Mechanical alignment of substrates to a mask
Abstract
A plurality of masks is attached to the underside of a mask frame. This attachment is made such that each mask can independently move relative to the mask frame in three directions. This relative movement allows each mask to adjust its position to align with respective alignment pins disposed on a working surface. In one embodiment, each mask is attached to the mask frame using fasteners, where the fasteners have a shaft with a diameter smaller than the diameter of the mounting hole disposed on the mask. A bias element may be used to allow relative movement between the mask and the mask frame in the vertical direction. Each mask may also have kinematic features to mate with the respective alignment pins on the working surface.
- Inventors:
- Issue Date:
- Research Org.:
- Varian Semiconductor Equipment Associates, Inc. Gloucester, MA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1331180
- Patent Number(s):
- 9,490,153
- Application Number:
- 14/323,088
- Assignee:
- Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)
- DOE Contract Number:
- EE0004737
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2014 Jul 03
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Webb, Aaron P., Carlson, Charles T., Honan, Michael, Amato, Luigi G., Grant, Christopher Neil, and Strassner, James D. Mechanical alignment of substrates to a mask. United States: N. p., 2016.
Web.
Webb, Aaron P., Carlson, Charles T., Honan, Michael, Amato, Luigi G., Grant, Christopher Neil, & Strassner, James D. Mechanical alignment of substrates to a mask. United States.
Webb, Aaron P., Carlson, Charles T., Honan, Michael, Amato, Luigi G., Grant, Christopher Neil, and Strassner, James D. Tue .
"Mechanical alignment of substrates to a mask". United States. https://www.osti.gov/servlets/purl/1331180.
@article{osti_1331180,
title = {Mechanical alignment of substrates to a mask},
author = {Webb, Aaron P. and Carlson, Charles T. and Honan, Michael and Amato, Luigi G. and Grant, Christopher Neil and Strassner, James D.},
abstractNote = {A plurality of masks is attached to the underside of a mask frame. This attachment is made such that each mask can independently move relative to the mask frame in three directions. This relative movement allows each mask to adjust its position to align with respective alignment pins disposed on a working surface. In one embodiment, each mask is attached to the mask frame using fasteners, where the fasteners have a shaft with a diameter smaller than the diameter of the mounting hole disposed on the mask. A bias element may be used to allow relative movement between the mask and the mask frame in the vertical direction. Each mask may also have kinematic features to mate with the respective alignment pins on the working surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {11}
}
Works referenced in this record:
Means for supporting a mask
patent, December 1999
- Kawahashi, Takashi; Kai, Hiromi
- US Patent Document 6,003,828