High gain durable anti-reflective coating
Abstract
Disclosed herein are polysilsesquioxane-based anti-reflective coating (ARC) compositions, methods of preparation, and methods of deposition on a substrate. In one embodiment, the polysilsesquioxane of this disclosure is prepared in a two-step process of acid catalyzed hydrolysis of organoalkoxysilane followed by addition of tetralkoxysilane that generates silicone polymers with >40 mol % silanol based on Si-NMR. These high silanol siloxane polymers are stable and have a long shelf-life in polar organic solvents at room temperature. Also disclosed are low refractive index ARC made from these compositions with and without additives such as porogens, templates, thermal radical initiator, photo radical initiators, crosslinkers, Si--OH condensation catalyst and nano-fillers. Also disclosed are methods and apparatus for applying coatings to flat substrates including substrate pre-treatment processes, coating processes and coating curing processes including skin-curing using hot-air knives. Also disclosed are coating compositions and formulations for highly tunable, durable, highly abrasion-resistant functionalized anti-reflective coatings.
- Inventors:
- Issue Date:
- Research Org.:
- Enki Technology, Inc. San Jose, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1366747
- Patent Number(s):
- 9688863
- Application Number:
- 15/182,729
- Assignee:
- Enki Technology, Inc.
- Patent Classifications (CPCs):
-
C - CHEMISTRY C03 - GLASS C03C - CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS
C - CHEMISTRY C08 - ORGANIC MACROMOLECULAR COMPOUNDS C08K - Use of inorganic or non-macromolecular organic substances as compounding ingredients
- DOE Contract Number:
- EE0006810
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2016 Jun 15
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
Citation Formats
Maghsoodi, Sina, Brophy, Brenor L., Colson, Thomas E., Gonsalves, Peter R., and Abrams, Ze'ev R. High gain durable anti-reflective coating. United States: N. p., 2017.
Web.
Maghsoodi, Sina, Brophy, Brenor L., Colson, Thomas E., Gonsalves, Peter R., & Abrams, Ze'ev R. High gain durable anti-reflective coating. United States.
Maghsoodi, Sina, Brophy, Brenor L., Colson, Thomas E., Gonsalves, Peter R., and Abrams, Ze'ev R. Tue .
"High gain durable anti-reflective coating". United States. https://www.osti.gov/servlets/purl/1366747.
@article{osti_1366747,
title = {High gain durable anti-reflective coating},
author = {Maghsoodi, Sina and Brophy, Brenor L. and Colson, Thomas E. and Gonsalves, Peter R. and Abrams, Ze'ev R.},
abstractNote = {Disclosed herein are polysilsesquioxane-based anti-reflective coating (ARC) compositions, methods of preparation, and methods of deposition on a substrate. In one embodiment, the polysilsesquioxane of this disclosure is prepared in a two-step process of acid catalyzed hydrolysis of organoalkoxysilane followed by addition of tetralkoxysilane that generates silicone polymers with >40 mol % silanol based on Si-NMR. These high silanol siloxane polymers are stable and have a long shelf-life in polar organic solvents at room temperature. Also disclosed are low refractive index ARC made from these compositions with and without additives such as porogens, templates, thermal radical initiator, photo radical initiators, crosslinkers, Si--OH condensation catalyst and nano-fillers. Also disclosed are methods and apparatus for applying coatings to flat substrates including substrate pre-treatment processes, coating processes and coating curing processes including skin-curing using hot-air knives. Also disclosed are coating compositions and formulations for highly tunable, durable, highly abrasion-resistant functionalized anti-reflective coatings.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 27 00:00:00 EDT 2017},
month = {Tue Jun 27 00:00:00 EDT 2017}
}
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Comparative study on hydrophobic anti-reflective films from three kinds of methyl-modified silica sols
journal, February 2005
- Xu, Yao; Wu, Dong; Sun, Yu Han
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Durable solgel antireflective films with high laser-induced damage thresholds for inertial confinement fusion
journal, January 2005
- Xu, Yao; Zhang, Lei; Wu, Dong
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SiO2 as barrier layer for Na out-diffusion from soda-lime glass
conference, June 2010
- Yan, Yanfa; Li, Xiaonan; Dhere, Ramesh
- 2010 35th IEEE Photovoltaic Specialists Conference (PVSC)