Avalanche diode having reduced dark current and method for its manufacture
Abstract
An avalanche diode includes an absorption region in a germanium body epitaxially grown on a silicon body including a multiplication region. Aspect-ratio trapping is used to suppress dislocation growth in the vicinity of the absorption region.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1377852
- Patent Number(s):
- 9748429
- Application Number:
- 14/870,195
- Assignee:
- National Technology & Engineering Solutions of Sandia, LLC
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2015 Sep 30
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Davids, Paul, Starbuck, Andrew Lee, and Pomerene, Andrew T. S. Avalanche diode having reduced dark current and method for its manufacture. United States: N. p., 2017.
Web.
Davids, Paul, Starbuck, Andrew Lee, & Pomerene, Andrew T. S. Avalanche diode having reduced dark current and method for its manufacture. United States.
Davids, Paul, Starbuck, Andrew Lee, and Pomerene, Andrew T. S. Tue .
"Avalanche diode having reduced dark current and method for its manufacture". United States. https://www.osti.gov/servlets/purl/1377852.
@article{osti_1377852,
title = {Avalanche diode having reduced dark current and method for its manufacture},
author = {Davids, Paul and Starbuck, Andrew Lee and Pomerene, Andrew T. S.},
abstractNote = {An avalanche diode includes an absorption region in a germanium body epitaxially grown on a silicon body including a multiplication region. Aspect-ratio trapping is used to suppress dislocation growth in the vicinity of the absorption region.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2017},
month = {8}
}
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