Title: Strain mapping in TEM using precession electron diffraction

Abstract

A sample material is scanned with a transmission electron microscope (TEM) over multiple steps having a predetermined size at a predetermined angle. Each scan at a predetermined step and angle is compared to a template, wherein the template is generated from parameters of the material and the scanning. The data is then analyzed using local mis-orientation mapping and/or Nye's tensor analysis to provide information about local strain states.

Inventors:

Taheri, Mitra Lenore; Leff, Asher Calvin

Issue Date:

2017-02-14

Research Org.:

Drexel Univ., Philadelphia, PA (United States)

Sponsoring Org.:

USDOE

OSTI Identifier:

1343758

Patent Number(s):

9568442

Application Number:

14/890,560

Assignee:

Drexel University

Patent Classifications (CPCs):

G - PHYSICS G01 - MEASURING G01L - MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

Show more

G - PHYSICS G01 - MEASURING G01L - MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE

G01L1/25 - using wave or particle radiation, e.g. X-rays {, microwaves}, neutrons

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

G01N2223/03 - by transmission
G01N2223/0565 - diffraction of electrons, e.g. LEED
G01N2223/0566 - analysing diffraction pattern
G01N2223/418 - electron microscope
G01N2223/607 - strain
G01N23/02 - by transmitting the radiation through the material
G01N23/04 - and forming images of the material
G01N23/20 - by using diffraction of the radiation by the materials, e.g. for investigating crystal structure
G01N23/20058 - Measuring diffraction of electrons, e.g. low energy electron diffraction [LEED] method or reflection high energy electron diffraction [RHEED] method

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

H01J37/26 - Electron or ion microscopes

Show less

DOE Contract Number:  

SC0008274; NE0000315

Resource Type:

Patent

Resource Relation:

Patent File Date: 2014 May 23

Country of Publication:

United States

Language:

English

Subject:

36 MATERIALS SCIENCE