Microfluidic pressure amplifier circuits and electrostatic gates for pneumatic microsystems
Abstract
An electrostatic actuator is provide that can include a fluidic line, a first electrode, and a second electrode such that a gate chamber portion of the fluidic line is sandwiched between the first electrode and the second electrode. The electrostatic actuator can also include a pressure-balancing channel in fluid communication with the gate chamber portion where the first electrode is sandwiched between the pressure-balancing channel and the gate chamber portion. A pneumatic valve system is provided which includes an electrostatic gate and a fluidic channel fluidly separate from a fluidic control line. A pneumatic valve portion of the fluidic control line can be positioned relative to a portion of the fluidic channel such that expansion of the pneumatic valve portion restricts fluid flow through the fluidic channel. Methods of using an electrostatic actuator and a pneumatic valve system are also provided.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of Illinois at Urbana-Champaign, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1325770
- Patent Number(s):
- 9447895
- Application Number:
- 13/901,200
- Assignee:
- The Board of Trustees of the University Of Illinois (Urbana, IL)
- Patent Classifications (CPCs):
-
F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16K - VALVES
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2013 May 23
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Tice, Joshua D., Bassett, Thomas A., Desai, Amit V., Apblett, Christopher A., and Kenis, Paul J. A. Microfluidic pressure amplifier circuits and electrostatic gates for pneumatic microsystems. United States: N. p., 2016.
Web.
Tice, Joshua D., Bassett, Thomas A., Desai, Amit V., Apblett, Christopher A., & Kenis, Paul J. A. Microfluidic pressure amplifier circuits and electrostatic gates for pneumatic microsystems. United States.
Tice, Joshua D., Bassett, Thomas A., Desai, Amit V., Apblett, Christopher A., and Kenis, Paul J. A. Tue .
"Microfluidic pressure amplifier circuits and electrostatic gates for pneumatic microsystems". United States. https://www.osti.gov/servlets/purl/1325770.
@article{osti_1325770,
title = {Microfluidic pressure amplifier circuits and electrostatic gates for pneumatic microsystems},
author = {Tice, Joshua D. and Bassett, Thomas A. and Desai, Amit V. and Apblett, Christopher A. and Kenis, Paul J. A.},
abstractNote = {An electrostatic actuator is provide that can include a fluidic line, a first electrode, and a second electrode such that a gate chamber portion of the fluidic line is sandwiched between the first electrode and the second electrode. The electrostatic actuator can also include a pressure-balancing channel in fluid communication with the gate chamber portion where the first electrode is sandwiched between the pressure-balancing channel and the gate chamber portion. A pneumatic valve system is provided which includes an electrostatic gate and a fluidic channel fluidly separate from a fluidic control line. A pneumatic valve portion of the fluidic control line can be positioned relative to a portion of the fluidic channel such that expansion of the pneumatic valve portion restricts fluid flow through the fluidic channel. Methods of using an electrostatic actuator and a pneumatic valve system are also provided.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 20 00:00:00 EDT 2016},
month = {Tue Sep 20 00:00:00 EDT 2016}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Electrostatic valves for microfluidic devices
patent, June 2007
- Driggs, B. Scott; Enzelberger, Markus; Quake, Stephen R.
- US Patent Document 7,232,109
Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes
patent, November 2007
- Unger, Marc A.
- US Patent Document 7,291,512
Stretchable micro-electrode array [for retinal prosthesis]
conference, January 2002
- Maghribi, M.; Hamilton, J.; Polla, D.
- 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology. Proceedings (Cat. No.02EX578)
Design considerations for elastomeric normally closed microfluidic valves
journal, December 2011
- Mohan, Ritika; Schudel, Benjamin R.; Desai, Amit V.
- Sensors and Actuators B: Chemical, Vol. 160, Issue 1, p. 1216-1223
Normally closed electrostatic microvalve with pressure balance mechanism for portable fuel cell application
journal, February 2010
- Yoshida, Kazushi; Tanaka, Shuji; Hagihara, Yosuke
- Sensors and Actuators A: Physical, Vol. 157, Issue 2, p. 290-298
Actuation of elastomeric microvalves in point-of-care settings using handheld, battery-powered instrumentation
journal, January 2010
- Addae-Mensah, Kweku A.; Cheung, Yuk Kee; Fekete, Veronika
- Lab on a Chip, Vol. 10, Issue 12
Re-configurable fluid circuits by PDMS elastomer micromachining
conference, January 1999
- Armani, D.; Liu, C.; Aluru, N.
- Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291)
A Bidirectional Electrostatic Microvalve With Microsecond Switching Performance
journal, December 2007
- Bae, Byunghoon; Han, Jeahyeong; Masel, Richard I.
