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Title: Selective nanoscale growth of lattice mismatched materials

Abstract

Exemplary embodiments provide materials and methods of forming high-quality semiconductor devices using lattice-mismatched materials. In one embodiment, a composite film including one or more substantially-single-particle-thick nanoparticle layers can be deposited over a substrate as a nanoscale selective growth mask for epitaxially growing lattice-mismatched materials over the substrate.

Inventors:
;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1364428
Patent Number(s):
9,685,324
Application Number:
14/610,254
Assignee:
STC.UNM
DOE Contract Number:  
909872
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015 Jan 30
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Lee, Seung-Chang, and Brueck, Steven R. J. Selective nanoscale growth of lattice mismatched materials. United States: N. p., 2017. Web.
Lee, Seung-Chang, & Brueck, Steven R. J. Selective nanoscale growth of lattice mismatched materials. United States.
Lee, Seung-Chang, and Brueck, Steven R. J. Tue . "Selective nanoscale growth of lattice mismatched materials". United States. https://www.osti.gov/servlets/purl/1364428.
@article{osti_1364428,
title = {Selective nanoscale growth of lattice mismatched materials},
author = {Lee, Seung-Chang and Brueck, Steven R. J.},
abstractNote = {Exemplary embodiments provide materials and methods of forming high-quality semiconductor devices using lattice-mismatched materials. In one embodiment, a composite film including one or more substantially-single-particle-thick nanoparticle layers can be deposited over a substrate as a nanoscale selective growth mask for epitaxially growing lattice-mismatched materials over the substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2017},
month = {6}
}

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Works referenced in this record:

Lithography-free Nanoscale Patterned Growth of GaAs on Si(001) with Sub-100-nm Silica Nanoparticles by Molecular Beam Epitaxy
journal, September 2011

  • Lee, S. C.; Dawson, L. R.; Huang, S. H.
  • Crystal Growth & Design, Vol. 11, Issue 9, p. 3673-3676
  • DOI: 10.1021/cg101363q