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Title: Optical systems fabricated by printing-based assembly

Abstract

Provided are optical devices and systems fabricated, at least in part, via printing-based assembly and integration of device components. In specific embodiments the present invention provides light emitting systems, light collecting systems, light sensing systems and photovoltaic systems comprising printable semiconductor elements, including large area, high performance macroelectronic devices. Optical systems of the present invention comprise semiconductor elements assembled, organized and/or integrated with other device components via printing techniques that exhibit performance characteristics and functionality comparable to single crystalline semiconductor based devices fabricated using conventional high temperature processing methods. Optical systems of the present invention have device geometries and configurations, such as form factors, component densities, and component positions, accessed by printing that provide a range of useful device functionalities. Optical systems of the present invention include devices and device arrays exhibiting a range of useful physical and mechanical properties including flexibility, shapeability, conformability and stretchablity.

Inventors:
; ; ; ; ; ; ; ; ; ; ;
Issue Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1347541
Patent Number(s):
9601671
Application Number:
14/800,363
Assignee:
The Board of Trustees of the University of Illinois
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
FG02-91ER45439
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015 Jul 15
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 47 OTHER INSTRUMENTATION

Citation Formats

Rogers, John, Nuzzo, Ralph, Meitl, Matthew, Menard, Etienne, Baca, Alfred, Motala, Michael, Ahn, Jong-Hyun, Park, Sang-Il, Yu, Chang-Jae, Ko, Heung Cho, Stoykovich, Mark, and Yoon, Jongseung. Optical systems fabricated by printing-based assembly. United States: N. p., 2017. Web.
Rogers, John, Nuzzo, Ralph, Meitl, Matthew, Menard, Etienne, Baca, Alfred, Motala, Michael, Ahn, Jong-Hyun, Park, Sang-Il, Yu, Chang-Jae, Ko, Heung Cho, Stoykovich, Mark, & Yoon, Jongseung. Optical systems fabricated by printing-based assembly. United States.
Rogers, John, Nuzzo, Ralph, Meitl, Matthew, Menard, Etienne, Baca, Alfred, Motala, Michael, Ahn, Jong-Hyun, Park, Sang-Il, Yu, Chang-Jae, Ko, Heung Cho, Stoykovich, Mark, and Yoon, Jongseung. Tue . "Optical systems fabricated by printing-based assembly". United States. https://www.osti.gov/servlets/purl/1347541.
@article{osti_1347541,
title = {Optical systems fabricated by printing-based assembly},
author = {Rogers, John and Nuzzo, Ralph and Meitl, Matthew and Menard, Etienne and Baca, Alfred and Motala, Michael and Ahn, Jong-Hyun and Park, Sang-Il and Yu, Chang-Jae and Ko, Heung Cho and Stoykovich, Mark and Yoon, Jongseung},
abstractNote = {Provided are optical devices and systems fabricated, at least in part, via printing-based assembly and integration of device components. In specific embodiments the present invention provides light emitting systems, light collecting systems, light sensing systems and photovoltaic systems comprising printable semiconductor elements, including large area, high performance macroelectronic devices. Optical systems of the present invention comprise semiconductor elements assembled, organized and/or integrated with other device components via printing techniques that exhibit performance characteristics and functionality comparable to single crystalline semiconductor based devices fabricated using conventional high temperature processing methods. Optical systems of the present invention have device geometries and configurations, such as form factors, component densities, and component positions, accessed by printing that provide a range of useful device functionalities. Optical systems of the present invention include devices and device arrays exhibiting a range of useful physical and mechanical properties including flexibility, shapeability, conformability and stretchablity.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2017},
month = {3}
}

