Single crystal micromechanical resonator

Olsson, Roy H.; Friedmann, Thomas A.; Jensen Homeijer, Sara; Wiwi, Michael; Hattar, Khalid Mikhiel; Clark, Blythe; Bauer, Todd; Van Deusen, Stuart B.

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Title: Single crystal micromechanical resonator

Abstract

A single crystal micromechanical resonator includes a suspended plate of lithium niobate or lithium tantalate. The suspended plate and a support structure are formed from a single crystal.

Inventors:: Olsson, Roy H.; Friedmann, Thomas A.; Jensen Homeijer, Sara; Wiwi, Michael; Hattar, Khalid Mikhiel; Clark, Blythe; Bauer, Todd; Van Deusen, Stuart B.

Issue Date:: Tue May 02 00:00:00 EDT 2017

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1354782

Patent Number(s):: 9641154

Application Number:: 15/349,593

Assignee:: Sandia Corporation

Patent Classifications (CPCs):: H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS

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H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
H03H2003/027 - {the resonators or networks being of the microelectro-mechanical [MEMS] type}
H03H3/02 - for the manufacture of piezo-electric or electrostrictive resonators or networks
H03H9/02228 - {Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer}
H03H9/17 - having a single resonator
H03H9/205 - having multiple resonators
H03H9/54 - comprising resonators of piezo-electric or electrostrictive material

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Resource Relation:: Patent File Date: 2016 Nov 11

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Olsson, Roy H., Friedmann, Thomas A., Jensen Homeijer, Sara, Wiwi, Michael, Hattar, Khalid Mikhiel, Clark, Blythe, Bauer, Todd, and Van Deusen, Stuart B. Single crystal micromechanical resonator.  United States: N. p., 2017. 
        Web.

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                    Olsson, Roy H., Friedmann, Thomas A., Jensen Homeijer, Sara, Wiwi, Michael, Hattar, Khalid Mikhiel, Clark, Blythe, Bauer, Todd, & Van Deusen, Stuart B. Single crystal micromechanical resonator.  United States.

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                    Olsson, Roy H., Friedmann, Thomas A., Jensen Homeijer, Sara, Wiwi, Michael, Hattar, Khalid Mikhiel, Clark, Blythe, Bauer, Todd, and Van Deusen, Stuart B. Tue .  
        "Single crystal micromechanical resonator".  United States.  https://www.osti.gov/servlets/purl/1354782.

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@article{osti_1354782,

  title        = {Single crystal micromechanical resonator},

  author       = {Olsson, Roy H. and Friedmann, Thomas A. and Jensen Homeijer, Sara and Wiwi, Michael and Hattar, Khalid Mikhiel and Clark, Blythe and Bauer, Todd and Van Deusen, Stuart B.},

  abstractNote = {A single crystal micromechanical resonator includes a suspended plate of lithium niobate or lithium tantalate. The suspended plate and a support structure are formed from a single crystal.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue May 02 00:00:00 EDT 2017},

  month        = {Tue May 02 00:00:00 EDT 2017}

}

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Similar Records

Title: Single crystal micromechanical resonator

Abstract

Citation Formats

Contour mode resonators with acoustic reflectors patent, June 2008

Microelectromechanical resonator and method for fabrication patent, November 2009

Microelectromechanical resonator and method for fabrication patent, January 2010

Microfabricated bulk wave acoustic bandgap device patent, June 2010

Microfabricated bulk wave acoustic bandgap device patent, November 2010

Microfabricated ion frequency standard patent, December 2010

Phononic crystal devices patent, January 2012

Method for fabricating a microelectromechanical resonator patent, February 2013

Low phase noise MEMS-based oscillator with bifurcation and parametric noise squeezing patent, June 2013

Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators patent, July 2013

Synthetic thermoelectric materials comprising phononic crystals patent, August 2013

Method to control BAW resonator top electrode edge during patterning patent, September 2013

Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material patent, September 2013

MEMS packaging with etching and thinning of lid wafer to form lids and expose device wafer bond pads patent, December 2013

Nano-optomechanical transducer patent, December 2013

Ovenized microelectromechanical system (MEMS) resonator patent, March 2014

Method of manufacturing a resonating structure patent, April 2014

Etching Technique For The Fabrication Of Thin (Al, In, Ga)N Layers patent-application, December 2010

Method Of Forming An Undercut Microstructure patent-application, October 2011

MEMS Vibrating Structure Using An Orientation Dependent Single-Crystal Piezoelectric Thin Film Layer patent-application, July 2014

Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications journal, December 2008

MEMS in RF Filter Applications: Thin-film Bulk Acoustic Wave Technology journal, February 2003

SAW and BAW technologies for RF filter applications: A review of the relative strengths and weaknesses conference, November 2008

Comparison between BAW and SAW sensor principles journal, September 1998

Bulk acoustic wave RF technology journal, October 2008

Modification of the etching properties of x-cut Lithium Niobate by ion implantation journal, April 2008

Applications of surface acoustic and shallow bulk acoustic wave devices journal, January 1989

Lamb Waves and Resonant Modes in Rectangular-Bar Silicon Resonators journal, August 2010

LiNbO3 Single Crystal Layer Transfer Techniques for High Performances RF Filters conference, January 2010

