Frequency and amplitude stabilization in MEMS and NEMS oscillators

Chen, Changyao; Lopez, Omar Daniel; Czaplewski, David A.

Title: Frequency and amplitude stabilization in MEMS and NEMS oscillators

Abstract

This invention comprises a nonlinear micro- and nano-mechanical resonator that can maintain frequency of operation and amplitude of operation for a period of time after all external power has been removed from the device. Utilizing specific nonlinear dynamics of the micromechanical resonator, mechanical energy at low frequencies can be input and stored in higher frequencies modes, thus using the multiple degrees of freedom of the resonator to extend its energy storage capacity. Furthermore, the energy stored in multiple vibrational modes can be used to maintain the resonator oscillating for a fixed period of time, even without an external power supply. This is the first demonstration of an "autonomous" frequency source that can maintain a constant frequency and vibrating amplitude when no external power is provided, making it ideal for applications requiring an oscillator in low power, or limited and intermittent power supplies.

Inventors:: Chen, Changyao; Lopez, Omar Daniel; Czaplewski, David A.

Issue Date:: 2017-06-14

Research Org.:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1363750

Patent Number(s):: 9680414

Application Number:: 15/042,912

Assignee:: UCHICAGO ARGONNE, LLC

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES

H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03B - GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER

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B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B81B7/02 - containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]

H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03B - GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER
H03B5/30 - with frequency-determining element being electromechanical resonator

H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03G - CONTROL OF AMPLIFICATION
H03G3/20 - Automatic control

H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03K - PULSE TECHNIQUE
H03K2005/00286 - {Phase shifter, i.e. the delay between the output and input pulse is dependent on the frequency, and such that a phase difference is obtained independent of the frequency}
H03K5/003 - Changing the DC level
H03K5/13 - Arrangements having a single output and transforming input signals into pulses delivered at desired time intervals {

H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03L - AUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
H03L5/00 - Automatic control of voltage, current, or power
H03L7/00 - Automatic control of frequency or phase

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DOE Contract Number:: AC02-06CH11357

Resource Type:: Patent

Resource Relation:: Patent File Date: 2016 Feb 12

Country of Publication:: United States

Language:: English

Subject:: 77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats


                    Chen, Changyao, Lopez, Omar Daniel, and Czaplewski, David A. Frequency and amplitude stabilization in MEMS and NEMS oscillators.  United States: N. p., 2017. 
        Web.

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                    Chen, Changyao, Lopez, Omar Daniel, & Czaplewski, David A. Frequency and amplitude stabilization in MEMS and NEMS oscillators.  United States.

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                    Chen, Changyao, Lopez, Omar Daniel, and Czaplewski, David A. Wed .  
        "Frequency and amplitude stabilization in MEMS and NEMS oscillators".  United States.  https://www.osti.gov/servlets/purl/1363750.

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@article{osti_1363750,

  title        = {Frequency and amplitude stabilization in MEMS and NEMS oscillators},

  author       = {Chen, Changyao and Lopez, Omar Daniel and Czaplewski, David A.},

  abstractNote = {This invention comprises a nonlinear micro- and nano-mechanical resonator that can maintain frequency of operation and amplitude of operation for a period of time after all external power has been removed from the device. Utilizing specific nonlinear dynamics of the micromechanical resonator, mechanical energy at low frequencies can be input and stored in higher frequencies modes, thus using the multiple degrees of freedom of the resonator to extend its energy storage capacity. Furthermore, the energy stored in multiple vibrational modes can be used to maintain the resonator oscillating for a fixed period of time, even without an external power supply. This is the first demonstration of an "autonomous" frequency source that can maintain a constant frequency and vibrating amplitude when no external power is provided, making it ideal for applications requiring an oscillator in low power, or limited and intermittent power supplies.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2017},

  month        = {6}

}

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Frequency stabilization in nonlinear MEMS and NEMS oscillators
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Lopez, Omar; Antonio, Dario
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Title: Frequency and amplitude stabilization in MEMS and NEMS oscillators

Abstract

Citation Formats

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