Global to push GA events into
skip to main content

Title: Method for fabrication of ceramic dielectric films on copper foils

The present invention provides a method for fabricating a ceramic film on a copper foil. The method comprises applying a layer of a sol-gel composition onto a copper foil. The sol-gel composition comprises a precursor of a ceramic material suspended in 2-methoxyethanol. The layer of sol-gel is then dried at a temperature up to about 250.degree. C. The dried layer is then pyrolyzed at a temperature in the range of about 300 to about 450.degree. C. to form a ceramic film from the ceramic precursor. The ceramic film is then crystallized at a temperature in the range of about 600 to about 750.degree. C. The drying, pyrolyzing and crystallizing are performed under a flowing stream of an inert gas. In some embodiments an additional layer of the sol-gel composition is applied onto the ceramic film and the drying, pyrolyzing and crystallizing steps are repeated for the additional layer to build up a thicker ceramic layer on the copper foil. The process can be repeated one or more times if desired.
Inventors:
; ; ;
Issue Date:
OSTI Identifier:
1349887
Assignee:
UChicago Argonne, LLC (Chicago, IL) ANL
Patent Number(s):
8,974,856
Application Number:
12/786,940
Contract Number:
AC02-06CH11357
Resource Relation:
Patent File Date: 2010 May 25
Research Org:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Works referenced in this record:

Lead zirconate titanate thin films directly on copper electrodes for ferroelectric, dielectric and piezoelectric applications
journal, February 2005
  • Kingon, Angus I.; Srinivasan, Sudarsan
  • Nature Materials, Vol. 4, Issue 3, p. 233-237
  • DOI: 10.1038/nmat1334

Importance Of Solution Chemistry In Preparing Sol–Gel PZT Thin Films Directly On Copper Surfaces
journal, January 2008
  • Losego, Mark D.; Ihlefeld, Jon F.; Maria, Jon-Paul
  • Chemistry of Materials, Vol. 20, Issue 1, p. 303-307
  • DOI: 10.1021/cm070999q

Chemical solution deposition of electronic oxide films
journal, May 2004
  • Schwartz, Robert W.; Schneller, Theodor; Waser, Rainer
  • Comptes Rendus Chimie, Vol. 7, Issue 5, p. 433-461
  • DOI: 10.1016/j.crci.2004.01.007

Chemical solution deposition of ferroelectric lead lanthanum zirconate titanate films on base-metal foils
journal, January 2008
  • Ma, Beihai; Kwon, Do-Kyun; Narayanan, Manoj
  • Journal of Electroceramics, Vol. 22, Issue 4, p. 383-389
  • DOI: 10.1007/s10832-007-9410-1