Low-stress doped ultrananocrystalline diamond
Abstract
Nanocrystalline diamond coatings exhibit stress in nano/micro-electro mechanical systems (MEMS). Doped nanocrstalline diamond coatings exhibit increased stress. A carbide forming metal coating reduces the in-plane stress. In addition, without any metal coating, simply growing UNCD or NCD with thickness in the range of 3-4 micron also reduces in-plane stress significantly. Such coatings can be used in MEMS applications.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1330330
- Patent Number(s):
- 9475690
- Application Number:
- 14/283,098
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2014 May 20
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Sumant, Anirudha V., Buja, Federico, and van Spengen, Willem Merlijn. Low-stress doped ultrananocrystalline diamond. United States: N. p., 2016.
Web.
Sumant, Anirudha V., Buja, Federico, & van Spengen, Willem Merlijn. Low-stress doped ultrananocrystalline diamond. United States.
Sumant, Anirudha V., Buja, Federico, and van Spengen, Willem Merlijn. Tue .
"Low-stress doped ultrananocrystalline diamond". United States. https://www.osti.gov/servlets/purl/1330330.
@article{osti_1330330,
title = {Low-stress doped ultrananocrystalline diamond},
author = {Sumant, Anirudha V. and Buja, Federico and van Spengen, Willem Merlijn},
abstractNote = {Nanocrystalline diamond coatings exhibit stress in nano/micro-electro mechanical systems (MEMS). Doped nanocrstalline diamond coatings exhibit increased stress. A carbide forming metal coating reduces the in-plane stress. In addition, without any metal coating, simply growing UNCD or NCD with thickness in the range of 3-4 micron also reduces in-plane stress significantly. Such coatings can be used in MEMS applications.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {10}
}
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