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Title: Method for fabrication of ceramic dielectric films on copper foils

The present invention provides copper substrate coated with a lead-lanthanum-zirconium-titanium (PLZT) ceramic film, which is prepared by a method comprising applying a layer of a sol-gel composition onto a copper foil. The sol-gel composition comprises a precursor of a ceramic material suspended in 2-methoxyethanol. The layer of sol-gel is then dried at a temperature up to about 250.degree. C. The dried layer is then pyrolyzed at a temperature in the range of about 300 to about 450.degree. C. to form a ceramic film from the ceramic precursor. The ceramic film is then crystallized at a temperature in the range of about 600 to about 750.degree. C. The drying, pyrolyzing and crystallizing are performed under a flowing stream of an inert gas.
Inventors:
; ; ;
Issue Date:
OSTI Identifier:
1363751
Assignee:
UCHICAGO ARGONNE, LLC ORNL
Patent Number(s):
9,679,705
Application Number:
14/631,536
Contract Number:
AC02-06CH11357
Resource Relation:
Patent File Date: 2015 Feb 25
Research Org:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Other works cited in this record:

Photovoltaic device and manufacturing method of the same
patent, September 1997

Sol-gel precursor and method for formation of ferroelectric materials for integrated circuits
patent, January 2002

Lead zirconate titanate dielectric thin film composites on metallic foils
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Substrate structure for growth of highly oriented and/or epitaxial layers thereon
patent, July 2005

Thin film dielectrics for capacitors and methods of making thereof
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Structures including perovskite dielectric layers and variable oxygen concentration gradient layers
patent, July 2006

Amorphous dielectric capacitors on silicon
patent-application, August 2001

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patent-application, June 2003

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patent-application, July 2004

Light control unit
patent-application, June 2006

LARGE AREA THIN FILM CAPACITORS ON METAL FOILS AND METHODS OF MANUFACTURING SAME
patent-application, September 2009

Lead zirconate titanate thin films directly on copper electrodes for ferroelectric, dielectric and piezoelectric applications
journal, February 2005
  • Kingon, Angus I.; Srinivasan, Sudarsan
  • Nature Materials, Vol. 4, Issue 3, p. 233-237
  • DOI: 10.1038/nmat1334

Importance Of Solution Chemistry In Preparing Sol–Gel PZT Thin Films Directly On Copper Surfaces
journal, January 2008
  • Losego, Mark D.; Ihlefeld, Jon F.; Maria, Jon-Paul
  • Chemistry of Materials, Vol. 20, Issue 1, p. 303-307
  • DOI: 10.1021/cm070999q

Chemical solution deposition of ferroelectric lead lanthanum zirconate titanate films on base-metal foils
journal, January 2008
  • Ma, Beihai; Kwon, Do-Kyun; Narayanan, Manoj
  • Journal of Electroceramics, Vol. 22, Issue 4, p. 383-389
  • DOI: 10.1007/s10832-007-9410-1

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