- Journal of Microelectromechanical Systems, Vol. 16, Issue 6
A class of low voltage, elastomer–metal ‘wet’ actuators for use in high-density microfluidics
journal, January 2007
- Bansal, Tushar; Chang, Meng-Ping; Maharbiz, Michel M.
- Lab Chip, Vol. 7, Issue 2
The electro-mechanical response of elastomer membranes coated with ultra-thin metal electrodes
journal, November 2005
- Begley, M.; Bartsmith, H.; Scott, O.
- Journal of the Mechanics and Physics of Solids, Vol. 53, Issue 11
Microfabricated bioprocessor for integrated nanoliter-scale Sanger DNA sequencing
journal, April 2006
- Blazej, R. G.; Kumaresan, P.; Mathies, R. A.
- Proceedings of the National Academy of Sciences, Vol. 103, Issue 19, p. 7240-7245
Factors enhancing the reliability of touch-mode electrostatic actuators
journal, February 2000
- Cabuz, C.; Cabuz, E. I.; Ohnstein, T. R.
- Sensors and Actuators A: Physical, Vol. 79, Issue 3, p. 245-250
Electrostatically-driven elastomer components for user-reconfigurable high density microfluidics
journal, January 2009
- Chang, Meng-Ping; Maharbiz, Michel M.
- Lab on a Chip, Vol. 9, Issue 9
Droplet-based microfluidics with nonaqueous solvents and solutions
journal, January 2006
- Chatterjee, Debalina; Hetayothin, Boonta; Wheeler, Aaron R.
- Lab on a Chip, Vol. 6, Issue 2
Two-layer multiplexed peristaltic pumps for high-density integrated microfluidics
journal, January 2011
- Cole, Matthew C.; Desai, Amit V.; Kenis, Paul J. A.
- Sensors and Actuators B: Chemical, Vol. 151, Issue 2, p. 384-393
Small but strong: A review of the mechanical properties of carbon nanotube–polymer composites
journal, August 2006
- Coleman, Jonathan N.; Khan, Umar; Blau, Werner J.
- Carbon, Vol. 44, Issue 9, p. 1624-1652
Compact analytical modeling of squeeze film damping with arbitrary venting conditions using a Green's function approach
journal, October 1998
- Darling, Robert B.; Hivick, Chris; Xu, Jianyang
- Sensors and Actuators A: Physical, Vol. 70, Issue 1-2, p. 32-41
Accurate method for determining adhesion of cantilever beams
journal, July 1999
- de Boer, M. P.; Michalske, T. A.
- Journal of Applied Physics, Vol. 86, Issue 2
Design considerations for electrostatic microvalves with applications in poly(dimethylsiloxane)-based microfluidics
journal, January 2012
- Desai, Amit V.; Tice, Joshua D.; Apblett, Christopher A.
- Lab on a Chip, Vol. 12, Issue 6
Analysis of the Dynamics and Touchdown in a Model of Electrostatic MEMS
journal, January 2007
- Flores, G.; Mercado, G.; Pelesko, J. A.
- SIAM Journal on Applied Mathematics, Vol. 67, Issue 2
Handheld recirculation system and customized media for microfluidic cell culture
journal, January 2006
- Futai, Nobuyuki; Gu, Wei; Song, Jonathan W.
- Lab Chip, Vol. 6, Issue 1
Gold Nanoparticles Obtained by Bio-precipitation from Gold(III) Solutions
journal, January 1999
- Gardea-Torresdey, J. L.; Tiemann, K. J.; Gamez, G.
- Journal of Nanoparticle Research, Vol. 1, Issue 3, p. 397-404
Computerized microfluidic cell culture using elastomeric channels and Braille displays
journal, October 2004
- Gu, W.; Zhu, X.; Futai, N.
- Proceedings of the National Academy of Sciences, Vol. 101, Issue 45, p. 15861-15866
Multiplexed hydraulic valve actuation using ionic liquid filled soft channels and Braille displays
journal, January 2007
- Gu, Wei; Chen, Hao; Tung, Yi-Chung
- Applied Physics Letters, Vol. 90, Issue 3
Touchdown and Pull-In Voltage Behavior of a MEMS Device with Varying Dielectric Properties
journal, January 2005
- Guo, Yujin; Pan, Zhenguo; Ward, M. J.
- SIAM Journal on Applied Mathematics, Vol. 66, Issue 1
Collapse of stamps for soft lithography due to interfacial adhesion
journal, April 2005
- Hsia, K. J.; Huang, Y.; Menard, E.
- Applied Physics Letters, Vol. 86, Issue 15, Article No. 154106
Characterizations and optimization of electrical contact between nanocomposite elastomer and metal
conference, June 2009
- Hu, Huan; Liu, Chang
- TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference
Effects of Injection Schemes and Column Geometry on the Performance of Microchip Electrophoresis Devices
journal, April 1994
- Jacobson, Stephen C.; Hergenroder, Roland.; Koutny, Lance B.
