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Title: Graphene heat dissipating structure

Various technologies presented herein relate to forming one or more heat dissipating structures (e.g., heat spreaders and/or heat sinks) on a substrate, wherein the substrate forms part of an electronic component. The heat dissipating structures are formed from graphene, with advantage being taken of the high thermal conductivity of graphene. The graphene (e.g., in flake form) is attached to a diazonium molecule, and further, the diazonium molecule is utilized to attach the graphene to material forming the substrate. A surface of the substrate is treated to comprise oxide-containing regions and also oxide-free regions having underlying silicon exposed. The diazonium molecule attaches to the oxide-free regions, wherein the diazonium molecule bonds (e.g., covalently) to the exposed silicon. Attachment of the diazonium plus graphene molecule is optionally repeated to enable formation of a heat dissipating structure of a required height.
Inventors:
; ; ; ;
Issue Date:
OSTI Identifier:
1373709
Assignee:
National Technology & Engineering Solutions of Sandia, LLC SNL-A
Patent Number(s):
9,721,867
Application Number:
14/662,091
Contract Number:
AC04-94AL85000
Resource Relation:
Patent File Date: 2015 Mar 18
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

Other works cited in this record:

Self-aligned bottom-gated graphene devices
patent, November 2014

Thin-film gallium nitride structures grown on graphene
patent, June 2015

Composition and method for selectively etching gate spacer oxide material
patent-application, February 2009

Electrodes having multi layered structure and supercapacitor including the same
patent-application, May 2012

Bulk functionalization of graphene using diazonium compounds and amide reaction
journal, September 2013

Covalent Electron Transfer Chemistry of Graphene with Diazonium Salts
journal, September 2012
  • Paulus, Geraldine L. C.; Wang, Qing Hua; Strano, Michael S.
  • Accounts of Chemical Research, Vol. 46, Issue 1, p. 160-170
  • DOI: 10.1021/ar300119z

Direct Covalent Grafting of Conjugated Molecules onto Si, GaAs, and Pd Surfaces from Aryldiazonium Salts
journal, January 2004
  • Stewart, Michael P.; Maya, Francisco; Kosynkin, Dmitry V.
  • Journal of the American Chemical Society, Vol. 126, Issue 1, p. 370-378
  • DOI: 10.1021/ja0383120

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