Fabrication of diamond shells

Title: Fabrication of diamond shells

Abstract

A novel method for fabricating diamond shells is introduced. The fabrication of such shells is a multi-step process, which involves diamond chemical vapor deposition on predetermined mandrels followed by polishing, microfabrication of holes, and removal of the mandrel by an etch process. The resultant shells of the present invention can be configured with a surface roughness at the nanometer level (e.g., on the order of down to about 10 nm RMS) on a mm length scale, and exhibit excellent hardness/strength, and good transparency in the both the infra-red and visible. Specifically, a novel process is disclosed herein, which allows coating of spherical substrates with optical-quality diamond films or nanocrystalline diamond films.

Inventors:: Hamza, Alex V.; Biener, Juergen; Wild, Christoph; Woerner, Eckhard

Issue Date:: 2016-11-01

Research Org.:: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1330699

Patent Number(s):: 9481930

Application Number:: 11/584,205

Assignee:: Lawrence Livermore National Security, LLC (Livermore, CA)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B22 - CASTING B22F - WORKING METALLIC POWDER

C - CHEMISTRY C04 - CEMENTS C04B - LIME, MAGNESIA

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B - PERFORMING OPERATIONS B22 - CASTING B22F - WORKING METALLIC POWDER
B22F1/02 - comprising coating of the powder {

C - CHEMISTRY C04 - CEMENTS C04B - LIME, MAGNESIA
C04B2235/95 - Products characterised by their size, e.g. microceramics
C04B2235/6028 - Shaping around a core which is removed later

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C16/01 - on temporary substrates, e.g. substrates subsequently removed by etching

B - PERFORMING OPERATIONS B43 - WRITING OR DRAWING IMPLEMENTS B43K - IMPLEMENTS FOR WRITING OR DRAWING
B43K1/082 - {Balls}

G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G02B1/02 - made of crystals, e.g. rock-salt, semi-conductors

B - PERFORMING OPERATIONS B22 - CASTING B22F - WORKING METALLIC POWDER
B22F9/28 - starting from gaseous metal compounds

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
C30B29/607 - {Crystals of complex geometrical shape, e.g. tubes, cylinders
C30B35/00 - Apparatus in general, specially adapted for the growth, production or after-treatment of single crystals or a homogeneous polycrystalline material with defined structure
C30B29/04 - Diamond

C - CHEMISTRY C04 - CEMENTS C04B - LIME, MAGNESIA
C04B2235/9661 - Colour

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C16/274 - {using microwave discharges}

B - PERFORMING OPERATIONS B22 - CASTING B22F - WORKING METALLIC POWDER
B22F2998/00 - Supplementary information concerning processes or compositions relating to powder metallurgy

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C16/458 - characterised by the method used for supporting substrates in the reaction chamber
C23C16/4417 - {Methods specially adapted for coating powder}
C23C16/272 - {using DC, AC or RF discharges}

C - CHEMISTRY C04 - CEMENTS C04B - LIME, MAGNESIA
C04B2235/94 - Products characterised by their shape
C04B35/52 - based on carbon, e.g. graphite

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
C30B29/66 - Crystals of complex geometrical shape, e.g. tubes, cylinders

C - CHEMISTRY C04 - CEMENTS C04B - LIME, MAGNESIA
C04B2235/963 - Surface properties, e.g. surface roughness

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
C30B25/12 - Substrate holders or susceptors

G - PHYSICS G21 - NUCLEAR PHYSICS G21B - FUSION REACTORS
G21B1/19 - Targets for producing thermonuclear fusion reactions, e.g. pellets for irradiation by laser or charged particle beams

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
Y02E30/10 - Fusion reactors

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
C30B25/18 - characterised by the substrate

C - CHEMISTRY C04 - CEMENTS C04B - LIME, MAGNESIA
C04B2235/427 - Diamond

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C16/271 - {using hot filaments}

B - PERFORMING OPERATIONS B22 - CASTING B22F - WORKING METALLIC POWDER
B22F1/0051 - {Hollow particles}

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DOE Contract Number:: W-7405-ENG-48

Resource Type:: Patent

Resource Relation:: Patent File Date: 2006 Oct 20

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats


                    Hamza, Alex V., Biener, Juergen, Wild, Christoph, and Woerner, Eckhard. Fabrication of diamond shells.  United States: N. p., 2016. 
        Web.

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                    Hamza, Alex V., Biener, Juergen, Wild, Christoph, & Woerner, Eckhard. Fabrication of diamond shells.  United States.

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                    Hamza, Alex V., Biener, Juergen, Wild, Christoph, and Woerner, Eckhard. Tue .  
        "Fabrication of diamond shells".  United States.  https://www.osti.gov/servlets/purl/1330699.

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@article{osti_1330699,

  title        = {Fabrication of diamond shells},

  author       = {Hamza, Alex V. and Biener, Juergen and Wild, Christoph and Woerner, Eckhard},

  abstractNote = {A novel method for fabricating diamond shells is introduced. The fabrication of such shells is a multi-step process, which involves diamond chemical vapor deposition on predetermined mandrels followed by polishing, microfabrication of holes, and removal of the mandrel by an etch process. The resultant shells of the present invention can be configured with a surface roughness at the nanometer level (e.g., on the order of down to about 10 nm RMS) on a mm length scale, and exhibit excellent hardness/strength, and good transparency in the both the infra-red and visible. Specifically, a novel process is disclosed herein, which allows coating of spherical substrates with optical-quality diamond films or nanocrystalline diamond films.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2016},

  month        = {11}

}

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Works referenced in this record:

Growth of diamond films on spherical surfaces by hot filament CVD
journal, February 1998

Lunn, B.; Wright, D. A.; Zhang, L. Y.
Diamond and Related Materials, Vol. 7, Issue 2-5, p. 129-132
https://doi.org/10.1016/S0925-9635(97)00205-7

Implementation of the time-modulated process to produce diamond films using microwave-plasma and hot-filament CVD systems
journal, July 2003

Ali, N.
Vacuum, Vol. 71, Issue 4
https://doi.org/10.1016/S0042-207X(03)00003-4

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Title: Fabrication of diamond shells

Abstract

Citation Formats

Growth of diamond films on spherical surfaces by hot filament CVD journal, February 1998

Implementation of the time-modulated process to produce diamond films using microwave-plasma and hot-filament CVD systems journal, July 2003

Growth of diamond films on spherical surfaces by hot filament CVD
journal, February 1998

Implementation of the time-modulated process to produce diamond films using microwave-plasma and hot-filament CVD systems
journal, July 2003