Three-dimensional patterning methods and related devices
Abstract
Three-dimensional patterning methods of a three-dimensional microstructure, such as a semiconductor wire array, are described, in conjunction with etching and/or deposition steps to pattern the three-dimensional microstructure.
- Inventors:
- Issue Date:
- Research Org.:
- The California Institute of Technology, Pasadena, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1337625
- Patent Number(s):
- 9530912
- Application Number:
- 12/956,422
- Assignee:
- The California Institute of Technology (Pasadena, CA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- DOE Contract Number:
- SC0001293; FG02-07ER46405
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2010 Nov 30
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Putnam, Morgan C., Kelzenberg, Michael D., Atwater, Harry A., Boettcher, Shannon W., Lewis, Nathan S., Spurgeon, Joshua M., Turner-Evans, Daniel B., and Warren, Emily L. Three-dimensional patterning methods and related devices. United States: N. p., 2016.
Web.
Putnam, Morgan C., Kelzenberg, Michael D., Atwater, Harry A., Boettcher, Shannon W., Lewis, Nathan S., Spurgeon, Joshua M., Turner-Evans, Daniel B., & Warren, Emily L. Three-dimensional patterning methods and related devices. United States.
Putnam, Morgan C., Kelzenberg, Michael D., Atwater, Harry A., Boettcher, Shannon W., Lewis, Nathan S., Spurgeon, Joshua M., Turner-Evans, Daniel B., and Warren, Emily L. Tue .
"Three-dimensional patterning methods and related devices". United States. https://www.osti.gov/servlets/purl/1337625.
@article{osti_1337625,
title = {Three-dimensional patterning methods and related devices},
author = {Putnam, Morgan C. and Kelzenberg, Michael D. and Atwater, Harry A. and Boettcher, Shannon W. and Lewis, Nathan S. and Spurgeon, Joshua M. and Turner-Evans, Daniel B. and Warren, Emily L.},
abstractNote = {Three-dimensional patterning methods of a three-dimensional microstructure, such as a semiconductor wire array, are described, in conjunction with etching and/or deposition steps to pattern the three-dimensional microstructure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {12}
}
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