Thermal evaporation sources for wide-area deposition

Birkmire, Robert W.; Hanket, Gregory M.

Advanced Search OptionsAdvanced Search queries use a traditional Term Search. For more info, see our FAQ.

All Fields:

Patent Title:

Abstract:

Assignee:

Inventor(s):

Patent Number:

Patent Classification (CPC):

All Classifications
A - human necessities
A01 - agriculture
A21 - baking
A22 - butchering
A23 - foods or foodstuffs
A24 - tobacco
A41 - wearing apparel
A42 - headwear
A43 - footwear
A44 - haberdashery
A45 - hand or travelling articles
A46 - brushware
A47 - furniture
A61 - medical or veterinary science
A62 - life-saving
A63 - sports
A99 - subject matter not otherwise provided for in this section
B - performing operations
B01 - physical or chemical processes or apparatus in general
B02 - crushing, pulverising, or disintegrating
B03 - separation of solid materials using liquids or using pneumatic tables or jigs
B04 - centrifugal apparatus or machines for carrying-out physical or chemical processes
B05 - spraying or atomising in general
B06 - generating or transmitting mechanical vibrations in general
B07 - separating solids from solids
B08 - cleaning
B09 - disposal of solid waste
B21 - mechanical metal-working without essentially removing material
B22 - casting
B23 - machine tools
B24 - grinding
B25 - hand tools
B26 - hand cutting tools
B27 - working or preserving wood or similar material
B28 - working cement, clay, or stone
B29 - working of plastics
B30 - presses
B31 - making articles of paper, cardboard or material worked in a manner analogous to paper
B32 - layered products
B33 - additive manufacturing technology
B41 - printing
B42 - bookbinding
B43 - writing or drawing implements
B44 - decorative arts
B60 - vehicles in general
B61 - railways
B62 - land vehicles for travelling otherwise than on rails
B63 - ships or other waterborne vessels
B64 - aircraft
B65 - conveying
B66 - hoisting
B67 - opening, closing {or cleaning} bottles, jars or similar containers
B68 - saddlery
B81 - microstructural technology
B82 - nanotechnology
B99 - subject matter not otherwise provided for in this section
C - chemistry
C01 - inorganic chemistry
C02 - treatment of water, waste water, sewage, or sludge
C03 - glass
C04 - cements
C05 - fertilisers
C06 - explosives
C07 - organic chemistry
C08 - organic macromolecular compounds
C09 - dyes
C10 - petroleum, gas or coke industries
C11 - animal or vegetable oils, fats, fatty substances or waxes
C12 - biochemistry
C13 - sugar industry
C14 - skins
C21 - metallurgy of iron
C22 - metallurgy
C23 - coating metallic material
C25 - electrolytic or electrophoretic processes
C30 - crystal growth
C40 - combinatorial technology
C99 - subject matter not otherwise provided for in this section
D - textiles
D01 - natural or man-made threads or fibres
D02 - yarns
D03 - weaving
D04 - braiding
D05 - sewing
D06 - treatment of textiles or the like
D07 - ropes
D10 - indexing scheme associated with sublasses of section d, relating to textiles
D21 - paper-making
D99 - subject matter not otherwise provided for in this section
E - fixed constructions
E01 - construction of roads, railways, or bridges
E02 - hydraulic engineering
E03 - water supply
E04 - building
E05 - locks
E06 - doors, windows, shutters, or roller blinds in general
E21 - earth drilling
E99 - subject matter not otherwise provided for in this section
F - mechanical engineering
F01 - machines or engines in general
F02 - combustion engines
F03 - machines or engines for liquids
F04 - positive - displacement machines for liquids
F05 - indexing schemes relating to engines or pumps in various subclasses of classes f01-f04
F15 - fluid-pressure actuators
F16 - engineering elements and units
F17 - storing or distributing gases or liquids
F21 - lighting
F22 - steam generation
F23 - combustion apparatus
F24 - heating
F25 - refrigeration or cooling
F26 - drying
F27 - furnaces
F28 - heat exchange in general
F41 - weapons
F42 - ammunition
F99 - subject matter not otherwise provided for in this section
G - physics
G01 - measuring
G02 - optics
G03 - photography
G04 - horology
G05 - controlling
G06 - computing
G07 - checking-devices
G08 - signalling
G09 - education
G10 - musical instruments
G11 - information storage
G12 - instrument details
G16 - information and communication technology [ict] specially adapted for specific application fields
G21 - nuclear physics
G99 - subject matter not otherwise provided for in this section
H - electricity
H01 - basic electric elements
H02 - generation
H03 - basic electronic circuitry
H04 - electric communication technique
H05 - electric techniques not otherwise provided for
H99 - subject matter not otherwise provided for in this section
Y - new / cross sectional technologies
Y02 - technologies or applications for mitigation or adaptation against climate change
Y04 - information or communication technologies having an impact on other technology areas
Y10 - technical subjects covered by former uspc

More Options ...

Title: Thermal evaporation sources for wide-area deposition

Abstract

A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.

Inventors:: Birkmire, Robert W.; Hanket, Gregory M.

