Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages

Shu, Deming; Kearney, Steven P.; Preissner, Curt A.

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Title: Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages

Abstract

A method and deformation compensated flexural pivots structured for precision linear nanopositioning stages are provided. A deformation-compensated flexural linear guiding mechanism includes a basic parallel mechanism including a U-shaped member and a pair of parallel bars linked to respective pairs of I-link bars and each of the I-bars coupled by a respective pair of flexural pivots. The basic parallel mechanism includes substantially evenly distributed flexural pivots minimizing center shift dynamic errors.

Inventors:: Shu, Deming; Kearney, Steven P.; Preissner, Curt A.

Issue Date:: 2015-02-17

Research Org.:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1350955

Patent Number(s):: 8957567

Application Number:: 13/593,799

Assignee:: UChicago Argonne, LLC (Chicago, IL)

Patent Classifications (CPCs):: H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR

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H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
H02N2/04 - Constructional details

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DOE Contract Number:: AC02-06CH11357

Resource Type:: Patent

Resource Relation:: Patent File Date: 2012 Aug 24

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING

Citation Formats


                    Shu, Deming, Kearney, Steven P., and Preissner, Curt A. Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages.  United States: N. p., 2015. 
        Web.

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                    Shu, Deming, Kearney, Steven P., & Preissner, Curt A. Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages.  United States.

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                    Shu, Deming, Kearney, Steven P., and Preissner, Curt A. Tue .  
        "Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages".  United States.  https://www.osti.gov/servlets/purl/1350955.

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@article{osti_1350955,

  title        = {Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages},

  author       = {Shu, Deming and Kearney, Steven P. and Preissner, Curt A.},

  abstractNote = {A method and deformation compensated flexural pivots structured for precision linear nanopositioning stages are provided. A deformation-compensated flexural linear guiding mechanism includes a basic parallel mechanism including a U-shaped member and a pair of parallel bars linked to respective pairs of I-link bars and each of the I-bars coupled by a respective pair of flexural pivots. The basic parallel mechanism includes substantially evenly distributed flexural pivots minimizing center shift dynamic errors.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2015},

  month        = {2}

}

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Works referenced in this record:

Low profile, high load vertical rolling positioning stage
patent, June 1996

Shu, Deming; Barraza, Juan
US Patent Document 5,526,903
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5526903

Optical design for laser encoder resolution extension and angular measurement
patent, April 1999

Shu, Deming
US Patent Document 5,896,200
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5896200

Redundantly constrained laminar structure as weak-link mechanisms
patent, August 2003

Shu, Deming; Toellner, Thomas; Alp, E. Ercan
US Patent Document 6,607,840
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6607840

Redundantly constrained laminar structure as weak-link mechanisms
patent, January 2006

Shu, Deming; Toellner, Thomas; Alp, E. Ercan
US Patent Document 6,984,335
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6984335

Multidimensional alignment apparatus for hard x-ray focusing with two multilayer laue lenses
patent, October 2009

Shu, Deming; Yan, Hanfei; Maser, Jorg M.
US Patent Document 7,597,475
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7597475

Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution
patent, August 2011

Shu, Deming; Maser, Jorg M.
US Patent Document 7,994,688
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7994688

Mechanical design of laminar weak-link rotary mechanisms with ten-degree-level travel range and ten-nanoradian-level positioning resolution
patent, January 2012

Shu, Deming; Maser, Jorg M.
US Patent Document 8,089,199
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8089199

Vibratory actuator
patent, November 2012

Higashionji, Masaru; Mukae, Hideaki; Nagaoka, Eiichi
US Patent Document 8,314,533
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8314533

Compact Nanofabrication Apparatus
patent-application, January 2009

Rozhok, Sergey V.; Nelson, Michael; Amro, Nabil A.
US Patent Application 12/116908; 20090023607
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090023607

Analytical and experimental characterisation of high-precision flexural pivots subjected to lateral loads
journal, October 2002

Zelenika, S.; De Bona, F.
Precision Engineering, Vol. 26, Issue 4
https://doi.org/10.1016/S0141-6359(02)00149-6

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Similar Records

Title: Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages

Abstract

Citation Formats

Low profile, high load vertical rolling positioning stage patent, June 1996

Optical design for laser encoder resolution extension and angular measurement patent, April 1999

Redundantly constrained laminar structure as weak-link mechanisms patent, August 2003

Redundantly constrained laminar structure as weak-link mechanisms patent, January 2006

Multidimensional alignment apparatus for hard x-ray focusing with two multilayer laue lenses patent, October 2009

Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution patent, August 2011

Mechanical design of laminar weak-link rotary mechanisms with ten-degree-level travel range and ten-nanoradian-level positioning resolution patent, January 2012

Vibratory actuator patent, November 2012

Compact Nanofabrication Apparatus patent-application, January 2009

Analytical and experimental characterisation of high-precision flexural pivots subjected to lateral loads journal, October 2002

Low profile, high load vertical rolling positioning stage
patent, June 1996

Optical design for laser encoder resolution extension and angular measurement
patent, April 1999

Redundantly constrained laminar structure as weak-link mechanisms
patent, August 2003

Redundantly constrained laminar structure as weak-link mechanisms
patent, January 2006

Multidimensional alignment apparatus for hard x-ray focusing with two multilayer laue lenses
patent, October 2009

Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution
patent, August 2011

Mechanical design of laminar weak-link rotary mechanisms with ten-degree-level travel range and ten-nanoradian-level positioning resolution
patent, January 2012

Vibratory actuator
patent, November 2012

Compact Nanofabrication Apparatus
patent-application, January 2009

Analytical and experimental characterisation of high-precision flexural pivots subjected to lateral loads
journal, October 2002