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Title: Ultrananocrystalline diamond contacts for electronic devices

Abstract

A method of forming electrical contacts on a diamond substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The mixture of gases include a source of a p-type or an n-type dopant. The plasma ball is disposed at a first distance from the diamond substrate. The diamond substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the diamond substrate for a first time, and a UNCD film, which is doped with at least one of a p-type dopant and an n-type dopant, is disposed on the diamond substrate. The doped UNCD film is patterned to define UNCD electrical contacts on the diamond substrate.

Inventors:
; ;
Issue Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1330709
Patent Number(s):
9484474
Application Number:
14/790,995
Assignee:
UChicago Argonne, LLC (Chicago, IL); Brookhaven Science Associates, LLC (Upton, NY) ; The Research Foundation for the State University of New York (Albany, NY)
Patent Classifications (CPCs):
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
AC02-98CH10886; SC0012704; AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015 Jul 02
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Sumant, Anirudha V., Smedley, John, and Muller, Erik. Ultrananocrystalline diamond contacts for electronic devices. United States: N. p., 2016. Web.
Sumant, Anirudha V., Smedley, John, & Muller, Erik. Ultrananocrystalline diamond contacts for electronic devices. United States.
Sumant, Anirudha V., Smedley, John, and Muller, Erik. Tue . "Ultrananocrystalline diamond contacts for electronic devices". United States. https://www.osti.gov/servlets/purl/1330709.
@article{osti_1330709,
title = {Ultrananocrystalline diamond contacts for electronic devices},
author = {Sumant, Anirudha V. and Smedley, John and Muller, Erik},
abstractNote = {A method of forming electrical contacts on a diamond substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The mixture of gases include a source of a p-type or an n-type dopant. The plasma ball is disposed at a first distance from the diamond substrate. The diamond substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the diamond substrate for a first time, and a UNCD film, which is doped with at least one of a p-type dopant and an n-type dopant, is disposed on the diamond substrate. The doped UNCD film is patterned to define UNCD electrical contacts on the diamond substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {11}
}

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Works referenced in this record:

Piezoresistivity in vapor‐deposited diamond films
journal, June 1992


Planar ultrananocrystalline diamond field emitter in accelerator radio frequency electron injector: Performance metrics
journal, November 2014


The CVD of Nanodiamond Materials
journal, July 2008


Optically Transparent Diamond Electrode for Use in IR Transmission Spectroelectrochemical Measurements
journal, October 2007


Configurational, electronic entropies and the thermoelectric properties of nanocarbon ensembles
journal, April 2008


Giant piezoresistance effect in silicon nanowires
journal, October 2006


Silicon Device Scaling to the Sub-10-nm Regime
journal, December 2004


High quantum efficiency ultrananocrystalline diamond photocathode for photoinjector applications
journal, September 2014

  • Pérez Quintero, Kenneth J.; Antipov, Sergey; Sumant, Anirudha V.
  • Applied Physics Letters, Vol. 105, Issue 12, Article No. 123103
  • https://doi.org/10.1063/1.4896418

Properties of Hydrogen Terminated Diamond as a Photocathode
journal, March 2011


Optical and Electrochemical Properties of Optically Transparent, Boron-Doped Diamond Thin Films Deposited on Quartz
journal, December 2002


Polycrystalline diamond films as prospective UV photocathodes
conference, December 2000


Review on diamond based piezoresistive sensors
conference, January 1998