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Title: Microfluidic pressure amplifier circuits and electrostatic gates for pneumatic microsystems

An electrostatic actuator is provide that can include a fluidic line, a first electrode, and a second electrode such that a gate chamber portion of the fluidic line is sandwiched between the first electrode and the second electrode. The electrostatic actuator can also include a pressure-balancing channel in fluid communication with the gate chamber portion where the first electrode is sandwiched between the pressure-balancing channel and the gate chamber portion. A pneumatic valve system is provided which includes an electrostatic gate and a fluidic channel fluidly separate from a fluidic control line. A pneumatic valve portion of the fluidic control line can be positioned relative to a portion of the fluidic channel such that expansion of the pneumatic valve portion restricts fluid flow through the fluidic channel. Methods of using an electrostatic actuator and a pneumatic valve system are also provided.
Inventors:
; ; ; ;
Issue Date:
OSTI Identifier:
1325770
Assignee:
The Board of Trustees of the University Of Illinois (Urbana, IL) CHO
Patent Number(s):
9,447,895
Application Number:
13/901,200
Resource Relation:
Patent File Date: 2013 May 23
Research Org:
The Board of Trustees of the University Of Illinois, Urbana, IL (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

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