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Title: Characterization of dielectric materials

A system and a method for characterizing a dielectric material are provided. The system and method generally include applying an excitation signal to electrodes on opposing sides of the dielectric material to evaluate a property of the dielectric material. The method can further include measuring the capacitive impedance across the dielectric material, and determining a variation in the capacitive impedance with respect to either or both of a time domain and a frequency domain. The measured property can include pore size and surface imperfections. The method can still further include modifying a processing parameter as the dielectric material is formed in response to the detected variations in the capacitive impedance, which can correspond to a non-uniformity in the dielectric material.
Inventors:
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Issue Date:
OSTI Identifier:
1366497
Assignee:
UT-Battelle, LLC ORNL
Patent Number(s):
9,689,822
Application Number:
14/602,370
Contract Number:
AC05-00OR22725
Resource Relation:
Patent File Date: 2015 Jan 15
Research Org:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

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