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Title: Lithographically defined microporous carbon-composite structures

Abstract

A microporous carbon scaffold is produced by lithographically patterning a carbon-containing photoresist, followed by pyrolysis of the developed resist structure. Prior to exposure, the photoresist is loaded with a nanoparticulate material. After pyrolysis, the nanonparticulate material is dispersed in, and intimately mixed with, the carbonaceous material of the scaffold, thereby yielding a carbon composite structure.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1334643
Patent Number(s):
9,513,554
Application Number:
14/749,328
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015 Jun 24
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Burckel, David Bruce, Washburn, Cody M., Lambert, Timothy N., Finnegan, Patrick Sean, and Wheeler, David R. Lithographically defined microporous carbon-composite structures. United States: N. p., 2016. Web.
Burckel, David Bruce, Washburn, Cody M., Lambert, Timothy N., Finnegan, Patrick Sean, & Wheeler, David R. Lithographically defined microporous carbon-composite structures. United States.
Burckel, David Bruce, Washburn, Cody M., Lambert, Timothy N., Finnegan, Patrick Sean, and Wheeler, David R. Tue . "Lithographically defined microporous carbon-composite structures". United States. https://www.osti.gov/servlets/purl/1334643.
@article{osti_1334643,
title = {Lithographically defined microporous carbon-composite structures},
author = {Burckel, David Bruce and Washburn, Cody M. and Lambert, Timothy N. and Finnegan, Patrick Sean and Wheeler, David R.},
abstractNote = {A microporous carbon scaffold is produced by lithographically patterning a carbon-containing photoresist, followed by pyrolysis of the developed resist structure. Prior to exposure, the photoresist is loaded with a nanoparticulate material. After pyrolysis, the nanonparticulate material is dispersed in, and intimately mixed with, the carbonaceous material of the scaffold, thereby yielding a carbon composite structure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {12}
}

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Works referenced in this record:

Tunable Young's Modulus in Carbon MEMS Using Graphene-Based Stiffeners
journal, March 2013