Band excitation method applicable to scanning probe microscopy

Title: Band excitation method applicable to scanning probe microscopy

Scanning probe microscopy may include a method for generating a band excitation (BE) signal and simultaneously exciting a probe at a plurality of frequencies within a predetermined frequency band based on the excitation signal. A response of the probe is measured across a subset of frequencies of the predetermined frequency band and the excitation signal is adjusted based on the measured response.

Inventors:: Jesse, Stephen; Kalinin, Sergei V.

Issue Date:: 2017-01-03

OSTI Identifier:: 1338057

Assignee:: UT-Battelle, LLC (Oak Ridge, TN) ORNL

Patent Number(s):: 9,535,087

Application Number:: 14/752,387

Contract Number:: AC05-00OR22725

Resource Relation:: Patent File Date: 2015 Jun 26

Research Org:: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

Sponsoring Org:: USDOE

Country of Publication:: United States

Language:: English

Subject:: 47 OTHER INSTRUMENTATION; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS

Full Text
View Full Text

Have feedback or suggestions for a way to improve these results? !

Save / Share this Record no
Export Metadata
- Endnote
- RIS
- Excel
- CSV
- XML
Send to Email

Send to Email

Email address:

Content:

Works referenced in this record:

Drift compensation for scanning probe microscopes using an enhanced probe positioning system
patent, December 1991

Elings, Virgil; Gurley, John; Rodgers, Mark
US Patent Document 5,077,473
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/5077473

Double cantilever sensor for atomic force microscope
patent, December 1993

Abraham, David; O'Boyle, Martin
US Patent Document 5,267,471
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/5267471

Methods of operating atomic force microscopes to measure friction
patent, September 1996

Elings, Virgil
US Patent Document 5,553,487
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/5553487

Resonance contact scanning force microscope
patent, October 1997

Gamble, Ronald
US Patent Document 5,681,987
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/5681987

Cantilever deflection sensor and use thereof
patent, September 1998

Bourgoin, Jean-Philippe; Johnson, Matthew; Michel, Bruno
US Patent Document 5,804,709
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/5804709

Scanning probe microscope with scan correction
patent, May 2000

Park, Sang-Il; Smith, Ian
US Patent Document 6,057,547
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/6057547

Differential force microscope
patent, July 2000

Ludeke, Rudolf; Wen, Huajun
US Patent Document 6,085,580
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/6085580

Sampling scanning probe microscope and sampling method thereof
patent, August 2000

Yasutake, Masatoshi; Inoue, Akira; Sakai, Fumiki
US Patent Document 6,094,972
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/6094972

Scanning force microscope with high-frequency cantilever
patent, November 2000

Zypman Niechonski, Fredy; Eppell, Steven
US Patent Document 6,145,374
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/6145374

Method and apparatus for measuring mechanical and electrical characteristics of a surface using electrostatic force modulation microscopy which operates in contact mode
patent, February 2001

Hong, Jaewan; Park, Sang-il; Khim, Zheong-Gu
US Patent Document 6,185,991
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/6185991

Method of producing magnetic force image and scanning probe microscope
August 2001

Kitamura, Shinichi
US Patent Document 6,281,495
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/6281495

Scanning probe microscope and method of measuring geometry of sample surface with scanning probe microscope
patent, December 2002

Yasutake, Masatoshi; Inoue, Akira; Homma, Akihiko
US Patent Document 6,499,340
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/6499340

Probe device
patent, July 2007

Matsumoto, Takuya; Naitoh, Yasuhisa; Kawai, Tomoji
US Patent Document 7,250,602
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7250602

Scanning probe microscope
patent, July 2008

Watanabe, Kazutoshi
US Patent Document 7,404,313
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7404313

Band excitation method applicable to scanning probe microscopy
patent, August 2010

Jesse, Stephen; Kalinin, Sergei
US Patent Document 7,775,086
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7775086

Band excitation method applicable to scanning probe microscopy
patent, May 2013

Jesse, Stephen; Kalinin, Sergei
US Patent Document 8,448,502
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/8448502

Similar Records

Similar records in DOepatents and OSTI.GOV collections:

Band excitation method applicable to scanning probe microscopy

Patent Jesse, Stephen ; Kalinin, Sergei V

Methods and apparatus are described for scanning probe microscopy. A method includes generating a band excitation (BE) signal having finite and predefined amplitude and phase spectrum in at least a first predefined frequency band; exciting a probe using the band excitation signal; obtaining data by measuring a response of the probe in at least a second predefined frequency band; and extracting at least one relevant dynamic parameter of the response of the probe in a predefined range including analyzing the obtained data. The BE signal can be synthesized prior to imaging (static band excitation), or adjusted at each pixel ormore »« less
Full Text Available August 2010
Band excitation method applicable to scanning probe microscopy

Patent Jesse, Stephen ; Kalinin, Sergei V

Methods and apparatus are described for scanning probe microscopy. A method includes generating a band excitation (BE) signal having finite and predefined amplitude and phase spectrum in at least a first predefined frequency band; exciting a probe using the band excitation signal; obtaining data by measuring a response of the probe in at least a second predefined frequency band; and extracting at least one relevant dynamic parameter of the response of the probe in a predefined range including analyzing the obtained data. The BE signal can be synthesized prior to imaging (static band excitation), or adjusted at each pixel ormore »« less
Full Text Available May 2013
Band excitation method applicable to scanning probe microscopy

Patent Jesse, Stephen ; Kalinin, Sergei V.

Scanning probe microscopy may include a method for generating a band excitation (BE) signal and simultaneously exciting a probe at a plurality of frequencies within a predetermined frequency band based on the excitation signal. A response of the probe is measured across a subset of frequencies of the predetermined frequency band and the excitation signal is adjusted based on the measured response.
Full Text Available August 2015
Ultrafast scanning probe microscopy

Patent Weiss, Shimon ; Chemla, Daniel S. ; Ogletree, D. Frank ; Botkin, David

An ultrafast scanning probe microscopy method for achieving subpicosecond-temporal resolution and submicron-spatial resolution of an observation sample. In one embodiment of the present claimed invention, a single short optical pulse is generated and is split into first and second pulses. One of the pulses is delayed using variable time delay means. The first pulse is then directed at an observation sample located proximate to the probe of a scanning probe microscope. The scanning probe microscope produces probe-sample signals indicative of the response of the probe to characteristics of the sample. The second pulse is used to modulate the probe ofmore »« less
Full Text Available January 1995
Spatially resolved quantitative mapping of thermomechanical properties and phase transition temperatures using scanning probe microscopy

Patent Jesse, Stephen ; Kalinin, Sergei V ; Nikiforov, Maxim P

An approach for the thermomechanical characterization of phase transitions in polymeric materials (polyethyleneterephthalate) by band excitation acoustic force microscopy is developed. This methodology allows the independent measurement of resonance frequency, Q factor, and oscillation amplitude of a tip-surface contact area as a function of tip temperature, from which the thermal evolution of tip-surface spring constant and mechanical dissipation can be extracted. A heating protocol maintained a constant tip-surface contact area and constant contact force, thereby allowing for reproducible measurements and quantitative extraction of material properties including temperature dependence of indentation-based elastic and loss moduli.
Full Text Available July 2013