Characterization of dielectric materials
Abstract
A system and a method for characterizing a dielectric material are provided. The system and method generally include applying an excitation signal to electrodes on opposing sides of the dielectric material to evaluate a property of the dielectric material. The method can further include measuring the capacitive impedance across the dielectric material, and determining a variation in the capacitive impedance with respect to either or both of a time domain and a frequency domain. The measured property can include pore size and surface imperfections. The method can still further include modifying a processing parameter as the dielectric material is formed in response to the detected variations in the capacitive impedance, which can correspond to a non-uniformity in the dielectric material.
- Inventors:
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1366497
- Patent Number(s):
- 9689822
- Application Number:
- 14/602,370
- Assignee:
- UT-Battelle, LLC
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- AC05-00OR22725
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2015 Jan 15
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
King, Danny J., Babinec, Susan, Hagans, Patrick L., Maxey, Lonnie C., Payzant, Edward A., Daniel, Claus, Sabau, Adrian S., Dinwiddie, Ralph B., Armstrong, Beth L., Howe, Jane Y., Wood, III, David L., and Nembhard, Nicole S.. Characterization of dielectric materials. United States: N. p., 2017.
Web.
King, Danny J., Babinec, Susan, Hagans, Patrick L., Maxey, Lonnie C., Payzant, Edward A., Daniel, Claus, Sabau, Adrian S., Dinwiddie, Ralph B., Armstrong, Beth L., Howe, Jane Y., Wood, III, David L., & Nembhard, Nicole S.. Characterization of dielectric materials. United States.
King, Danny J., Babinec, Susan, Hagans, Patrick L., Maxey, Lonnie C., Payzant, Edward A., Daniel, Claus, Sabau, Adrian S., Dinwiddie, Ralph B., Armstrong, Beth L., Howe, Jane Y., Wood, III, David L., and Nembhard, Nicole S.. Tue .
"Characterization of dielectric materials". United States. https://www.osti.gov/servlets/purl/1366497.
@article{osti_1366497,
title = {Characterization of dielectric materials},
author = {King, Danny J. and Babinec, Susan and Hagans, Patrick L. and Maxey, Lonnie C. and Payzant, Edward A. and Daniel, Claus and Sabau, Adrian S. and Dinwiddie, Ralph B. and Armstrong, Beth L. and Howe, Jane Y. and Wood, III, David L. and Nembhard, Nicole S.},
abstractNote = {A system and a method for characterizing a dielectric material are provided. The system and method generally include applying an excitation signal to electrodes on opposing sides of the dielectric material to evaluate a property of the dielectric material. The method can further include measuring the capacitive impedance across the dielectric material, and determining a variation in the capacitive impedance with respect to either or both of a time domain and a frequency domain. The measured property can include pore size and surface imperfections. The method can still further include modifying a processing parameter as the dielectric material is formed in response to the detected variations in the capacitive impedance, which can correspond to a non-uniformity in the dielectric material.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2017},
month = {6}
}
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