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Title: Strain mapping in TEM using precession electron diffraction

A sample material is scanned with a transmission electron microscope (TEM) over multiple steps having a predetermined size at a predetermined angle. Each scan at a predetermined step and angle is compared to a template, wherein the template is generated from parameters of the material and the scanning. The data is then analyzed using local mis-orientation mapping and/or Nye's tensor analysis to provide information about local strain states.
Issue Date:
OSTI Identifier:
Drexel University DOESC
Patent Number(s):
Application Number:
Contract Number:
SC0008274; NE0000315
Resource Relation:
Patent File Date: 2014 May 23
Research Org:
Drexel Univ., Philadelphia, PA (United States)
Sponsoring Org:
Country of Publication:
United States

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