Method and tool to reverse the charges in anti-reflection films used for solar cell applications

Title: Method and tool to reverse the charges in anti-reflection films used for solar cell applications

A method is provided for making a solar cell. The method includes providing a stack including a substrate, a barrier layer disposed on the substrate, and an anti-reflective layer disposed on the barrier layer, where the anti-reflective layer has charge centers. The method also includes generating a corona with a charging tool and contacting the anti-reflective layer with the corona thereby injecting charge into at least some of the charge centers in the anti-reflective layer. Ultra-violet illumination and temperature-based annealing may be used to modify the charge of the anti-reflective layer.

Inventors:: Sharma, Vivek; Tracy, Clarence

Issue Date:: 2017-01-31

OSTI Identifier:: 1341853

Assignee:: Arizona Board of Regents on Behalf of Arizona State University (Scottsdale, AZ) CHO

Patent Number(s):: 9,559,222

Application Number:: 14/456,477

Resource Relation:: Patent File Date: 2014 Aug 11

Research Org:: Arizona Board of Regents on Behalf of Arizona State University, Scottsdale, AZ (United States)

Sponsoring Org:: USDOE

Country of Publication:: United States

Language:: English

Subject:: 14 SOLAR ENERGY; 36 MATERIALS SCIENCE

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Other works cited in this record:

Silicon nitride passivation for a solar cell
patent, August 2011

Zhou, Lisong; Dixit, Sangeeta; Choi, Soo Young
US Patent Document 7,993,700
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7993700

Experimental evidence of parasitic shunting in silicon nitride rear surface passivated solar cells
journal, January 2002

Dauwe, Stefan; Mittelstädt, Lutz; Metz, Axel
Progress in Photovoltaics: Research and Applications, Vol. 10, Issue 4, p. 271-278
DOI: 10.1002/pip.420

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