Fabrication method for small-scale structures with non-planar features
Abstract
The fabrication of small-scale structures is disclosed. A unit-cell of a small-scale structure with non-planar features is fabricated by forming a membrane on a suitable material. A pattern is formed in the membrane and a portion of the substrate underneath the membrane is removed to form a cavity. Resonators are then directionally deposited on the wall or sides of the cavity. The cavity may be rotated during deposition to form closed-loop resonators. The resonators may be non-planar. The unit-cells can be formed in a layer that includes an array of unit-cells.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1325765
- Patent Number(s):
- 9448336
- Application Number:
- 14/548,070
- Assignee:
- Sandia Corporation (Albquerque, NM)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2014 Nov 19
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 42 ENGINEERING
Citation Formats
Burckel, David Bruce, and Ten Eyck, Gregory A. Fabrication method for small-scale structures with non-planar features. United States: N. p., 2016.
Web.
Burckel, David Bruce, & Ten Eyck, Gregory A. Fabrication method for small-scale structures with non-planar features. United States.
Burckel, David Bruce, and Ten Eyck, Gregory A. Tue .
"Fabrication method for small-scale structures with non-planar features". United States. https://www.osti.gov/servlets/purl/1325765.
@article{osti_1325765,
title = {Fabrication method for small-scale structures with non-planar features},
author = {Burckel, David Bruce and Ten Eyck, Gregory A.},
abstractNote = {The fabrication of small-scale structures is disclosed. A unit-cell of a small-scale structure with non-planar features is fabricated by forming a membrane on a suitable material. A pattern is formed in the membrane and a portion of the substrate underneath the membrane is removed to form a cavity. Resonators are then directionally deposited on the wall or sides of the cavity. The cavity may be rotated during deposition to form closed-loop resonators. The resonators may be non-planar. The unit-cells can be formed in a layer that includes an array of unit-cells.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {9}
}
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