunnel with: a first end connected to an extreme ultra-violet light source, a second end in communication with a destination chamber, a first enclosed space, and, a first gas input arranged to introduce a first gas such that the first gas flows in a first direction toward the first end and in a second direction toward the second end. The apparatus alternately having: a second optical assembly including: a second light homogenizer tunnel with: a third end connected to an extreme ultra-violet light source, a fourth end in communication with a destination chamber, a second enclosed space, a diffusion barrier tube including: a fifth end facing the fourth end and a sixth end in communication with a destination chamber, and a second gas input between the second light homogenizer tunnel and the diffusion tube.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2017},
month = {9}
}
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