skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles

Abstract

A block copolymer film having a line pattern with a high degree of long-range order is formed by a method that includes forming a block copolymer film on a substrate surface with parallel facets, and annealing the block copolymer film to form an annealed block copolymer film having linear microdomains parallel to the substrate surface and orthogonal to the parallel facets of the substrate. The line-patterned block copolymer films are useful for the fabrication of magnetic storage media, polarizing devices, and arrays of nanowires.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Univ. of California, Oakland, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1373919
Patent Number(s):
9718094
Application Number:
14/845,488
Assignee:
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B05 - SPRAYING OR ATOMISING IN GENERAL B05D - PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
DOE Contract Number:  
FG02-96ER45612
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015 Sep 04
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Russell, Thomas P., Hong, Sung Woo, Lee, Dong Hyun, Park, Soojin, and Xu, Ting. Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles. United States: N. p., 2017. Web.
Russell, Thomas P., Hong, Sung Woo, Lee, Dong Hyun, Park, Soojin, & Xu, Ting. Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles. United States.
Russell, Thomas P., Hong, Sung Woo, Lee, Dong Hyun, Park, Soojin, and Xu, Ting. Tue . "Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles". United States. https://www.osti.gov/servlets/purl/1373919.
@article{osti_1373919,
title = {Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles},
author = {Russell, Thomas P. and Hong, Sung Woo and Lee, Dong Hyun and Park, Soojin and Xu, Ting},
abstractNote = {A block copolymer film having a line pattern with a high degree of long-range order is formed by a method that includes forming a block copolymer film on a substrate surface with parallel facets, and annealing the block copolymer film to form an annealed block copolymer film having linear microdomains parallel to the substrate surface and orthogonal to the parallel facets of the substrate. The line-patterned block copolymer films are useful for the fabrication of magnetic storage media, polarizing devices, and arrays of nanowires.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2017},
month = {8}
}

Patent:

Save / Share:

Works referenced in this record:

Salt Complexation in Block Copolymer Thin Films
journal, November 2006


Long-Range Ordering of Diblock Copolymers Induced by Droplet Pinning
journal, November 2003


Characterization of pattern transfer in the fabrication of magnetic nanostructure arrays by block copolymer lithography
journal, June 2007


Dense arrays of ordered GaAs nanostructures by selective area growth on substrates patterned by block copolymer lithography
journal, March 2000


Ordered Block-Copolymer Assembly Using Nanoimprint Lithography
journal, September 2004


Spatially Controlled Fabrication of Nanoporous Block Copolymers
journal, October 2004


Patternable Block Copolymers
book, October 2005


Block copolymer patterns and templates
journal, September 2006


Hierarchical self-assembly of metal nanostructures on diblock copolymer scaffolds
journal, December 2001


Plasmonics-A Route to Nanoscale Optical Devices
journal, September 2001


Controlling Polymer-Surface Interactions with Random Copolymer Brushes
journal, March 1997


Tailored Polymer Surfaces
journal, January 1997


Self-Assembled Masks for the Transfer of Nanometer-Scale Patterns into Surfaces:  Characterization by AFM and LFM
journal, February 2002


Optical Alignment and Patterning of Nanoscale Microdomains in a Block Copolymer Thin Film
journal, April 2006


Block Copolymer Lithography
journal, November 2013


Large area dense nanoscale patterning of arbitrary surfaces
journal, July 2001


Double textured cylindrical block copolymer domains via directional solidification on a topographically patterned substrate
journal, August 2001


Large Area Orientation of Block Copolymer Microdomains in Thin Films via Directional Crystallization of a Solvent
journal, April 2001


Solvent-Induced Transition from Micelles in Solution to Cylindrical Microdomains in Diblock Copolymer Thin Films
journal, December 2007


Fabrication of Highly Ordered Silicon Oxide Dots and Stripes from Block Copolymer Thin Films
journal, February 2008


From Nanorings to Nanodots by Patterning with Block Copolymers
journal, June 2008


A Simple Route to Highly Oriented and Ordered Nanoporous Block Copolymer Templates
journal, April 2008