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All-Polymer Field-Effect Transistor Realized by Printing Techniques
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The rise of graphene
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Fabrication of Metal Nanowires Using Microcontact Printing
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Selective wet-etching of microcontact-printed Cu substrates with control over the etch profile
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High-performance all-polymer integrated circuits
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Flexible active-matrix displays and shift registers based on solution-processed organic transistors
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Wafer-scale integration of GaAs optoelectronic devices with standard Si integrated circuits using a low-temperature bonding procedure
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Applications
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Microcontact Printing of Alkanephosphonic Acids on Aluminum: Pattern Transfer by Wet Chemical Etching
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Correlation of buffer strain relaxation modes with transport properties of two‐dimensional electron gases
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Hole mobility in organic single crystals measured by a “flip-crystal” field-effect technique
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Optimization, Constraint, and History in the Evolution of Eyes
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Atomic Force Microscopy of Atomic-Scale Ledges and Etch Pits Formed During Dissolution of Quartz
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Screen printed organic thin film transistors (OTFTs) on a flexible substrate
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High-Conductivity Elastomeric Electronics
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Curved focal plane wide-field-of-view telescope design
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Fullerenes as precursors for diamond film growth without hydrogen or oxygen additions
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Synthetic Control of the Diameter and Length of Single Crystal Semiconductor Nanowires
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Metal–insulator–semiconductor electrostatics of carbon nanotubes
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Air-Stable All-Inorganic Nanocrystal Solar Cells Processed from Solution
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Diamond semiconductor technology for RF device applications
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Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry
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Low-voltage organic transistors with an amorphous molecular gate dielectric
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Towards woven logic from organic electronic fibres
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Field-Effect Mobility of Organic Polymer Thin-Film Transistors
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Template-Free Directional Growth of Single-Walled Carbon Nanotubes on a- and r-Plane Sapphire
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Catalytic Amplification of the Soft Lithographic Patterning of Si. Nonelectrochemical Orthogonal Fabrication of Photoluminescent Porous Si Pixel Arrays
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4 W single-transverse mode VECSEL utilising intra-cavity diamond heat spreader
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Si Nanowire Bridges in Microtrenches: Integration of Growth into Device Fabrication
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Steps and the structure of the (0001) α-alumina surface
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Nanoscale Hydrophobic Recovery: A Chemical Force Microscopy Study of UV/Ozone-Treated Cross-Linked Poly(dimethylsiloxane)
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Nanotransfer printing of organic and carbon nanotube thin-film transistors on plastic substrates
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Control of Thickness and Orientation of Solution-Grown Silicon Nanowires
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Contact Electrification and Adhesion Between Dissimilar Materials
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Semiconductor nanotube formation by a two-step template process
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Collapse of stamps for soft lithography due to interfacial adhesion
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Amorphous Si TFTs on plastically deformed spherical domes
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Nature of electrical contacts in a metal–molecule–semiconductor system
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Spherical deformation of compliant substrates with semiconductor device islands
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Effects of Mechanical Strain on TFTs on Spherical Domes
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Using soft lithography to fabricate GaAs/AlGaAs heterostructure field effect transistors
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Chemistry and Physics in One Dimension: Synthesis and Properties of Nanowires and Nanotubes
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Percolation in Transparent and Conducting Carbon Nanotube Networks
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Directed Assembly of One-Dimensional Nanostructures into Functional Networks
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Room-Temperature Ultraviolet Nanowire Nanolasers
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Growth of Millimeter-Long and Horizontally Aligned Single-Walled Carbon Nanotubes on Flat Substrates
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Long and Oriented Single-Walled Carbon Nanotubes Grown by Ethanol Chemical Vapor Deposition
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Self-organizing high-density single-walled carbon nanotube arrays from surfactant suspensions
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Nanomechanical Architecture of Strained Bilayer Thin Films: From Design Principles to Experimental Fabrication
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Nanowires for Integrated Multicolor Nanophotonics
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Nonlinear analyses of wrinkles in a film bonded to a compliant substrate
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Stamp Collapse in Soft Lithography
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Catalytic Growth of Zinc Oxide Nanowires by Vapor Transport
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Ordering of Spontaneously Formed Buckles on Planar Surfaces
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Guided molecular self-assembly: a review of recent efforts
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Plastic transistors in active-matrix displays
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Printed thin-film transistors and complementary logic gates that use polymer-coated single-walled carbon nanotube networks
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Organic Nanodielectrics for Low Voltage Carbon Nanotube Thin Film Transistors and Complementary Logic Gates
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Extreme bendability of single-walled carbon nanotube networks transferred from high-temperature growth substrates to plastic and their use in thin-film transistors
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Mixed Mode Cracking in Layered Materials
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Excimer laser induced crystallization of amorphous silicon on flexible polymer substrates
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High Weight Fraction Surfactant Solubilization of Single-Wall Carbon Nanotubes in Water
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Atomic-Step-Templated Formation of Single Wall Carbon Nanotube Patterns
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Cathodoluminescence Properties of Undoped and Zn-Doped AlxGa1-xN Grown by Metalorganic Vapor Phase Epitaxy
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Screen printing for the fabrication of organic light-emitting devices
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Fabrication of submicrometer features on curved substrates by microcontact printing
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Fabrication of a Cylindrical Display by Patterned Assembly
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III–nitrides: Growth, characterization, and properties
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Patterned Protein Layers on Solid Substrates by Thin Stamp Microcontact Printing
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Lateral growth of aligned mutilwalled carbon nanotubes under electric field
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Low-voltage and high-field-effect mobility organic transistors with a polymer insulator
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High-κ dielectrics for advanced carbon-nanotube transistors and logic gates
