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Title: Thermal evaporation sources for wide-area deposition

Abstract

A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.

Inventors:
;
Issue Date:
Research Org.:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1374545
Patent Number(s):
9726430
Application Number:
14/625,433
Assignee:
JLN SOLAR, INC.
Patent Classifications (CPCs):
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
F - MECHANICAL ENGINEERING F27 - FURNACES F27B - FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL
DOE Contract Number:  
ADJ-1-30630-12
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015 Feb 18
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Birkmire, Robert W., and Hanket, Gregory M. Thermal evaporation sources for wide-area deposition. United States: N. p., 2017. Web.
Birkmire, Robert W., & Hanket, Gregory M. Thermal evaporation sources for wide-area deposition. United States.
Birkmire, Robert W., and Hanket, Gregory M. Tue . "Thermal evaporation sources for wide-area deposition". United States. https://www.osti.gov/servlets/purl/1374545.
@article{osti_1374545,
title = {Thermal evaporation sources for wide-area deposition},
author = {Birkmire, Robert W. and Hanket, Gregory M.},
abstractNote = {A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2017},
month = {8}
}

Works referenced in this record:

Method for continuous deposition by vacuum evaporation
patent, April 1982


Apparatus for continuous deposition by vacuum evaporation
patent, August 1983


Method of using an evaporation source
patent, November 1985


Arsenic atom source
patent, July 1996


Fabrication of thin-film, flexible photovoltaic module
patent, April 2002


Multiple-nozzle thermal evaporation source
patent, May 2003


Multiple-nozzle thermal evaporation source
patent, January 2006


Thermal evaporation sources for wide-area deposition
patent, March 2015


Linear aperture deposition apparatus and coating process
patent-application, August 2001


Fabrication system and manufacturing method of light emitting device
patent-application, July 2004


Apparatus and method for metal plasma immersion ion implantation and metal plasma immersion ion deposition
patent-application, March 2005


Multi-layered radiant thermal evaporator and method of use
patent-application, April 2005


Dispensing System For Alkali Metals Capable Of Releasing A High Quantity Of Metals
patent-application, November 2007


Mixtures for Evaporation of Lithium and Lithium Dispensers
patent-application, February 2008


Development of large-area CIGS modules
journal, April 2002