Fabrication of diamond shells
Abstract
A novel method for fabricating diamond shells is introduced. The fabrication of such shells is a multi-step process, which involves diamond chemical vapor deposition on predetermined mandrels followed by polishing, microfabrication of holes, and removal of the mandrel by an etch process. The resultant shells of the present invention can be configured with a surface roughness at the nanometer level (e.g., on the order of down to about 10 nm RMS) on a mm length scale, and exhibit excellent hardness/strength, and good transparency in the both the infra-red and visible. Specifically, a novel process is disclosed herein, which allows coating of spherical substrates with optical-quality diamond films or nanocrystalline diamond films.
- Inventors:
- Issue Date:
- Research Org.:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1330699
- Patent Number(s):
- 9,481,930
- Application Number:
- 11/584,205
- Assignee:
- Lawrence Livermore National Security, LLC (Livermore, CA)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2006 Oct 20
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY
Citation Formats
Hamza, Alex V., Biener, Juergen, Wild, Christoph, and Woerner, Eckhard. Fabrication of diamond shells. United States: N. p., 2016.
Web.
Hamza, Alex V., Biener, Juergen, Wild, Christoph, & Woerner, Eckhard. Fabrication of diamond shells. United States.
Hamza, Alex V., Biener, Juergen, Wild, Christoph, and Woerner, Eckhard. Tue .
"Fabrication of diamond shells". United States. https://www.osti.gov/servlets/purl/1330699.
@article{osti_1330699,
title = {Fabrication of diamond shells},
author = {Hamza, Alex V. and Biener, Juergen and Wild, Christoph and Woerner, Eckhard},
abstractNote = {A novel method for fabricating diamond shells is introduced. The fabrication of such shells is a multi-step process, which involves diamond chemical vapor deposition on predetermined mandrels followed by polishing, microfabrication of holes, and removal of the mandrel by an etch process. The resultant shells of the present invention can be configured with a surface roughness at the nanometer level (e.g., on the order of down to about 10 nm RMS) on a mm length scale, and exhibit excellent hardness/strength, and good transparency in the both the infra-red and visible. Specifically, a novel process is disclosed herein, which allows coating of spherical substrates with optical-quality diamond films or nanocrystalline diamond films.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {11}
}
Works referenced in this record:
Growth of diamond films on spherical surfaces by hot filament CVD
journal, February 1998
- Lunn, B.; Wright, D. A.; Zhang, L. Y.
- Diamond and Related Materials, Vol. 7, Issue 2-5, p. 129-132
Implementation of the time-modulated process to produce diamond films using microwave-plasma and hot-filament CVD systems
journal, July 2003
- Ali, N.
- Vacuum, Vol. 71, Issue 4