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Title: Thermal evaporation sources for wide-area deposition

A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.
Inventors:
;
Issue Date:
OSTI Identifier:
1374545
Assignee:
JLN SOLAR, INC. NREL
Patent Number(s):
9,726,430
Application Number:
14/625,433
Contract Number:
ADJ-1-30630-12
Resource Relation:
Patent File Date: 2015 Feb 18
Research Org:
National Renewable Energy Lab. (NREL), Golden, CO (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Other works cited in this record:

Method for continuous deposition by vacuum evaporation
patent, April 1982

Apparatus for continuous deposition by vacuum evaporation
patent, August 1983

Method of using an evaporation source
patent, November 1985

Arsenic atom source
patent, July 1996

Fabrication of thin-film, flexible photovoltaic module
patent, April 2002

Multiple-nozzle thermal evaporation source
patent, May 2003

Multiple-nozzle thermal evaporation source
patent, January 2006

Thermal evaporation sources for wide-area deposition
patent, March 2015

Linear aperture deposition apparatus and coating process
patent-application, August 2001

Fabrication system and manufacturing method of light emitting device
patent-application, July 2004

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patent-application, February 2005

Apparatus and method for metal plasma immersion ion implantation and metal plasma immersion ion deposition
patent-application, March 2005

Multi-layered radiant thermal evaporator and method of use
patent-application, April 2005

Dispensing System For Alkali Metals Capable Of Releasing A High Quantity Of Metals
patent-application, November 2007

Mixtures for Evaporation of Lithium and Lithium Dispensers
patent-application, February 2008

Vapor deposition apparatus for an organic vapor deposition material and a method for producing an organic film
patent-application, March 2009

Development of large-area CIGS modules
journal, April 2002

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