- Analytical Chemistry, Vol. 66, Issue 7
Microreaction engineering — is small better?
journal, January 2001
- Jensen, Klavs F.
- Chemical Engineering Science, Vol. 56, Issue 2, p. 293-303
Acoustically driven programmable liquid motion using resonance cavities
journal, July 2009
- Langelier, S. M.; Chang, D. S.; Zeitoun, R. I.
- Proceedings of the National Academy of Sciences, Vol. 106, Issue 31, p. 12617-12622
Multistep Synthesis of a Radiolabeled Imaging Probe Using Integrated Microfluidics
journal, December 2005
- Lee, C. -C.
- Science, Vol. 310, Issue 5755
High-radix microfluidic multiplexer with pressure valves of different thresholds
journal, January 2009
- Lee, Dong Woo; Cho, Young-Ho
- Lab on a Chip, Vol. 9, Issue 12
Frequency-specific flow control in microfluidic circuits with passive elastomeric features
journal, February 2009
- Leslie, Daniel C.; Easley, Christopher J.; Seker, Erkin
- Nature Physics, Vol. 5, Issue 3
Characterization study of bonded and unbonded polydimethylsiloxane aimed for bio-micro-electromechanical systems-related applications
journal, April 2007
- Liu, Miao
- Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 6, Issue 2
Critical Review: Adhesion in surface micromechanical structures
journal, January 1997
- Maboudian, Roya
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 1
A Systems Approach to Measuring the Binding Energy Landscapes of Transcription Factors
journal, January 2007
- Maerkl, S. J.; Quake, S. R.
- Science, Vol. 315, Issue 5809
Dissecting biological "dark matter" with single-cell genetic analysis of rare and uncultivated TM7 microbes from the human mouth
journal, July 2007
- Marcy, Y.; Ouverney, C.; Bik, E. M.
- Proceedings of the National Academy of Sciences, Vol. 104, Issue 29, p. 11889-11894
Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theory
journal, March 1993
- Mastrangelo, C. H.; Hsu, C. H.
- Journal of Microelectromechanical Systems, Vol. 2, Issue 1
Mechanical stability and adhesion of microstructures under capillary forces. II. Experiments
journal, March 1993
- Mastrangelo, C. H.; Hsu, C. H.
- Journal of Microelectromechanical Systems, Vol. 2, Issue 1
Solution Casting and Transfer Printing Single-Walled Carbon Nanotube Films
journal, September 2004
- Meitl, Matthew A.; Zhou, Yangxin; Gaur, Anshu
- Nano Letters, Vol. 4, Issue 9, p. 1643-1647
Integrated elastomeric components for autonomous regulation of sequential and oscillatory flow switching in microfluidic devices
journal, April 2010
- Mosadegh, Bobak; Kuo, Chuan-Hsien; Tung, Yi-Chung
- Nature Physics, Vol. 6, Issue 6
M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures
journal, June 1997
- Osterberg, P. M.; Senturia, S. D.
- Journal of Microelectromechanical Systems, Vol. 6, Issue 2
An integrated microfluidic device for influenza and other genetic analyses
journal, January 2005
- Pal, R.; Yang, M.; Lin, R.
- Lab on a Chip, Vol. 5, Issue 10
Adhesion characteristics of MEMS in microfluidic environments
journal, October 2005
- Parker, E. E.; Ashurst, W. R.; Carraro, C.
- Journal of Microelectromechanical Systems, Vol. 14, Issue 5
Wet-etching of structures with straight facets and adjustable taper into glass substrates
journal, January 2010
- Pekas, Nikola; Zhang, Qing; Nannini, Matthieu
- Lab Chip, Vol. 10, Issue 4
Microfluidic Generation of Lipidic Mesophases for Membrane Protein Crystallization
journal, June 2009
- Perry, Sarah L.; Roberts, Griffin W.; Tice, Joshua D.
- Crystal Growth & Design, Vol. 9, Issue 6
Surface modification in microsystems and nanosystems
journal, July 2009
- Prakash, Shaurya; Karacor, M. B.; Banerjee, S.
- Surface Science Reports, Vol. 64, Issue 7
Microfluidic system for on-chip high-throughput whole-animal sorting and screening at subcellular resolution
journal, August 2007
- Rohde, C. B.; Zeng, F.; Gonzalez-Rubio, R.
- Proceedings of the National Academy of Sciences, Vol. 104, Issue 35, p. 13891-13895
Ultra-low electrical percolation threshold in carbon-nanotube-epoxy composites
journal, September 2003
- Sandler, J. K. W.; Kirk, J. E.; Kinloch, I. A.