Macroscopic 10-Terabit-per-Square-Inch Arrays from Block Copolymers with Lateral Order
journal, February 2009


Aluminum nanowire polarizing grids: Fabrication and analysis
journal, May 2006


Diblock Copolymer Thin Film Melts on Striped, Heterogeneous Surfaces:  Parallel, Perpendicular and Mixed Lamellar Morphologies
journal, February 1999


Polymers on Nanoperiodic, Heterogeneous Surfaces
journal, March 1999


Propagation of Nanopatterned Substrate Templated Ordering of Block Copolymers in Thick Films
journal, February 2001


Patterned Magnetic Recording Media
journal, August 2001


Block copolymers as nanoscopic templates
journal, October 2000


Graphoepitaxy of Spherical Domain Block Copolymer Films
journal, August 2001


Patterning with block copolymer thin films
journal, February 2005


Sluggish Development of Parallel Lamellae at the Strongly Interacting Interface in Thin Films of Symmetric Diblock Copolymers
journal, December 2002


Directed Self-Assembly of Two Kinds of Nanoparticles Utilizing Monolayer Films of Diblock Copolymer Micelles
journal, May 2003


Faceting Kinetics of Stepped Si(113) Surfaces: A Time-Resolved X-Ray Scattering Study
journal, June 1995


Ultrathin Diblock Copolymer/Titanium Laminates—A Tool for Nanolithography
journal, August 1998


Micellar Inorganic-Polymer Hybrid Systems—A Tool for Nanolithography
journal, February 1999


A Combined Top–Down/Bottom–Up Approach to the Microscopic Localization of Metallic Nanodots
journal, December 2002


Directed Assembly of Block Copolymer Blends into Nonregular Device-Oriented Structures
journal, June 2005


Block copolymers and conventional lithography
journal, September 2006


Long-Range Ordered Thin Films of Block Copolymers Prepared by Zone-Casting and Their Thermal Conversion into Ordered Nanostructured Carbon
journal, May 2005


Spontaneous Vertical Ordering and Pyrolytic Formation of Nanoscopic Ceramic Patterns from Poly(styrene-b-ferrocenylsilane)
journal, February 2003


Predicting the Mesophases of Copolymer-Nanoparticle Composites
journal, June 2001


Overcoming Interfacial Interactions with Electric Fields
journal, May 2000


Ultrahigh-Density Nanowire Arrays Grown in Self-Assembled Diblock Copolymer Templates
journal, December 2000


Study of oriented block copolymers films obtained by roll-casting
journal, September 2002


Simulations of the Morphology of Cylinder-Forming Asymmetric Diblock Copolymer Thin Films on Nanopatterned Substrates
journal, March 2003


Etch rates for micromachining processing-part II
journal, December 2003


One-Dimensional Arrangements of Metal Nanoclusters
journal, April 2002


The influence of molecular weight on nanoporous polymer films
journal, October 2001


Block Copolymer Surface Reconstuction: A Reversible Route to Nanoporous Films
journal, September 2003


Interfacial Energy Effects on the Electric Field Alignment of Symmetric Diblock Copolymers
journal, August 2003


Templating the patterning of gold nanoparticles using a stained triblock copolymer film surface
journal, January 2003


Nano-Patterning for Patterned Media using Block-Copolymer
journal, January 2002


Nanofabrication of integrated magnetoelectronic devices using patterned self-assembled copolymer templates
journal, October 2002


Spin-Dependent Tunneling in Self-Assembled Cobalt-Nanocrystal Superlattices
journal, November 2000


Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication
journal, July 2001


Nanometer-Scale Pattern Registration and Alignment by Directed Diblock Copolymer Self-Assembly
journal, September 2004


Block Copolymer Nanocomposites: Perspectives for Tailored Functional Materials
journal, June 2005


Ordered Bicontinuous Nanoporous and Nanorelief Ceramic Films from Self Assembling Polymer Precursors
journal, November 1999