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High Performance n-Type Carbon Nanotube Field-Effect Transistors with Chemically Doped Contacts
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Ballistic carbon nanotube field-effect transistors
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Gallium Arsenide Transistors: Realization Through a Molecularly Designed Insulator
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Patterning of dielectric oxide thin layers by microcontact printing of self-assembled monolayers
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Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks
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Three-Dimensional Nanofabrication with Rubber Stamps and Conformable Photomasks
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Finite deformation mechanics in buckled thin films on compliant supports
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Preparation of Macroporous Metal Films from Colloidal Crystals
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Polymer-on-Polymer Stamping: Universal Approaches to Chemically Patterned Surfaces
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Scalable Interconnection and Integration of Nanowire Devices without Registration
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Soft lithographic fabrication of an image sensor array on a curved substrate
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Electronics using hybrid-molecular and mono-molecular devices
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Ordered Mesoporous Polymers of Tunable Pore Size from Colloidal Silica Templates
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Stretchable wavy metal interconnects
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Low-Temperature Solution-Phase Synthesis of Quantum Well Structured CdSe Nanoribbons
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Nanostructured advanced materials. Perspectives and directions
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Vectorial Growth of Metallic and Semiconducting Single-Wall Carbon Nanotubes
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Organic-Inorganic Hybrid Materials as Semiconducting Channels in Thin-Film Field-Effect Transistors
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Patterning organic–inorganic thin-film transistors using microcontact printed templates
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Thin-Film Transistors
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Analog and digital circuits using organic thin-film transistors on polyester substrates
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High-performance electronics using dense, perfectly aligned arrays of single-walled carbon nanotubes
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Controlled Synthesis and Photoluminescence Properties of ZnS Nanowires and Nanoribbons
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Synthesis and Optical Properties of CdS Nanoribbons
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Shape Selective Growth of CdS One-Dimensional Nanostructures by a Thermal Evaporation Process
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Lateral polysilicon p+–p–n+ and p+–n–n+ diodes
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Multiple Lateral Polysilicon Diodes as Temperature Sensors for Chemical Microreaction Systems
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The Characteristic Improvement of Si(111) Metal–Oxide–Semiconductor Field-Effect Transistor by Long-Time Hydrogen Annealing
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Synthetic Chemistry for Ultrapure, Processable, and High-Mobility Organic Transistor Semiconductors
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Recent Advances in Semiconductor Performance and Printing Processes for Organic Transistor-Based Electronics
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Finer features for functional microdevices
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Vertical Etching of Silicon at very High Aspect Ratios
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Lateral growth of single wall carbon nanotubes on various substrates by means of an “all-laser” synthesis approach
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High electron mobility transistor based on a GaN‐AlxGa 1−xN heterojunction
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A Stretchable Form of Single-Crystal Silicon for High-Performance Electronics on Rubber Substrates
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Invention of the integrated circuit
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Field emission from carbon nanotubes for displays
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Nanolithography based on patterned metal transfer and its application to organic electronic devices
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Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
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Optimized Structural Designs for Stretchable Silicon Integrated Circuits
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Stretchable and Foldable Silicon Integrated Circuits
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Materials and noncoplanar mesh designs for integrated circuits with linear elastic responses to extreme mechanical deformations
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Complementary Logic Gates and Ring Oscillators on Plastic Substrates by Use of Printed Ribbons of Single-Crystalline Silicon
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Organic TFT Array on a Paper Substrate
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Highly Emissive Self-assembled Organic Nanoparticles having Dual Color Capacity for Targeted Immunofluorescence Labeling
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Ultrathin Silicon Circuits With Strain-Isolation Layers and Mesh Layouts for High-Performance Electronics on Fabric, Vinyl, Leather, and Paper
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Microheater-integrated single gas sensor array chip fabricated on flexible polyimide substrate
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High-mobility polymer gate dielectric pentacene thin film transistors
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Fabrication of periodic nanostructures by phase-controlled multiple-beam interference
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Pentacene thin film transistors on inorganic dielectrics: Morphology, structural properties, and electronic transport
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Bulk Quantities of Single-Crystal Silicon Micro-/Nanoribbons Generated from Bulk Wafers
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A hemispherical electronic eye camera based on compressible silicon optoelectronics
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Curvilinear Electronics Formed Using Silicon Membrane Circuits and Elastomeric Transfer Elements
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Aligned Arrays of Single-Walled Carbon Nanotubes Generated from Random Networks by Orientationally Selective Laser Ablation
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Spatially Selective Guided Growth of High-Coverage Arrays and Random Networks of Single-Walled Carbon Nanotubes and Their Integration into Electronic Devices
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Radio frequency analog electronics based on carbon nanotube transistors
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Control of Si Nanowire Growth by Oxygen
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Patterned Luminescence of Organic Light-Emitting Diodes by Hot Microcontact Printing (HμCP) of Self-Assembled Monolayers
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High efficiency GaAs thin film solar cells by peeled film technology
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Single-Crystal Nanorings Formed by Epitaxial Self-Coiling of Polar Nanobelts
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Nanotube Molecular Wires as Chemical Sensors
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Structures of indium oxide nanobelts
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Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers
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A flexible and wearable glucose sensor based on functional polymers with Soft-MEMS techniques
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Mesoscale organization of metal nanocrystals
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Patterning Self-Assembled Monolayers: Applications in Materials Science
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Thermally-stable low-resistance Ti/Al/Mo/Au multilayer ohmic contacts on n–GaN
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Percolating Conduction in Finite Nanotube Networks
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Effect of mismatch strain on band gap in III‐V semiconductors
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Crystallographic alignment of high-density gallium nitride nanowire arrays
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Stretchable Interconnects for Elastic Electronic Surfaces
journal, August 2005


