Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages
Abstract
A method and deformation compensated flexural pivots structured for precision linear nanopositioning stages are provided. A deformation-compensated flexural linear guiding mechanism includes a basic parallel mechanism including a U-shaped member and a pair of parallel bars linked to respective pairs of I-link bars and each of the I-bars coupled by a respective pair of flexural pivots. The basic parallel mechanism includes substantially evenly distributed flexural pivots minimizing center shift dynamic errors.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1350955
- Patent Number(s):
- 8957567
- Application Number:
- 13/593,799
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2012 Aug 24
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Shu, Deming, Kearney, Steven P., and Preissner, Curt A. Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages. United States: N. p., 2015.
Web.
Shu, Deming, Kearney, Steven P., & Preissner, Curt A. Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages. United States.
Shu, Deming, Kearney, Steven P., and Preissner, Curt A. Tue .
"Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages". United States. https://www.osti.gov/servlets/purl/1350955.
@article{osti_1350955,
title = {Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages},
author = {Shu, Deming and Kearney, Steven P. and Preissner, Curt A.},
abstractNote = {A method and deformation compensated flexural pivots structured for precision linear nanopositioning stages are provided. A deformation-compensated flexural linear guiding mechanism includes a basic parallel mechanism including a U-shaped member and a pair of parallel bars linked to respective pairs of I-link bars and each of the I-bars coupled by a respective pair of flexural pivots. The basic parallel mechanism includes substantially evenly distributed flexural pivots minimizing center shift dynamic errors.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {2}
}
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Works referenced in this record:
Analytical and experimental characterisation of high-precision flexural pivots subjected to lateral loads
journal, October 2002
- Zelenika, S.; De Bona, F.
- Precision Engineering, Vol. 26, Issue 4