Design and Analysis of Lithium–Niobate-Based High Electromechanical Coupling RF-MEMS Resonators for Wideband Filtering journal, January 2013

High-frequency lamb wave device composed of MEMS structure using LiNbO 3 thin film and air gap journal, November 2010

Wide band resonators using SH mode of plate wave on LiNbO3 conference, October 2012

AlN Microresonator-Based Filters With Multiple Bandwidths at Low Intermediate Frequencies journal, August 2013

Ovenized and thermally tunable aluminum nitride microresonators conference, October 2010

Improved material constants for LiNbO3 and LiTaO3 conference, January 1990

Investigation of acoustic waves in thin plates of lithium niobate and lithium tantalate journal, January 2001

Temperature-compensated aluminum nitride lamb wave resonators journal, March 2010

SAW/BAW acoustoelectronic technology for filters and communication systems conference, April 2010

MEMS technology for timing and frequency control journal, January 2007

A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication journal, March 2014

Single-Chip Multiple-Frequency ALN MEMS Filters Based on Contour-Mode Piezoelectric Resonators journal, April 2007

Etch rate dependence on crystal orientation of lithium niobate journal, November 2010

PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBARs) journal, May 1999

Suspended slab and photonic crystal waveguides in lithium niobate journal, March 2010

Thin-film Lithium Niobate contour-mode resonators conference, October 2012

Internal Dielectric Transduction in Bulk-Mode Resonators journal, December 2009

Crystal–ion-slicing lithium niobate film performed by 250keV 4He ion implantation journal, March 2007

Contour mode resonators with acoustic reflectors
patent, June 2008

Microelectromechanical resonator and method for fabrication
patent, November 2009

Microelectromechanical resonator and method for fabrication
patent, January 2010

Microfabricated bulk wave acoustic bandgap device
patent, June 2010

Microfabricated bulk wave acoustic bandgap device
patent, November 2010

Microfabricated ion frequency standard
patent, December 2010

Phononic crystal devices
patent, January 2012

Method for fabricating a microelectromechanical resonator
patent, February 2013

Low phase noise MEMS-based oscillator with bifurcation and parametric noise squeezing
patent, June 2013

Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators
patent, July 2013

Synthetic thermoelectric materials comprising phononic crystals
patent, August 2013

Method to control BAW resonator top electrode edge during patterning
patent, September 2013

Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material
patent, September 2013

MEMS packaging with etching and thinning of lid wafer to form lids and expose device wafer bond pads
patent, December 2013

Nano-optomechanical transducer
patent, December 2013

Ovenized microelectromechanical system (MEMS) resonator
patent, March 2014

Method of manufacturing a resonating structure
patent, April 2014

Etching Technique For The Fabrication Of Thin (Al, In, Ga)N Layers
patent-application, December 2010

Method Of Forming An Undercut Microstructure
patent-application, October 2011

MEMS Vibrating Structure Using An Orientation Dependent Single-Crystal Piezoelectric Thin Film Layer
patent-application, July 2014

Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications
journal, December 2008

MEMS in RF Filter Applications: Thin-film Bulk Acoustic Wave Technology
journal, February 2003

SAW and BAW technologies for RF filter applications: A review of the relative strengths and weaknesses
conference, November 2008

Comparison between BAW and SAW sensor principles
journal, September 1998

Bulk acoustic wave RF technology
journal, October 2008

Modification of the etching properties of x-cut Lithium Niobate by ion implantation
journal, April 2008

Applications of surface acoustic and shallow bulk acoustic wave devices
journal, January 1989

Lamb Waves and Resonant Modes in Rectangular-Bar Silicon Resonators
journal, August 2010

LiNbO₃ Single Crystal Layer Transfer Techniques for High Performances RF Filters
conference, January 2010

Design and Analysis of Lithium–Niobate-Based High Electromechanical Coupling RF-MEMS Resonators for Wideband Filtering
journal, January 2013

High-frequency lamb wave device composed of MEMS structure using LiNbO ₃ thin film and air gap
journal, November 2010

Wide band resonators using SH mode of plate wave on LiNbO₃
conference, October 2012

AlN Microresonator-Based Filters With Multiple Bandwidths at Low Intermediate Frequencies
journal, August 2013

Ovenized and thermally tunable aluminum nitride microresonators
conference, October 2010

Improved material constants for LiNbO₃ and LiTaO₃
conference, January 1990

Investigation of acoustic waves in thin plates of lithium niobate and lithium tantalate
journal, January 2001

Temperature-compensated aluminum nitride lamb wave resonators
journal, March 2010

SAW/BAW acoustoelectronic technology for filters and communication systems
conference, April 2010

MEMS technology for timing and frequency control
journal, January 2007

A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication
journal, March 2014

Single-Chip Multiple-Frequency ALN MEMS Filters Based on Contour-Mode Piezoelectric Resonators
journal, April 2007

Etch rate dependence on crystal orientation of lithium niobate
journal, November 2010

PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBARs)
journal, May 1999

Suspended slab and photonic crystal waveguides in lithium niobate
journal, March 2010

Thin-film Lithium Niobate contour-mode resonators
conference, October 2012

Internal Dielectric Transduction in Bulk-Mode Resonators
journal, December 2009

Crystal–ion-slicing lithium niobate film performed by 250keV 4He ion implantation
journal, March 2007