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Title: Method for fabrication of ceramic dielectric films on copper foils

Abstract

The present invention provides a method for fabricating a ceramic film on a copper foil. The method comprises applying a layer of a sol-gel composition onto a copper foil. The sol-gel composition comprises a precursor of a ceramic material suspended in 2-methoxyethanol. The layer of sol-gel is then dried at a temperature up to about 250.degree. C. The dried layer is then pyrolyzed at a temperature in the range of about 300 to about 450.degree. C. to form a ceramic film from the ceramic precursor. The ceramic film is then crystallized at a temperature in the range of about 600 to about 750.degree. C. The drying, pyrolyzing and crystallizing are performed under a flowing stream of an inert gas. In some embodiments an additional layer of the sol-gel composition is applied onto the ceramic film and the drying, pyrolyzing and crystallizing steps are repeated for the additional layer to build up a thicker ceramic layer on the copper foil. The process can be repeated one or more times if desired.

Inventors:
; ; ;
Issue Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1349887
Patent Number(s):
8,974,856
Application Number:
12/786,940
Assignee:
UChicago Argonne, LLC (Chicago, IL)
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2010 May 25
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Ma, Beihai, Narayanan, Manoj, Dorris, Stephen E., and Balachandran, Uthamalingam. Method for fabrication of ceramic dielectric films on copper foils. United States: N. p., 2015. Web.
Ma, Beihai, Narayanan, Manoj, Dorris, Stephen E., & Balachandran, Uthamalingam. Method for fabrication of ceramic dielectric films on copper foils. United States.
Ma, Beihai, Narayanan, Manoj, Dorris, Stephen E., and Balachandran, Uthamalingam. Tue . "Method for fabrication of ceramic dielectric films on copper foils". United States. https://www.osti.gov/servlets/purl/1349887.
@article{osti_1349887,
title = {Method for fabrication of ceramic dielectric films on copper foils},
author = {Ma, Beihai and Narayanan, Manoj and Dorris, Stephen E. and Balachandran, Uthamalingam},
abstractNote = {The present invention provides a method for fabricating a ceramic film on a copper foil. The method comprises applying a layer of a sol-gel composition onto a copper foil. The sol-gel composition comprises a precursor of a ceramic material suspended in 2-methoxyethanol. The layer of sol-gel is then dried at a temperature up to about 250.degree. C. The dried layer is then pyrolyzed at a temperature in the range of about 300 to about 450.degree. C. to form a ceramic film from the ceramic precursor. The ceramic film is then crystallized at a temperature in the range of about 600 to about 750.degree. C. The drying, pyrolyzing and crystallizing are performed under a flowing stream of an inert gas. In some embodiments an additional layer of the sol-gel composition is applied onto the ceramic film and the drying, pyrolyzing and crystallizing steps are repeated for the additional layer to build up a thicker ceramic layer on the copper foil. The process can be repeated one or more times if desired.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {3}
}

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