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Title: Capacitive microelectromechanical switches with dynamic soft-landing

A microelectromechanical system (MEMS)-based electrical switch. The electrical switch includes a moveable electrode, a dielectric layer positioned adjacent the moveable electrode on a first side of the dielectric layer and spaced apart from the moveable electrode when the moveable electrode is in an inactivated position and in contact with the moveable electrode when the moveable electrode is in an activated position, and a substrate attached to the dielectric layer on a second side opposite to the first side, the moveable electrode is configured to brake prior to coming in contact with the dielectric layer when the moveable electrode is switched between the inactivated state and the activated state.
Inventors:
; ;
Issue Date:
OSTI Identifier:
1338054
Assignee:
PURDUE RESEARCH FOUNDATION (West Lafayette, IN) NNSASC
Patent Number(s):
9,536,692
Application Number:
14/881,185
Contract Number:
FC52-08NA28617
Resource Relation:
Patent File Date: 2015 Oct 13
Research Org:
PURDUE RESEARCH FOUNDATION, West Lafayette, IN (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

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