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Title: Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles

A block copolymer film having a line pattern with a high degree of long-range order is formed by a method that includes forming a block copolymer film on a substrate surface with parallel facets, and annealing the block copolymer film to form an annealed block copolymer film having linear microdomains parallel to the substrate surface and orthogonal to the parallel facets of the substrate. The line-patterned block copolymer films are useful for the fabrication of magnetic storage media, polarizing devices, and arrays of nanowires.
Inventors:
; ; ; ;
Issue Date:
OSTI Identifier:
1373919
Assignee:
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA CHO
Patent Number(s):
9,718,094
Application Number:
14/845,488
Contract Number:
FG02-96ER45612
Resource Relation:
Patent File Date: 2015 Sep 04
Research Org:
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, Oakland, CA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

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