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Title: Multi-channel gas-delivery system

Abstract

One embodiment of the present invention provides a gas-delivery system for delivering reaction gas to a reactor chamber. The gas-delivery system includes a main gas-inlet port for receiving reaction gases and a gas-delivery plate that includes a plurality of gas channels. A gas channel includes a plurality of gas holes for allowing the reaction gases to enter the reactor chamber from the gas channel. The gas-delivery system further includes a plurality of sub-gas lines coupling together the main gas-inlet port and the gas-delivery plate, and a respective sub-gas line is configured to deliver a portion of the received reaction gases to a corresponding gas channel.

Inventors:
; ;
Issue Date:
Research Org.:
SolarCity Corporation, San Mateo, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1324687
Patent Number(s):
9,441,295
Application Number:
12/952,127
Assignee:
SolarCity Corporation (San Mateo, CA)
DOE Contract Number:  
EE0000589
Resource Type:
Patent
Resource Relation:
Patent File Date: 2010 Nov 22
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 14 SOLAR ENERGY

Citation Formats

Rozenzon, Yan, Trujillo, Robert T., and Beese, Steven C. Multi-channel gas-delivery system. United States: N. p., 2016. Web.
Rozenzon, Yan, Trujillo, Robert T., & Beese, Steven C. Multi-channel gas-delivery system. United States.
Rozenzon, Yan, Trujillo, Robert T., and Beese, Steven C. Tue . "Multi-channel gas-delivery system". United States. https://www.osti.gov/servlets/purl/1324687.
@article{osti_1324687,
title = {Multi-channel gas-delivery system},
author = {Rozenzon, Yan and Trujillo, Robert T. and Beese, Steven C.},
abstractNote = {One embodiment of the present invention provides a gas-delivery system for delivering reaction gas to a reactor chamber. The gas-delivery system includes a main gas-inlet port for receiving reaction gases and a gas-delivery plate that includes a plurality of gas channels. A gas channel includes a plurality of gas holes for allowing the reaction gases to enter the reactor chamber from the gas channel. The gas-delivery system further includes a plurality of sub-gas lines coupling together the main gas-inlet port and the gas-delivery plate, and a respective sub-gas line is configured to deliver a portion of the received reaction gases to a corresponding gas channel.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {9}
}

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Works referenced in this record:

Solar cell efficiency tables (Version 45): Solar cell efficiency tables
journal, December 2014

  • Green, Martin A.; Emery, Keith; Hishikawa, Yoshihiro
  • Progress in Photovoltaics: Research and Applications, Vol. 23, Issue 1
  • DOI: 10.1002/pip.2573