Issue Date:: Tue Aug 08 00:00:00 EDT 2017

Research Org.:: National Renewable Energy Laboratory (NREL), Golden, CO (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1374545

Patent Number(s):: 9726430

Application Number:: 14/625,433

Assignee:: JLN SOLAR, INC.

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

F - MECHANICAL ENGINEERING F27 - FURNACES F27B - FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL

Show more

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/243 - {Crucibles for source material
C23C14/543 - {using measurement on the vapor source}

F - MECHANICAL ENGINEERING F27 - FURNACES F27B - FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL
F27B14/00 - Crucible or pot furnaces

Show less

DOE Contract Number:: ADJ-1-30630-12

Resource Type:: Patent

Resource Relation:: Patent File Date: 2015 Feb 18

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Birkmire, Robert W., and Hanket, Gregory M. Thermal evaporation sources for wide-area deposition.  United States: N. p., 2017. 
        Web.

Copy to clipboard


                    Birkmire, Robert W., & Hanket, Gregory M. Thermal evaporation sources for wide-area deposition.  United States.

Copy to clipboard


                    Birkmire, Robert W., and Hanket, Gregory M. Tue .  
        "Thermal evaporation sources for wide-area deposition".  United States.  https://www.osti.gov/servlets/purl/1374545.

Copy to clipboard


                    
@article{osti_1374545,

  title        = {Thermal evaporation sources for wide-area deposition},

  author       = {Birkmire, Robert W. and Hanket, Gregory M.},

  abstractNote = {A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Aug 08 00:00:00 EDT 2017},

  month        = {Tue Aug 08 00:00:00 EDT 2017}

}

Copy to clipboard

Patent:

Save / Share:

Export Metadata

Save to My Library

Works referenced in this record:

Method for continuous deposition by vacuum evaporation
patent, April 1982

Baron, Bill N.; Rocheleau, Richard E.; Russell, T. W. Fraser
US Patent Document 4,325,986
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4325986

Apparatus for continuous deposition by vacuum evaporation
patent, August 1983

Baron, Bill N.; Rocheleau, Richard E.; Russell, T. W. Fraser
US Patent Document 4,401,052
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4401052

Method of using an evaporation source
patent, November 1985

Moriguchi, Hiroyuki; Matsumoto, Masanori; Nishiwaki, Akira
US Patent Document 4,551,303
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4551303

Arsenic atom source
patent, July 1996

Leone, Stephen R.; Alstrin, April Lynn; Strupp, Paul
US Patent Document 5,541,407
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5541407

Fabrication of thin-film, flexible photovoltaic module
patent, April 2002

Wendt, Robert G.; Hanket, Gregory M.; Birkmire, Robert W.
US Patent Document 6,372,538
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6372538

Multiple-nozzle thermal evaporation source
patent, May 2003

Eser, Erten; Hanket, Gregory M.
US Patent Document 6,562,405
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6562405

Multiple-nozzle thermal evaporation source
patent, January 2006

Eser, Erten; Hanket, Gregory M.
US Patent Document 6,982,005
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6982005

Thermal evaporation sources for wide-area deposition
patent, March 2015

Birkmire, Robert W.; Hanket, Gregory M.
US Patent Document 8,986,455
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8986455

Linear aperture deposition apparatus and coating process
patent-application, August 2001

Witzman, Matthew; Bradley, Richard; Lantman, Christopher
US Patent Application 09/758839; 20010011524
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20010011524

Fabrication system and manufacturing method of light emitting device
patent-application, July 2004

Yamazaki, Shunpei; Kuwabara, Hideaki; Murakami, Masakazu
US Patent Application 10/664642; 20040123804
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040123804

Evaporation source for deposition process and insulation fixing plate, and heating wire winding plate and method for fixing heating wire
patent-application, February 2005

Lee, Jae-Gyoung; Kim, Shin-Cheul; Myoung, Noh-Hoon
US Patent Application 10/943486; 20050034672
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050034672

Apparatus and method for metal plasma immersion ion implantation and metal plasma immersion ion deposition
patent-application, March 2005

Wei, Ronghua; Booker, Thomas; Rincon, Christopher
US Patent Application 10/932925; 20050061251
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050061251

Multi-layered radiant thermal evaporator and method of use
patent-application, April 2005

Yang, Yimou; Martin, Kenneth; Misunas, Stanley
US Patent Application 10/678811; 20050072361
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050072361

Dispensing System For Alkali Metals Capable Of Releasing A High Quantity Of Metals
patent-application, November 2007

Giannantonio, Roberto; Cattaneo, Lorena; Bonucci, Antonio
US Patent Application 11/791559; 20070267434
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070267434

Mixtures for Evaporation of Lithium and Lithium Dispensers
patent-application, February 2008

Cattaneo, Lorena; Pirola, Simona; Maeda, Chiharu
US Patent Application 11/570816; 20080042102
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080042102

Vapor deposition apparatus for an organic vapor deposition material and a method for producing an organic film
patent-application, March 2009

Negishi, Toshio
US Patent Application 12/212030; 20090061090
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090061090

Development of large-area CIGS modules
journal, April 2002

Powalla, M.; Dimmler, B.
Solar Energy Materials and Solar Cells, Vol. 75, Issue 1-2, p. 27-34
https://doi.org/10.1016/S0927-0248(02)00103-4

Similar Records in DOE Patents and OSTI.GOV collections:

Thermal evaporation sources for wide-area deposition

Patent Birkmire, Robert W.; Hanket, Gregory M.

