Title: Electronic interconnects and devices with topological surface states and methods for fabricating same

Abstract

An interconnect is disclosed with enhanced immunity of electrical conductivity to defects. The interconnect includes a material with charge carriers having topological surface states. Also disclosed is a method for fabricating such interconnects. Also disclosed is an integrated circuit including such interconnects. Also disclosed is a gated electronic device including a material with charge carriers having topological surface states.

Inventors:

Yazdani, Ali; Ong, N. Phuan; Cava, Robert J.

Issue Date:

2017-04-04

Research Org.:

Princeton Univ., NJ (United States)

Sponsoring Org.:

USDOE

OSTI Identifier:

1349670

Patent Number(s):

9613905

Application Number:

14/919,008

Assignee:

THE TRUSTEES OF PRINCETON UNIVERSITY

Patent Classifications (CPCs):

C - CHEMISTRY C22 - METALLURGY C22C - ALLOYS

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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C - CHEMISTRY C22 - METALLURGY C22C - ALLOYS

C22C28/00 - Alloys based on a metal not provided for in groups C22C5/00 - C22C27/00
C22C30/00 - Alloys containing less than 50% by weight of each constituent

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H01L21/76838 - {characterised by the formation and the after-treatment of the conductors
H01L23/53209 - {based on metals, e.g. alloys, metal silicides
H01L23/53271 - {containing semiconductor material, e.g. polysilicon}
H01L29/78 - with field effect produced by an insulated gate {
H01L29/78681 - {having a semiconductor body comprising AIIIBV or AIIBVI or AIVBVI semiconductor materials, or Se or Te}
H01L2924/00 - Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
H01L2924/0002 - Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
H01L2924/01051 - Antimony [Sb]

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

Y10T29/49204 - Contact or terminal manufacturing

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DOE Contract Number:  

FG02-07ER46419

Resource Type:

Patent

Resource Relation:

Patent File Date: 2015 Oct 21

Country of Publication:

United States

Language:

English

Subject:

36 MATERIALS SCIENCE; 47 OTHER INSTRUMENTATION