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Title: Mechanical alignment of substrates to a mask

A plurality of masks is attached to the underside of a mask frame. This attachment is made such that each mask can independently move relative to the mask frame in three directions. This relative movement allows each mask to adjust its position to align with respective alignment pins disposed on a working surface. In one embodiment, each mask is attached to the mask frame using fasteners, where the fasteners have a shaft with a diameter smaller than the diameter of the mounting hole disposed on the mask. A bias element may be used to allow relative movement between the mask and the mask frame in the vertical direction. Each mask may also have kinematic features to mate with the respective alignment pins on the working surface.
Inventors:
; ; ; ; ;
Issue Date:
OSTI Identifier:
1331180
Assignee:
Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA) DOEEE
Patent Number(s):
9,490,153
Application Number:
14/323,088
Contract Number:
EE0004737
Resource Relation:
Patent File Date: 2014 Jul 03
Research Org:
Varian Semiconductor Equipment Associates, Inc. Gloucester, MA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING
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