Low-stress doped ultrananocrystalline diamond

Title: Low-stress doped ultrananocrystalline diamond

Nanocrystalline diamond coatings exhibit stress in nano/micro-electro mechanical systems (MEMS). Doped nanocrstalline diamond coatings exhibit increased stress. A carbide forming metal coating reduces the in-plane stress. In addition, without any metal coating, simply growing UNCD or NCD with thickness in the range of 3-4 micron also reduces in-plane stress significantly. Such coatings can be used in MEMS applications.

Inventors:: Sumant, Anirudha V.; Buja, Federico; van Spengen, Willem Merlijn

Issue Date:: 2016-10-25

OSTI Identifier:: 1330330

Assignee:: UChicago Argonne, LLC (Chicago, IL) ANL

Patent Number(s):: 9,475,690

Application Number:: 14/283,098

Contract Number:: AC02-06CH11357

Resource Relation:: Patent File Date: 2014 May 20

Research Org:: Argonne National Lab. (ANL), Argonne, IL (United States)

Sponsoring Org:: USDOE

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

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Works referenced in this record:

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