Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof

Skogen, Erik J.

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Title: Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof

Abstract

The present invention includes a high-speed, high-saturation power detector (e.g., a photodiode) compatible with a relatively simple monolithic integration process. In particular embodiments, the photodiode includes an intrinsic bulk absorption region, which is grown above a main waveguide core including a number of quantum wells (QWs) that are used as the active region of a phase modulator. The invention also includes methods of fabricating integrated photodiode and waveguide assemblies using a monolithic, simplified process.

Inventors:: Skogen, Erik J.

Issue Date:: 2016-10-25

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1330348

Patent Number(s):: 9477040

Application Number:: 14/801,257

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L31/105 - the potential barrier being of the PIN type
H01L31/109 - the potential barrier being of the PN heterojunction type

Show less

DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Resource Relation:: Patent File Date: 2015 Jul 16

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Skogen, Erik J. Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof.  United States: N. p., 2016. 
        Web.

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                    Skogen, Erik J. Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof.  United States.

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                    Skogen, Erik J. Tue .  
        "Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof".  United States.  https://www.osti.gov/servlets/purl/1330348.

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@article{osti_1330348,

  title        = {Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof},

  author       = {Skogen, Erik J.},

  abstractNote = {The present invention includes a high-speed, high-saturation power detector (e.g., a photodiode) compatible with a relatively simple monolithic integration process. In particular embodiments, the photodiode includes an intrinsic bulk absorption region, which is grown above a main waveguide core including a number of quantum wells (QWs) that are used as the active region of a phase modulator. The invention also includes methods of fabricating integrated photodiode and waveguide assemblies using a monolithic, simplified process.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2016},

  month        = {10}

}

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Similar Records

Title: Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof

Abstract

Citation Formats

Optical analog-to-digital converter patent, July 2009

Optical NAND gate patent, August 2011

Optical NOR gate patent, September 2011

Optical set-reset latch patent, January 2013

Mutually injection locked lasers for enhanced frequency response patent, April 2014

Optical domain analog to digital conversion methods and apparatus patent, May 2014

Parallel optical sampler patent, May 2014

A widely tunable high-speed transmitter using an integrated SGDBR laser-semiconductor optical amplifier and mach-zehnder modulator journal, September 2003

Efficient vertical coupling of photodiodes to InGaAsP rib waveguides journal, June 1991

Hybrid Silicon Photonics for Optical Interconnects journal, March 2011

Quantum-well-intermixed monolithically integrated widely tunable all-optical wavelength converter operating at 10 Gb/s journal, August 2005

High-Saturation-Current Charge-Compensated InGaAs–InP Uni-Traveling-Carrier Photodiode journal, March 2004

Enhanced photoluminescence emission from bandgap shifted InGaAs/InGaAsP/InP microstructures processed with UV laser quantum well intermixing journal, October 2013

Quantum well intermixing journal, June 1993

Cross-phase modulation efficiency in offset quantum-well and centered quantum-well semiconductor optical amplifiers journal, November 2005

Electroabsorption modulator performance predicted from band-edge absorption spectra of bulk, quantum-well, and quantum-well-intermixed InGaAsP structures journal, January 2007

Photocurrent spectroscopy analysis of widely tunable negative-chirp quantum-well intermixed laser-modulator transmitters journal, January 2005

Photocurrent spectroscopy for quantum-well intermixed photonic integrated circuit design journal, July 2005

40 Gbit/s photonic receivers integrating UTC photodiodes with high- and low-confinement SOAs using quantum well intermixing and MOCVD regrowth journal, January 2006

A study of regrowth interface and material quality for a novel InP-based architecture journal, December 2004

Demonstration of high saturation power∕high gain SOAs using quantum well intermixing based integration platform journal, January 2005

Demonstration of negative chirp characteristics over wide wavelength range using monolithically integrated SG-DBR laser∕electroabsorption modulator journal, January 2004

Demonstration of Widely Tunable Single-Chip 10-Gb/s Laser–Modulators Using Multiple-Bandgap InGaAsP Quantum-Well Intermixing journal, July 2004

Design and Demonstration of Novel QW Intermixing Scheme for the Integration of UTC-Type Photodiodes With QW-Based Components journal, February 2006

Quantum well intermixing and MOCVD regrowth for monolithic integration of 40 Gbit∕s UTC type photodiodes with QW based components journal, January 2005

Integration of high-gain and high-saturation-power active regions using quantum-well intermixing and offset-quantum-well regrowth journal, January 2004

A quantum-well-intermixing process for wavelength-agile photonic integrated circuits journal, July 2002

High contrast InP/InGaAsP grating MOCVD regrowth using TBA and TBP journal, December 2004

Integrated Guided-Wave Photodiode Using Through-Absorber Quantum-Well-Intermixing journal, September 2013

Monolithically integrated active components: a quantum-well intermixing approach journal, March 2005

Multiple-band-edge quantum-well intermixing in the InGaAs∕InGaAsP∕InGaP material system journal, June 2005

