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Title: Low-stress doped ultrananocrystalline diamond

Nanocrystalline diamond coatings exhibit stress in nano/micro-electro mechanical systems (MEMS). Doped nanocrstalline diamond coatings exhibit increased stress. A carbide forming metal coating reduces the in-plane stress. In addition, without any metal coating, simply growing UNCD or NCD with thickness in the range of 3-4 micron also reduces in-plane stress significantly. Such coatings can be used in MEMS applications.
Inventors:
; ;
Issue Date:
OSTI Identifier:
1330330
Assignee:
UChicago Argonne, LLC (Chicago, IL) ANL
Patent Number(s):
9,475,690
Application Number:
14/283,098
Contract Number:
AC02-06CH11357
Resource Relation:
Patent File Date: 2014 May 20
Research Org:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Works referenced in this record:

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