Formation of a Cobalt Magnetic Dot Array via Block Copolymer Lithography
journal, August 2001


Fabrication of nanostructures with long-range order using block copolymer lithography
journal, November 2002


Covalent stabilization of nanostructures: Robust block copolymer templates from novel thermoreactive systems
journal, January 2005

  • Drockenmuller, Eric; Li, Lucy Y. T.; Ryu, Du Yeol
  • Journal of Polymer Science Part A: Polymer Chemistry, Vol. 43, Issue 5, p. 1028-1037
  • https://doi.org/10.1002/pola.20553

Orientation of self-assembled block copolymer cylinders perpendicular to electric field in mesoscale film
journal, February 2003


Semiconductor Nanowires: From Self-Organization to Patterned Growth
journal, April 2006


Observed Substrate Topography-Mediated Lateral Patterning of Diblock Copolymer Films
journal, October 1997


Block Copolymer Thin Films: Physics and Applications
journal, August 2001


Nanoscale patterning using self-assembled polymers for semiconductor applications
journal, January 2001

  • Guarini, K. W.; Black, C. T.; Milkove, K. R.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 19, Issue 6, Article No. 2784
  • https://doi.org/10.1116/1.1421551

Process integration of self-assembled polymer templates into silicon nanofabrication
journal, January 2002

  • Guarini, K. W.; Black, C. T.; Zhang, Y.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, Article No. 2788
  • https://doi.org/10.1116/1.1521730

Nanotechnology with Soft Materials
journal, April 2003


Lithography with a mask of block copolymer microstructures
journal, March 1998

  • Harrison, Christopher
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 2, Article No. 544
  • https://doi.org/10.1116/1.589860

Block copolymers as bilevel resists
journal, September 1985

  • Hartney, M. A.; Novembre, A. E.; , F. S. Bates
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 3, Issue 5, Article No. 1346
  • https://doi.org/10.1116/1.582991

Block Copolymer Lithography: Merging “Bottom-Up” with “Top-Down” Processes
journal, December 2005


Thin Diblock Copolymer Films on Chemically Heterogeneous Surfaces
journal, October 1997


Transfer of a chemical substrate pattern into an island-forming diblock copolymer film
journal, December 1999


Solvent-induced microdomain orientation in polystyrene-b-poly(l-lactide) diblock copolymer thin films for nanopatterning
journal, October 2005


Impedance Characteristics of the Nanoporous Honeycomb Diamond Electrodes for Electrical Double-Layer Capacitor Applications
journal, May 2001


Modeling copolymer adsorption on laterally heterogeneous surfaces
journal, February 1991


Catalytic Activity of Supported Au Nanoparticles Deposited from Block Copolymer Micelles
journal, June 2003

  • Jaramillo, Thomas F.; Baeck, Sung-Hyeon; Cuenya, Beatriz Roldan
  • Journal of the American Chemical Society, Vol. 125, Issue 24, p. 7148-7149
  • https://doi.org/10.1021/ja029800v

Phase transition behavior in thin films of block copolymers by use of immiscible solvent vapors
journal, January 2011


Highly Oriented and Ordered Arrays from Block Copolymers via Solvent Evaporation
journal, February 2004


Nanoparticle-Induced Phase Transitions in Diblock-Copolymer Films
journal, November 2005


Enabling nanotechnology with self assembled block copolymer patterns
journal, October 2003


New Approaches to Nanofabrication:  Molding, Printing, and Other Techniques
journal, April 2005


Three-Dimensional Self-Assembly of Spherical Block Copolymer Domains into V-Shaped Grooves
journal, October 2006


Nanoring formation by direct-write inorganic electron-beam lithography
journal, July 2003


Fabrication of metal nanoring array by nanoimprint lithography (NIL) and reactive ion etching
journal, May 2007


Nanotailored Crystalline Morphology in Hexagonally Perforated Layers of a Self-Assembled PS-b-PEO Diblock Copolymer
journal, April 2002


Fabrication Approaches for Generating Complex Micro- and Nanopatterns on Polymeric Surfaces
journal, March 2008