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Title: Autofocus system and autofocus method for focusing on a surface

An autofocus system includes an imaging device, a lens system and a focus control actuator that is configured to change a focus position of the imaging device in relation to a stage. The electronic control unit is configured to control the focus control actuator to a plurality of predetermined focus positions, and activate the imaging device to obtain an image at predetermined positions and then apply a spatial filter to the obtained images. This generates a filtered image for the obtained images. The control unit determines a focus score for the filtered images such that the focus score corresponds to a degree of focus in the obtained images. The control unit identifies a best focus position by comparing the focus score of the filtered images, and controls the focus control actuator to the best focus position corresponding to the highest focus score.
Inventors:
Issue Date:
OSTI Identifier:
1358242
Assignee:
National Security Technologies, LLC NSTEC
Patent Number(s):
9,658,444
Application Number:
14/539,962
Contract Number:
AC52-06NA25946
Resource Relation:
Patent File Date: 2014 Nov 12
Research Org:
Nevada Test Site/National Security Technologies, LLC (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Works referenced in this record:

Fast autofocus algorithm for automated microscopes
journal, June 2005
  • Bueno-Ibarra, Mario Alonso; Álvarez-Borrego, Josué; Acho, Leonardo
  • Optical Engineering, Vol. 44, Issue 6, Article No. 063601
  • DOI: 10.1117/1.1925119