- Polymer, Vol. 44, Issue 19, p. 5893-5899
Multiplexed detection of nucleic acids in a combinatorial screening chip
journal, January 2011
- Schudel, Benjamin R.; Tanyeri, Melikhan; Mukherjee, Arnab
- Lab on a Chip, Vol. 11, Issue 11
Effect of Stamp Deformation on the Quality of Microcontact Printing: Theory and Experiment
journal, June 2004
- Sharp, Kenneth G.; Blackman, Gregory S.; Glassmaker, Nicholas J.
- Langmuir, Vol. 20, Issue 15
Analysis of the accuracy of the bulge test in determining the mechanical properties of thin films
journal, June 1992
- Small, Martha K.; Nix, W. D.
- Journal of Materials Research, Vol. 7, Issue 6
High Throughput Gene Expression Measurement with Real Time PCR in a Microfluidic Dynamic Array
journal, February 2008
- Spurgeon, Sandra L.; Jones, Robert C.; Ramakrishnan, Ramesh
- PLoS ONE, Vol. 3, Issue 2
Scaling properties of a low-actuation pressure microfluidic valve
journal, January 2004
- Studer, Vincent; Hang, Giao; Pandolfi, Anna
- Journal of Applied Physics, Vol. 95, Issue 1
An ultra-thin PDMS membrane as a bio/micro–nano interface: fabrication and characterization
journal, May 2007
- Thangawng, Abel L.; Ruoff, Rodney S.; Swartz, Melody A.
- Biomedical Microdevices, Vol. 9, Issue 4
Microfluidic Large-Scale Integration
journal, September 2002
- Thorsen, T.
- Science, Vol. 298, Issue 5593
A microfluidic platform for pharmaceutical salt screening
journal, January 2011
- Thorson, Michael R.; Goyal, Sachit; Schudel, Benjamin R.
- Lab on a Chip, Vol. 11, Issue 22
Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography
journal, April 2000
- Unger, M. A.
- Science, Vol. 288, Issue 5463
Digital microfluidics using soft lithography
journal, January 2006
- Urbanski, John Paul; Thies, William; Rhodes, Christopher
- Lab Chip, Vol. 6, Issue 1
A high-stroke, high-pressure electrostatic actuator for valve applications
journal, September 2002
- van der Wijngaart, Wouter; Ask, Håkan; Enoksson, Peter
- Sensors and Actuators A: Physical, Vol. 100, Issue 2-3, p. 264-271
A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films
journal, December 1992
- Vlassak, J. J.; Nix, W. D.
- Journal of Materials Research, Vol. 7, Issue 12
Deflection and stability of membrane structures under electrostatic and Casimir forces in microelectromechanical systems
journal, September 2005
- Wang, C.; Guo, W.; Feng, Q.
- Acta Mechanica, Vol. 180, Issue 1-4
Static control logic for microfluidic devices using pressure-gain valves
journal, January 2010
- Weaver, James A.; Melin, Jessica; Stark, Don
- Nature Physics, Vol. 6, Issue 3
Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)
journal, November 1998
- Wibbeler, Jürgen; Pfeifer, Günter; Hietschold, Michael
- Sensors and Actuators A: Physical, Vol. 71, Issue 1-2, p. 74-80
Transparent, Conductive Carbon Nanotube Films
journal, August 2004
- Wu, Zhuangchun; Chen, Zhihong; Du, Xu
- Science, Vol. 305, Issue 5688, p. 1273-1276
Surface micromachined electrostatically actuated micro peristaltic pump
journal, January 2004
- Xie, Jun; Shih, Jason; Lin, Qiao
- Lab on a Chip, Vol. 4, Issue 5
Effect of Surface Free Energy on PDMS Transfer in Microcontact Printing and Its Application to ToF-SIMS to Probe Surface Energies
journal, May 2009
- Yang, Li; Shirahata, Naoto; Saini, Gaurav
- Langmuir, Vol. 25, Issue 10
Dielectric charging effects on Parylene electrostatic actuators
conference, January 2002
- Tze-Jung Yao, ; Walsh, K.
- Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266)
Stiction and anti-stiction in MEMS and NEMS
journal, February 2003
- Yapu, Zhao
- Acta Mechanica Sinica, Vol. 19, Issue 1
Deformation of PDMS membrane and microcantilever by a water droplet: Comparison between Mooney–Rivlin and linear elastic constitutive models
journal, April 2009
- Yu, Ying-Song; Zhao, Ya-Pu
- Journal of Colloid and Interface Science, Vol. 332, Issue 2, p. 467-476
A method of printing carbon nanotube thin films
journal, March 2006
- Zhou, Yangxin; Hu, Liangbing; Grüner, George
- Applied Physics Letters, Vol. 88, Issue 12