A thermal evaporation source includes: a crucible configured to contain a volume of evaporant and a vapor space above the evaporant; a manifold body having within it a hollow expansion chamber that is flowably connected to the vapor space via one or more restriction orifices; one or more effusion nozzles flowably connected to the expansion chamber and exiting an outer surface of the thermal evaporation source, the nozzle(s) oriented to direct an evaporant vapor flow out of the source vertically downward, in one or more horizontal directions, or in one or more directions intermediate between horizontal and vertically downward; andmore » « less
Full Text Available
Thermal evaporation sources for wide-area deposition

Patent Birkmire, Robert W.; Hanket, Gregory M.

A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.
Full Text Available
Thermal evaporation sources for wide-area deposition

Patent Birkmire, Robert W.; Hanket, Gregory M.

A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.
Full Text Available
Evaporation system and method for gas jet deposition of thin film materials

Patent Schmitt, Jerome J.; Halpern, Bret L.

A method and apparatus for depositing thin films of materials such as metals, oxides and nitrides at low temperature relies on a supersonic free jet of inert carrier gas to transport vapor species generated from an evaporation source to the surface of a substrate. Film deposition vapors are generated from solid film precursor materials, including those in the form of wires or powders. The vapor from these sources is carried downstream in a low pressure supersonic jet of inert gas to the surface of a substrate where the vapors deposit to form a thin film. A reactant gas can bemore » « less
Full Text Available
Transparent bridge for monitoring crypto-partitioned wide-area network

Patent Ramanujan, Ranga; Burnett, Benjamin L.

This disclosure is directed to monitoring a crypto-partitioned, or cipher-text, wide-area network (WAN). A first computing device may be situated in a plain-text portion of a first enclave behind a first inline network encryptor (INE). A second device may be positioned in a plain-text portion of a second enclave behind a second INE. The two enclaves may be separated by a cipher-text WAN, over which the two enclaved may communicate. The first computing device may receive a data packet from the second computing device. The first computing device may then determine contents of a header of the data packet. Themore » « less
Full Text Available

Similar Records

Title: Thermal evaporation sources for wide-area deposition

Abstract

Citation Formats

Method for continuous deposition by vacuum evaporation patent, April 1982

Apparatus for continuous deposition by vacuum evaporation patent, August 1983

Method of using an evaporation source patent, November 1985

Arsenic atom source patent, July 1996

Fabrication of thin-film, flexible photovoltaic module patent, April 2002

Multiple-nozzle thermal evaporation source patent, May 2003

Multiple-nozzle thermal evaporation source patent, January 2006

Thermal evaporation sources for wide-area deposition patent, March 2015

Linear aperture deposition apparatus and coating process patent-application, August 2001

Fabrication system and manufacturing method of light emitting device patent-application, July 2004

Evaporation source for deposition process and insulation fixing plate, and heating wire winding plate and method for fixing heating wire patent-application, February 2005

Apparatus and method for metal plasma immersion ion implantation and metal plasma immersion ion deposition patent-application, March 2005

Multi-layered radiant thermal evaporator and method of use patent-application, April 2005

Dispensing System For Alkali Metals Capable Of Releasing A High Quantity Of Metals patent-application, November 2007

Mixtures for Evaporation of Lithium and Lithium Dispensers patent-application, February 2008

Vapor deposition apparatus for an organic vapor deposition material and a method for producing an organic film patent-application, March 2009

Development of large-area CIGS modules journal, April 2002

Method for continuous deposition by vacuum evaporation
patent, April 1982

Apparatus for continuous deposition by vacuum evaporation
patent, August 1983

Method of using an evaporation source
patent, November 1985

Arsenic atom source
patent, July 1996

Fabrication of thin-film, flexible photovoltaic module
patent, April 2002

Multiple-nozzle thermal evaporation source
patent, May 2003

Multiple-nozzle thermal evaporation source
patent, January 2006

Thermal evaporation sources for wide-area deposition
patent, March 2015

Linear aperture deposition apparatus and coating process
patent-application, August 2001

Fabrication system and manufacturing method of light emitting device
patent-application, July 2004

Evaporation source for deposition process and insulation fixing plate, and heating wire winding plate and method for fixing heating wire
patent-application, February 2005

Apparatus and method for metal plasma immersion ion implantation and metal plasma immersion ion deposition
patent-application, March 2005

Multi-layered radiant thermal evaporator and method of use
patent-application, April 2005

Dispensing System For Alkali Metals Capable Of Releasing A High Quantity Of Metals
patent-application, November 2007

Mixtures for Evaporation of Lithium and Lithium Dispensers
patent-application, February 2008

Vapor deposition apparatus for an organic vapor deposition material and a method for producing an organic film
patent-application, March 2009

Development of large-area CIGS modules
journal, April 2002