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Title: Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages

A method and deformation compensated flexural pivots structured for precision linear nanopositioning stages are provided. A deformation-compensated flexural linear guiding mechanism includes a basic parallel mechanism including a U-shaped member and a pair of parallel bars linked to respective pairs of I-link bars and each of the I-bars coupled by a respective pair of flexural pivots. The basic parallel mechanism includes substantially evenly distributed flexural pivots minimizing center shift dynamic errors.
Inventors:
; ;
Issue Date:
OSTI Identifier:
1350955
Assignee:
UChicago Argonne, LLC (Chicago, IL) ANL
Patent Number(s):
8,957,567
Application Number:
13/593,799
Contract Number:
AC02-06CH11357
Resource Relation:
Patent File Date: 2012 Aug 24
Research Org:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

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