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Title: Three-dimensional patterning methods and related devices

Three-dimensional patterning methods of a three-dimensional microstructure, such as a semiconductor wire array, are described, in conjunction with etching and/or deposition steps to pattern the three-dimensional microstructure.
Inventors:
; ; ; ; ; ; ;
Issue Date:
OSTI Identifier:
1337625
Assignee:
The California Institute of Technology (Pasadena, CA) EFRC
Patent Number(s):
9,530,912
Application Number:
12/956,422
Contract Number:
SC0001293; FG02-07ER46405
Resource Relation:
Patent File Date: 2010 Nov 30
Research Org:
The California Institute of Technology, Pasadena, CA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

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  • Tian, Bozhi; Zheng, Xiaolin; Kempa, Thomas J.
  • Nature, Vol. 449, Issue 7164, p. 885-889
  • DOI: 10.1038/nature06181

Preparation and characterization of CdS/CdTe thin film solar cells
journal, January 1997

Silicon nanowire solar cells
journal, December 2007
  • Tsakalakos, L.; Balch, J.; Fronheiser, J.
  • Applied Physics Letters, Vol. 91, Issue 23, 233117
  • DOI: 10.1063/1.2821113

Strong broadband optical absorption in silicon nanowire films
journal, July 2007
  • Tsakalakos, Loucas; Balch, Joleyn E.; Fronheiser, Jody
  • Journal of Nanophotonics, Vol. 1, Issue 1, Article No. 013552
  • DOI: 10.1117/1.2768999

Vapor-liquid-solid mechanism of single crystal growth
journal, March 1964
  • Wagner, R. S.; Ellis, W. C.
  • Applied Physics Letters, Vol. 4, Issue 5, p. 89-90
  • DOI: 10.1063/1.1753975

Defects in Silicon Crystals Grown by the VLS Technique
journal, March 1967
  • Wagner, R. S.
  • Journal of Applied Physics, Vol. 38, Issue 4, p. 1554-1560
  • DOI: 10.1063/1.1709722

Titania-nanotube-array-based photovoltaic cells
journal, July 2006
  • Wang, H.; Yip, C. T.; Cheung, K. Y.
  • Applied Physics Letters, Vol. 89, Issue 2, 023508
  • DOI: 10.1063/1.2221502

Control of the Size and Position of Silicon Nanowires Grown via the Vapor-Liquid-Solid Technique
journal, October 1997
  • Westwater, Jonathan; Gosain, Dharam Pal; Usui, Setsuo
  • Japanese Journal of Applied Physics, Vol. 36, Issue Part 1, No. 10, p. 6204-6209
  • DOI: 10.1143/JJAP.36.6204

Si Nanowires Grown via the Vapour–Liquid–Solid Reaction
journal, January 1998

Limitations and Possibilities for Improvement of Photovoltaic Solar Energy Converters: Part I: Considerations for Earth's Surface Operation
journal, July 1960

Vertically Oriented Germanium Nanowires Grown from Gold Colloids on Silicon Substrates and Subsequent Gold Removal
journal, June 2007
  • Woodruff, Jacob H.; Ratchford, Joshua B.; Goldthorpe, Irene A.
  • Nano Letters, Vol. 7, Issue 6, p. 1637-1642
  • DOI: 10.1021/nl070595x

A study on deep etching of silicon using ethylene-diamine-pyrocatechol-water
journal, July 1986

Semiconductor Nanowire Array: Potential Substrates for Photocatalysis and Photovoltaics
journal, January 2002
  • Wu, Yijing; Yan, Haoquan; Yang, Peidong
  • Topics in Catalysis, Vol. 19, Issue 2, p. 197-202
  • DOI: 10.1023/A:1015260008046

One-Dimensional Nanostructures: Synthesis, Characterization, and Applications
journal, March 2003

Experimental Observation of an Extremely Dark Material Made By a Low-Density Nanotube Array
journal, January 2008
  • Yang, Zu-Po; Ci, Lijie; Bur, James A.
  • Nano Letters, Vol. 8, Issue 2, p. 446-451
  • DOI: 10.1021/nl072369t

Si nanowires synthesized with Cu catalyst
journal, January 2007

Ultrathin silicon solar microcells for semitransparent, mechanically flexible and microconcentrator module designs
journal, October 2008
  • Yoon, Jongseung; Baca, Alfred J.; Park, Sang-Il
  • Nature Materials, Vol. 7, Issue 11, p. 907-915
  • DOI: 10.1038/nmat2287

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