Liquid flow cells having graphene on nitride for microscopy
Abstract
This disclosure provides systems, methods, and apparatus related to liquid flow cells for microscopy. In one aspect, a device includes a substrate having a first and a second oxide layer disposed on surfaces of the substrate. A first and a second nitride layer are disposed on the first and second oxide layers, respectively. A cavity is defined in the first oxide layer, the first nitride layer, and the substrate, with the cavity including a third nitride layer disposed on walls of the substrate and the second oxide layer that define the cavity. A channel is defined in the second oxide layer. An inlet port and an outlet port are defined in the second nitride layer and in fluid communication with the channel. A plurality of viewports is defined in the second nitride layer. A first graphene sheet is disposed on the second nitride layer covering the plurality of viewports.
- Inventors:
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1325694
- Patent Number(s):
- 9449787
- Application Number:
- 14/817,551
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- AC02-05CH11231
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2015 Aug 04
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
Citation Formats
Adiga, Vivekananda P., Dunn, Gabriel, Zettl, Alexander K., and Alivisatos, A. Paul. Liquid flow cells having graphene on nitride for microscopy. United States: N. p., 2016.
Web.
Adiga, Vivekananda P., Dunn, Gabriel, Zettl, Alexander K., & Alivisatos, A. Paul. Liquid flow cells having graphene on nitride for microscopy. United States.
Adiga, Vivekananda P., Dunn, Gabriel, Zettl, Alexander K., and Alivisatos, A. Paul. Tue .
"Liquid flow cells having graphene on nitride for microscopy". United States. https://www.osti.gov/servlets/purl/1325694.
@article{osti_1325694,
title = {Liquid flow cells having graphene on nitride for microscopy},
author = {Adiga, Vivekananda P. and Dunn, Gabriel and Zettl, Alexander K. and Alivisatos, A. Paul},
abstractNote = {This disclosure provides systems, methods, and apparatus related to liquid flow cells for microscopy. In one aspect, a device includes a substrate having a first and a second oxide layer disposed on surfaces of the substrate. A first and a second nitride layer are disposed on the first and second oxide layers, respectively. A cavity is defined in the first oxide layer, the first nitride layer, and the substrate, with the cavity including a third nitride layer disposed on walls of the substrate and the second oxide layer that define the cavity. A channel is defined in the second oxide layer. An inlet port and an outlet port are defined in the second nitride layer and in fluid communication with the channel. A plurality of viewports is defined in the second nitride layer. A first graphene sheet is disposed on the second nitride layer covering the plurality of viewports.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {9}
}
Works referenced in this record:
Liquid scanning transmission electron microscopy: Nanoscale imaging in micrometers-thick liquids
journal, February 2014
- Schuh, Tobias; de Jonge, Niels
- Comptes Rendus Physique, Vol. 15, Issue 2-3, p. 214-223
Nanofluidic Cells with Controlled Pathlength and Liquid Flow for Rapid, High-Resolution In Situ Imaging with Electrons
journal, June 2013
- Mueller, C.; Harb, M.; Dwyer, J. R.
- The Journal of Physical Chemistry Letters, Vol. 4, Issue 14