Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages

Title: Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages

A method and deformation compensated flexural pivots structured for precision linear nanopositioning stages are provided. A deformation-compensated flexural linear guiding mechanism includes a basic parallel mechanism including a U-shaped member and a pair of parallel bars linked to respective pairs of I-link bars and each of the I-bars coupled by a respective pair of flexural pivots. The basic parallel mechanism includes substantially evenly distributed flexural pivots minimizing center shift dynamic errors.

Inventors:: Shu, Deming; Kearney, Steven P.; Preissner, Curt A.

Issue Date:: 2015-02-17

OSTI Identifier:: 1350955

Assignee:: UChicago Argonne, LLC (Chicago, IL) ANL

Patent Number(s):: 8,957,567

Application Number:: 13/593,799

Contract Number:: AC02-06CH11357

Resource Relation:: Patent File Date: 2012 Aug 24

Research Org:: Argonne National Lab. (ANL), Argonne, IL (United States)

Sponsoring Org:: USDOE

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING

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Works referenced in this record:

Optical design for laser encoder resolution extension and angular measurement
patent, April 1999

Shu, Deming
US Patent Document 5,896,200
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F5896200

Redundantly constrained laminar structure as weak-link mechanisms
patent, August 2003

Shu, Deming; Toellner, Thomas; Alp, E. Ercan
US Patent Document 6,607,840
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F6607840

Redundantly constrained laminar structure as weak-link mechanisms
patent, January 2006

Shu, Deming; Toellner, Thomas; Alp, E. Ercan
US Patent Document 6,984,335
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F6984335

Multidimensional alignment apparatus for hard x-ray focusing with two multilayer laue lenses
patent, October 2009

Shu, Deming; Yan, Hanfei; Maser, Jorg
US Patent Document 7,597,475
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7597475

Mechanical design of laminar weak-link rotary mechanisms with ten-degree-level travel range and ten-nanoradian-level positioning resolution
patent, January 2012

Shu, Deming; Maser, Jorg
US Patent Document 8,089,199
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F8089199

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