Stretchable gold conductors on elastomeric substrates
journal, April 2003


Design and Performance of Thin Metal Film Interconnects for Skin-Like Electronic Circuits
journal, April 2004


An Elastically Stretchable TFT Circuit
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Stiff subcircuit islands of diamondlike carbon for stretchable electronics
journal, July 2006


Mechanisms of reversible stretchability of thin metal films on elastomeric substrates
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Diamond growth in a direct-current low-pressure supersonic plasmajet
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Electrical imaging of neuronal activity by multi-transistor-array (MTA) recording at 7.8 μm resolution
journal, August 2004


Some properties of spherical and rod-shaped semiconductor and metal nanocrystals
journal, January 2002


SEMICONDUCTOR NANOWIRES AND NANOTUBES
journal, August 2004


Nanoribbon Waveguides for Subwavelength Photonics Integration
journal, August 2004


Simple Route to Large-Scale Ordered Arrays of Liquid-Deposited Carbon Nanotubes
journal, April 2004


III–V micromachined devices for microsystems
journal, September 1998


Degradation mechanism of diethylene glycol units in a terephthalate polymer
journal, April 2006


Thin film transistors for displays on plastic substrates
journal, August 2000


High-performance poly-Si TFTs on plastic substrates using a nano-structured separation layer approach
journal, January 2003


Organic light-emitting diodes formed by soft contact lamination
journal, January 2004


A Printable Form of Single-Crystalline Gallium Nitride for Flexible Optoelectronic Systems
journal, October 2005


The surface/bulk micromachining (SBM) process: a new method for fabricating released MEMS in single crystal silicon
journal, December 1999


Application of carbon nanotubes to field emission displays
journal, February 2001


Weave Patterned Organic Transistors on Fiber for E-Textiles
journal, February 2005


Functionalized silicon membranes for selective bio-organism capture
journal, April 2003


High-Resolution Contact Printing with Dendrimers
journal, April 2002


Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young’s modulus
journal, October 2003


Electrospinning of Nanofibers: Reinventing the Wheel?
journal, July 2004


Catalyst-Assisted Formation of Nanocantilever Arrays on ZnS Nanoribbons by Post-Annealing Treatment
journal, April 2006


Compliant thin film patterns of stiff materials as platforms for stretchable electronics
journal, December 2005


ZnO nanobelts grown on Si substrate
journal, July 2002


The Incredible Shrinking Circuit
journal, September 2001


Nanoscale Science and Technology: Building a Big Future from Small Things
journal, July 2003


Flexible membrane pressure sensor
journal, April 2005


Creating micro- and nanostructures on tubular and spherical surfaces
journal, December 2007

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  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6, p. 2412-2418
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High-Performance Carbon Nanotube Field-Effect Transistor With Tunable Polarities
journal, September 2005


Thin Film Deposition, Patterning, and Printing in Organic Thin Film Transistors
journal, October 2004


Controlled deposition of individual single-walled carbon nanotubes on chemically functionalized templates
journal, April 1999


Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: Applications in plastic electronics
journal, July 2002


