DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Method for fabrication of ceramic dielectric films on copper foils

Abstract

The present invention provides copper substrate coated with a lead-lanthanum-zirconium-titanium (PLZT) ceramic film, which is prepared by a method comprising applying a layer of a sol-gel composition onto a copper foil. The sol-gel composition comprises a precursor of a ceramic material suspended in 2-methoxyethanol. The layer of sol-gel is then dried at a temperature up to about 250.degree. C. The dried layer is then pyrolyzed at a temperature in the range of about 300 to about 450.degree. C. to form a ceramic film from the ceramic precursor. The ceramic film is then crystallized at a temperature in the range of about 600 to about 750.degree. C. The drying, pyrolyzing and crystallizing are performed under a flowing stream of an inert gas.

Inventors:
; ; ;
Issue Date:
Research Org.:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1363751
Patent Number(s):
9679705
Application Number:
14/631,536
Assignee:
UCHICAGO ARGONNE, LLC
Patent Classifications (CPCs):
C - CHEMISTRY C04 - CEMENTS C04B - LIME, MAGNESIA
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015 Feb 25
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Ma, Beihai, Narayanan, Manoj, Dorris, Stephen E., and Balachandran, Uthamalingam. Method for fabrication of ceramic dielectric films on copper foils. United States: N. p., 2017. Web.
Ma, Beihai, Narayanan, Manoj, Dorris, Stephen E., & Balachandran, Uthamalingam. Method for fabrication of ceramic dielectric films on copper foils. United States.
Ma, Beihai, Narayanan, Manoj, Dorris, Stephen E., and Balachandran, Uthamalingam. Wed . "Method for fabrication of ceramic dielectric films on copper foils". United States. https://www.osti.gov/servlets/purl/1363751.
@article{osti_1363751,
title = {Method for fabrication of ceramic dielectric films on copper foils},
author = {Ma, Beihai and Narayanan, Manoj and Dorris, Stephen E. and Balachandran, Uthamalingam},
abstractNote = {The present invention provides copper substrate coated with a lead-lanthanum-zirconium-titanium (PLZT) ceramic film, which is prepared by a method comprising applying a layer of a sol-gel composition onto a copper foil. The sol-gel composition comprises a precursor of a ceramic material suspended in 2-methoxyethanol. The layer of sol-gel is then dried at a temperature up to about 250.degree. C. The dried layer is then pyrolyzed at a temperature in the range of about 300 to about 450.degree. C. to form a ceramic film from the ceramic precursor. The ceramic film is then crystallized at a temperature in the range of about 600 to about 750.degree. C. The drying, pyrolyzing and crystallizing are performed under a flowing stream of an inert gas.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Wed Jun 14 00:00:00 EDT 2017},
month = {Wed Jun 14 00:00:00 EDT 2017}
}

Works referenced in this record:

Photovoltaic device and manufacturing method of the same
patent, September 1997


Sol-gel precursor and method for formation of ferroelectric materials for integrated circuits
patent, January 2002


Lead zirconate titanate dielectric thin film composites on metallic foils
patent, September 2003


Substrate structure for growth of highly oriented and/or epitaxial layers thereon
patent, July 2005


Thin film dielectrics for capacitors and methods of making thereof
patent, April 2006


Amorphous dielectric capacitors on silicon
patent-application, August 2001


Multi-layer conductor-dielectric oxide structure
patent-application, June 2003


Light control unit
patent-application, June 2006


LARGE AREA THIN FILM CAPACITORS ON METAL FOILS AND METHODS OF MANUFACTURING SAME
patent-application, September 2009


Lead zirconate titanate thin films directly on copper electrodes for ferroelectric, dielectric and piezoelectric applications
journal, February 2005


Ferroelectric behavior in nominally relaxor lead lanthanum zirconate titanate thin films prepared by chemical solution deposition on copper foil
journal, June 2006


Imprint and oxygen deficiency in (Pb,La)(Zr,Ti)O 3 thin‐film capacitors with La‐Sr‐Co‐O electrodes
journal, March 1995


Ferroelectric response from lead zirconate titanate thin films prepared directly on low-resistivity copper substrates
journal, April 2005


Importance Of Solution Chemistry In Preparing Sol–Gel PZT Thin Films Directly On Copper Surfaces
journal, January 2008


Chemical solution deposition of ferroelectric lead lanthanum zirconate titanate films on base-metal foils
journal, January 2008


Solution chemistry effects in Pb(Zr, Ti)O3 thin film processing
journal, November 1992


Sol-gel processing of PZT thin films: A review of the state-of-the-art and process optimization strategies
journal, February 1995


Chemical solution deposition of electronic oxide films
journal, May 2004


Effect of local oxygen activity on Ni–BaTiO3 interfacial reactions
journal, August 2006