Optical AND and NOT gates at 40 Gbps using electro-absorption modulator/photodiode Pairs conference, November 2010

Postgrowth control of the quantum-well band edge for the monolithic integration of widely tunable lasers and electroabsorption modulators journal, September 2003

Tunable buried ridge stripe sampled grating distributed Bragg reflector lasers utilizing quantum well intermixing conference, January 2001

Tunable sampled-grating DBR lasers using quantum-well intermixing journal, September 2002

Quantum well intermixed waveguide grating journal, July 2011

Integration of hybrid silicon lasers and electroabsorption modulators journal, January 2008

Mutual Injection Locking of Monolithically Integrated Coupled-Cavity DBR Lasers journal, July 2011

Fabrication and molecular beam epitaxy regrowth of first-order, high contrast AlGaAs∕GaAs gratings journal, January 2006

Towards Monolithic Integration of Nonlinear Optical Frequency Conversion journal, September 2010

Optical analog-to-digital converter
patent, July 2009

Optical NAND gate
patent, August 2011

Optical NOR gate
patent, September 2011

Optical set-reset latch
patent, January 2013

Mutually injection locked lasers for enhanced frequency response
patent, April 2014

Optical domain analog to digital conversion methods and apparatus
patent, May 2014

Parallel optical sampler
patent, May 2014

A widely tunable high-speed transmitter using an integrated SGDBR laser-semiconductor optical amplifier and mach-zehnder modulator
journal, September 2003

Efficient vertical coupling of photodiodes to InGaAsP rib waveguides
journal, June 1991

Hybrid Silicon Photonics for Optical Interconnects
journal, March 2011

Quantum-well-intermixed monolithically integrated widely tunable all-optical wavelength converter operating at 10 Gb/s
journal, August 2005

High-Saturation-Current Charge-Compensated InGaAs–InP Uni-Traveling-Carrier Photodiode
journal, March 2004

Enhanced photoluminescence emission from bandgap shifted InGaAs/InGaAsP/InP microstructures processed with UV laser quantum well intermixing
journal, October 2013

Quantum well intermixing
journal, June 1993

Cross-phase modulation efficiency in offset quantum-well and centered quantum-well semiconductor optical amplifiers
journal, November 2005

Electroabsorption modulator performance predicted from band-edge absorption spectra of bulk, quantum-well, and quantum-well-intermixed InGaAsP structures
journal, January 2007

Photocurrent spectroscopy analysis of widely tunable negative-chirp quantum-well intermixed laser-modulator transmitters
journal, January 2005

Photocurrent spectroscopy for quantum-well intermixed photonic integrated circuit design
journal, July 2005

40 Gbit/s photonic receivers integrating UTC photodiodes with high- and low-confinement SOAs using quantum well intermixing and MOCVD regrowth
journal, January 2006

A study of regrowth interface and material quality for a novel InP-based architecture
journal, December 2004

Demonstration of high saturation power∕high gain SOAs using quantum well intermixing based integration platform
journal, January 2005

Demonstration of negative chirp characteristics over wide wavelength range using monolithically integrated SG-DBR laser∕electroabsorption modulator
journal, January 2004

Demonstration of Widely Tunable Single-Chip 10-Gb/s Laser–Modulators Using Multiple-Bandgap InGaAsP Quantum-Well Intermixing
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Quantum well intermixing and MOCVD regrowth for monolithic integration of 40 Gbit∕s UTC type photodiodes with QW based components
journal, January 2005

Integration of high-gain and high-saturation-power active regions using quantum-well intermixing and offset-quantum-well regrowth
journal, January 2004

A quantum-well-intermixing process for wavelength-agile photonic integrated circuits
journal, July 2002

High contrast InP/InGaAsP grating MOCVD regrowth using TBA and TBP
journal, December 2004

Integrated Guided-Wave Photodiode Using Through-Absorber Quantum-Well-Intermixing
journal, September 2013

Monolithically integrated active components: a quantum-well intermixing approach
journal, March 2005

Multiple-band-edge quantum-well intermixing in the InGaAs∕InGaAsP∕InGaP material system
journal, June 2005

Optical AND and NOT gates at 40 Gbps using electro-absorption modulator/photodiode Pairs
conference, November 2010

Postgrowth control of the quantum-well band edge for the monolithic integration of widely tunable lasers and electroabsorption modulators
journal, September 2003

Tunable buried ridge stripe sampled grating distributed Bragg reflector lasers utilizing quantum well intermixing
conference, January 2001

Tunable sampled-grating DBR lasers using quantum-well intermixing
journal, September 2002

Quantum well intermixed waveguide grating
journal, July 2011

Integration of hybrid silicon lasers and electroabsorption modulators
journal, January 2008

Mutual Injection Locking of Monolithically Integrated Coupled-Cavity DBR Lasers
journal, July 2011

Fabrication and molecular beam epitaxy regrowth of first-order, high contrast AlGaAs∕GaAs gratings
journal, January 2006

Towards Monolithic Integration of Nonlinear Optical Frequency Conversion
journal, September 2010