High-resolution transfer printing on GaAs surfaces using alkane dithiol monolayers
journal, September 2002

  • Loo, Yueh-Lin; Hsu, Julia W. P.; Willett, Robert L.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, p. 2853-2856
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Interfacial Chemistries for Nanoscale Transfer Printing
journal, July 2002


Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination
journal, July 2002


Electrical Contacts to Molecular Layers by Nanotransfer Printing
journal, July 2003


Thermal conductivity of PET/(LDPE/AI) composites determined by MDSC
journal, September 2004


Electronic materials: Buckling down for flexible electronics
journal, December 2006


One-dimensional hole gas in germanium/silicon nanowire heterostructures
journal, July 2005


Nanowire Transistor Performance Limits and Applications
journal, November 2008


An experimental study of the source/drain parasitic resistance effects in amorphous silicon thin film transistors
journal, July 1992


Single-Crystal CdSe Nanosaws
journal, December 2003


Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers
journal, May 2006


Mechanically Strained Strained-Si NMOSFETs
journal, January 2004


Diamond-structured photonic crystals
journal, September 2004


Fully elastic interconnects on nanopatterned elastomeric substrates
journal, August 2006


Controlled growth of tetrapod-branched inorganic nanocrystals
journal, May 2003


Architectonic Quantum Dot Solids
journal, January 1999


Conducting elastomer surface texturing: a path to electrode spotting
journal, September 2004


Nanowire Arrays Defined by Nanoimprint Lithography
journal, April 2004


Template Synthesis of Electronically Conductive Polymer Nanostructures
journal, February 1995


Large Photoresponsivity in High-Mobility Single-Crystal Organic Field-Effect Phototransistors
journal, November 2005


Fabrication of Ordered Diamond/metal Nanocomposite Structures
journal, October 2000


An improved GaAs device model for the simulation of analog integrated circuit
journal, May 2003


High-Performance Nanowire Electronics and Photonics on Glass and Plastic Substrates
journal, November 2003


High-Performance Nanowire Electronics and Photonics and Nanoscale Patterning on Flexible Plastic Substrates
journal, July 2005


Diffusivity and Solubility of Si in the Al Metallization of Integrated Circuits
journal, December 1971


Solution Casting and Transfer Printing Single-Walled Carbon Nanotube Films
journal, September 2004


Transfer printing by kinetic control of adhesion to an elastomeric stamp
journal, December 2005


Stress focusing for controlled fracture in microelectromechanical systems
journal, February 2007


Ultrahigh-Density Nanowire Lattices and Circuits
journal, March 2003


A printable form of silicon for high performance thin film transistors on plastic substrates
journal, June 2004


Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing
journal, August 2004


High-Performance n- and p-Type Single-Crystal Organic Transistors with Free-Space Gate Dielectrics
journal, December 2004


Bendable single crystal silicon thin film transistors formed by printing on plastic substrates
journal, February 2005


Micromachining of three-dimensional GaAs membrane structures using high-energy nitrogen implantation
journal, October 2002


Printing meets lithography: Soft approaches to high-resolution patterning
journal, September 2001


Direct printing of polymer microstructures on flat and spherical surfaces using a letterpress technique
journal, September 2002

  • Miller, Scott M.; Troian, Sandra M.; Wagner, Sigurd
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, p. 2320-2327
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Colloidal nanocrystal heterostructures with linear and branched topology
journal, July 2004


Plastic Electronics and Their Packaging Technologies
journal, April 2003


Emerging Methods for Micro- and Nanofabrication
journal, July 2001


Electrically Induced Optical Emission from a Carbon Nanotube FET
journal, May 2003


AlGaN/GaN HEMTs-an overview of device operation and applications
journal, June 2002


High-mobility ultrathin semiconducting films prepared by spin coating
journal, March 2004


Ink-Jet Printing of Binders for Ceramic Components
journal, April 2002


Individually Suspended Single-Walled Carbon Nanotubes in Various Surfactants
journal, October 2003


A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires
journal, January 1998


Adhesion enhancement by a dielectric barrier discharge of PDMS used for flexible and stretchable electronics
journal, November 2007


A New Etching Solution System, H3 PO4- H2O2- H2O, for GaAs and Its Kinetics
journal, January 1978


High-Luminosity Blue and Blue-Green Gallium Nitride Light-Emitting Diodes
journal, January 1995


Mesoscopic self‐assembly of gold islands on diblock‐copolymer films
journal, January 1994

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  • Applied Physics Letters, Vol. 64, Issue 4, p. 422-424