Title: Growth methods for controlled large-area fabrication of high-quality graphene analogs

Abstract

In some embodiments, the present disclosure pertains to methods of growing chalcogen-linked metallic films on a surface in a chamber. In some embodiments, the method comprises placing a metal source and a chalcogen source in the chamber, and gradually heating the chamber, where the heating leads to the chemical vapor deposition of the chalcogen source and the metal source onto the surface, and facilitates the growth of the chalcogen-linked metallic film from the chalcogen source and the metal source on the surface. In some embodiments, the chalcogen source comprises sulfur, and the metal source comprises molybdenum trioxide. In some embodiments, the growth of the chalcogen-linked metallic film occurs by formation of nucleation sites on the surface, where the nucleation sites merge to form the chalcogen-linked metallic film. In some embodiments, the formed chalcogen-linked metallic film includes MoS.sub.2.

Inventors:

Najmaei, Sina; Liu, Zheng; Ajayan, Pulickel M.; Lou, Jun

Issue Date:

2017-02-28

Research Org.:

Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Org.:

USDOE

OSTI Identifier:

1345374

Patent Number(s):

9580834

Application Number:

14/203,958

Assignee:

WILLIAM MARSH RICE UNIVERSITY

Patent Classifications (CPCs):

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH

Show more

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

C23C16/305 - {Sulfides, selenides, or tellurides}

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH

C30B25/00 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
C30B25/04 - Pattern deposit, e.g. by using masks
C30B25/10 - Heating of the reaction chamber or the substrate
C30B29/46 - Sulfur-, selenium- or tellurium-containing compounds

Show less

DOE Contract Number:  

FG02-09ER46554

Resource Type:

Patent

Resource Relation:

Patent File Date: 2014 Mar 11

Country of Publication:

United States

Language:

English

Subject:

36 MATERIALS SCIENCE