Infrared control coating of thin film devices

Berland, Brian Spencer; Stowell, Michael Wayne; Hollingsworth, Russell

Title: Infrared control coating of thin film devices

Abstract

Systems and methods for creating an infrared-control coated thin film device with certain visible light transmittance and infrared reflectance properties are disclosed. The device may be made using various techniques including physical vapor deposition, chemical vapor deposition, thermal evaporation, pulsed laser deposition, sputter deposition, and sol-gel processes. In particular, a pulsed energy microwave plasma enhanced chemical vapor deposition process may be used. Production of the device may occur at speeds greater than 50 Angstroms/second and temperatures lower than 200.degree. C.

Inventors:: Berland, Brian Spencer; Stowell, Jr., Michael Wayne; Hollingsworth, Russell

Issue Date:: 2017-02-28

Research Org.:: ITN ENERGY SYSTEMS, INC., Littleton, CO (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1345221

Patent Number(s):: 9581741

Application Number:: 14/293,934

Assignee:: ITN ENERGY SYSTEMS, INC.

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/34 - Sputtering
C23C14/3485 - {using pulsed power to the target}
C23C16/407 - {of zinc, germanium, cadmium, indium, tin, thallium or bismuth}
C23C16/511 - using microwave discharges
C23C16/515 - using pulsed discharges

G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G02B5/282 - {reflecting for infra-red and transparent for visible light, e.g. heat reflectors, laser protection}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/32192 - {Microwave generated discharge

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DOE Contract Number:: EE0006348

Resource Type:: Patent

Resource Relation:: Patent File Date: 2014 Jun 02

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Berland, Brian Spencer, Stowell, Jr., Michael Wayne, and Hollingsworth, Russell. Infrared control coating of thin film devices.  United States: N. p., 2017. 
        Web.

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                    Berland, Brian Spencer, Stowell, Jr., Michael Wayne, & Hollingsworth, Russell. Infrared control coating of thin film devices.  United States.

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                    Berland, Brian Spencer, Stowell, Jr., Michael Wayne, and Hollingsworth, Russell. Tue .  
        "Infrared control coating of thin film devices".  United States.  https://www.osti.gov/servlets/purl/1345221.

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@article{osti_1345221,

  title        = {Infrared control coating of thin film devices},

  author       = {Berland, Brian Spencer and Stowell, Jr., Michael Wayne and Hollingsworth, Russell},

  abstractNote = {Systems and methods for creating an infrared-control coated thin film device with certain visible light transmittance and infrared reflectance properties are disclosed. The device may be made using various techniques including physical vapor deposition, chemical vapor deposition, thermal evaporation, pulsed laser deposition, sputter deposition, and sol-gel processes. In particular, a pulsed energy microwave plasma enhanced chemical vapor deposition process may be used. Production of the device may occur at speeds greater than 50 Angstroms/second and temperatures lower than 200.degree. C.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2017},

  month        = {2}

}

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Title: Infrared control coating of thin film devices

Abstract

Citation Formats

Plasma processing apparatus patent, November 1990

Process for production of zinc oxide thin film, and process for production of semiconductor device substrate and process for production of photoelectric conversion device using the same film patent, September 1998

Method for producing a photovoltaic element with zno layer having increasing fluorine content in layer thickness direction patent, August 2000

Passively protected battery pack with on load charge and on load conditioning-discharge capability and charging system patent, May 2002

Electrochromic layer patent, February 2003

Method for applying a wear protection layer system having optical properties onto surfaces patent, September 2003

Electrochromic layer patent, November 2004

Heat-absorbing filter and method for making same patent, January 2005

Inferential temperature measurement of an electrochromic device patent, February 2005

Apparatus and methods for modulating refractive index patent, March 2006

Workpiece holder for vacuum processing patent, October 2006

Control system for electrochromic devices patent, November 2006

Apparatus and methods for modulating refractive index patent, December 2006

Apparatus and methods for modulating refractive index patent, May 2007

Electrochromic infrared tunable filter and emissivity modulator patent, September 2007

Electrochromic device with self-forming ion transfer layer and lithium-fluoro-nitride electrolyte patent, September 2007

Control system for electrochromic devices patent, October 2007

Electrochromic devices and methods patent, May 2008

Transparent electrode patent, May 2009

Electronic electrochromic device and method patent, September 2009

Electrochromic devices having improved ion conducting layers patent, September 2009

Electrochromic polarizer patent, November 2009

Electrochromic device with self-forming ion transfer layer and lithium fluoro-nitride electrolyte patent, April 2010

Method of making an ion-switching device without a separate lithiation step patent, November 2010

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patent, November 1990

Process for production of zinc oxide thin film, and process for production of semiconductor device substrate and process for production of photoelectric conversion device using the same film
patent, September 1998

Method for producing a photovoltaic element with zno layer having increasing fluorine content in layer thickness direction
patent, August 2000

Passively protected battery pack with on load charge and on load conditioning-discharge capability and charging system
patent, May 2002

Electrochromic layer
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Method for applying a wear protection layer system having optical properties onto surfaces
patent, September 2003

Electrochromic layer
patent, November 2004

Heat-absorbing filter and method for making same
patent, January 2005

Inferential temperature measurement of an electrochromic device
patent, February 2005

Apparatus and methods for modulating refractive index
patent, March 2006

Workpiece holder for vacuum processing
patent, October 2006

Control system for electrochromic devices
patent, November 2006

Apparatus and methods for modulating refractive index
patent, December 2006

Apparatus and methods for modulating refractive index
patent, May 2007

Electrochromic infrared tunable filter and emissivity modulator
patent, September 2007

Electrochromic device with self-forming ion transfer layer and lithium-fluoro-nitride electrolyte
patent, September 2007

Control system for electrochromic devices
patent, October 2007

Electrochromic devices and methods
patent, May 2008

Transparent electrode
patent, May 2009

Electronic electrochromic device and method
patent, September 2009

Electrochromic devices having improved ion conducting layers
patent, September 2009

Electrochromic polarizer
patent, November 2009

Electrochromic device with self-forming ion transfer layer and lithium fluoro-nitride electrolyte
patent, April 2010

Method of making an ion-switching device without a separate lithiation step
patent, November 2010

Vehicle transparency
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