skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Low-stress doped ultrananocrystalline diamond

Abstract

Nanocrystalline diamond coatings exhibit stress in nano/micro-electro mechanical systems (MEMS). Doped nanocrstalline diamond coatings exhibit increased stress. A carbide forming metal coating reduces the in-plane stress. In addition, without any metal coating, simply growing UNCD or NCD with thickness in the range of 3-4 micron also reduces in-plane stress significantly. Such coatings can be used in MEMS applications.

Inventors:
; ;
Issue Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1330330
Patent Number(s):
9475690
Application Number:
14/283,098
Assignee:
UChicago Argonne, LLC (Chicago, IL)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 May 20
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Sumant, Anirudha V., Buja, Federico, and van Spengen, Willem Merlijn. Low-stress doped ultrananocrystalline diamond. United States: N. p., 2016. Web.
Sumant, Anirudha V., Buja, Federico, & van Spengen, Willem Merlijn. Low-stress doped ultrananocrystalline diamond. United States.
Sumant, Anirudha V., Buja, Federico, and van Spengen, Willem Merlijn. Tue . "Low-stress doped ultrananocrystalline diamond". United States. https://www.osti.gov/servlets/purl/1330330.
@article{osti_1330330,
title = {Low-stress doped ultrananocrystalline diamond},
author = {Sumant, Anirudha V. and Buja, Federico and van Spengen, Willem Merlijn},
abstractNote = {Nanocrystalline diamond coatings exhibit stress in nano/micro-electro mechanical systems (MEMS). Doped nanocrstalline diamond coatings exhibit increased stress. A carbide forming metal coating reduces the in-plane stress. In addition, without any metal coating, simply growing UNCD or NCD with thickness in the range of 3-4 micron also reduces in-plane stress significantly. Such coatings can be used in MEMS applications.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {10}
}

Patent:

Save / Share:

Works referenced in this record:

Synthesis and characterization of highly-conducting nitrogen-doped ultrananocrystalline diamond films
journal, September 2001


Electrically conducting ultrananocrystalline diamond for the development of a next generation of micro-actuators
journal, August 2014


Novel Ultrananocrystalline Diamond Probes for High-Resolution Low-Wear Nanolithographic Techniques
journal, August 2005


Routes to failure in rotating MEMS devices experiencing sliding friction
conference, September 1997


Thermal conductivity of nitrogenated ultrananocrystalline diamond films on silicon
journal, April 2008


A thermal actuator for nanoscale in situ microscopy testing: design and characterization
journal, January 2006


First adhesion measurements of conductive ultrananocrystalline diamond MEMS sidewalls
conference, April 2014

  • Buja, Federico; Kokorian, Jaap; Sumant, Anirudha V.
  • 2014 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
  • https://doi.org/10.1109/NEMS.2014.6908763

Mechanical characterization and stress engineering of nanocrystalline diamonds films for MEMS applications
journal, March 2005


Enhanced nucleation, smoothness and conformality of ultrananocrystalline diamond (UNCD) ultrathin films via tungsten interlayers
journal, October 2006