Title: Fabrication method for small-scale structures with non-planar features

Abstract

The fabrication of small-scale structures is disclosed. A unit-cell of a small-scale structure with non-planar features is fabricated by forming a membrane on a suitable material. A pattern is formed in the membrane and a portion of the substrate underneath the membrane is removed to form a cavity. Resonators are then directionally deposited on the wall or sides of the cavity. The cavity may be rotated during deposition to form closed-loop resonators. The resonators may be non-planar. The unit-cells can be formed in a layer that includes an array of unit-cells.

Inventors:

Burckel, David Bruce; Ten Eyck, Gregory A.

Issue Date:

Tue Sep 20 00:00:00 EDT 2016

Research Org.:

Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:

USDOE

OSTI Identifier:

1325765

Patent Number(s):

9448336

Application Number:

14/548,070

Assignee:

Sandia Corporation (Albquerque, NM)

Patent Classifications (CPCs):

B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

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B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

B82Y40/00 - Manufacture or treatment of nanostructures

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

C23C14/042 - {using masks}
C23C14/22 - characterised by the process of coating
C23C14/225 - {Oblique incidence of vaporised material on substrate}
C23C14/24 - Vacuum evaporation

G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

G02B3/0012 - {characterised by the manufacturing method}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01P - WAVEGUIDES

H01P11/008 - {Manufacturing resonators}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01Q - ANTENNAS, i.e. RADIO AERIALS

H01Q1/2283 - {mounted in or on the surface of a semiconductor substrate as a chip-type antenna or integrated with other components into an IC package}
H01Q15/0086 - {said selective devices having materials with a synthesized negative refractive index, e.g. metamaterials or left-handed materials}
H01Q7/00 - Loop antennas with a substantially uniform current distribution around the loop and having a directional radiation pattern in a plane perpendicular to the plane of the loop

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DOE Contract Number:  

AC04-94AL85000

Resource Type:

Patent

Resource Relation:

Patent File Date: 2014 Nov 19

Country of Publication:

United States

Language:

English

Subject:

36 MATERIALS SCIENCE; 42 ENGINEERING