Multi-channel gas-delivery system
Abstract
One embodiment of the present invention provides a gas-delivery system for delivering reaction gas to a reactor chamber. The gas-delivery system includes a main gas-inlet port for receiving reaction gases and a gas-delivery plate that includes a plurality of gas channels. A gas channel includes a plurality of gas holes for allowing the reaction gases to enter the reactor chamber from the gas channel. The gas-delivery system further includes a plurality of sub-gas lines coupling together the main gas-inlet port and the gas-delivery plate, and a respective sub-gas line is configured to deliver a portion of the received reaction gases to a corresponding gas channel.
- Inventors:
- Issue Date:
- Research Org.:
- SolarCity Corporation, San Mateo, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1324687
- Patent Number(s):
- 9441295
- Application Number:
- 12/952,127
- Assignee:
- SolarCity Corporation (San Mateo, CA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
- DOE Contract Number:
- EE0000589
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2010 Nov 22
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; 14 SOLAR ENERGY
Citation Formats
Rozenzon, Yan, Trujillo, Robert T., and Beese, Steven C. Multi-channel gas-delivery system. United States: N. p., 2016.
Web.
Rozenzon, Yan, Trujillo, Robert T., & Beese, Steven C. Multi-channel gas-delivery system. United States.
Rozenzon, Yan, Trujillo, Robert T., and Beese, Steven C. Tue .
"Multi-channel gas-delivery system". United States. https://www.osti.gov/servlets/purl/1324687.
@article{osti_1324687,
title = {Multi-channel gas-delivery system},
author = {Rozenzon, Yan and Trujillo, Robert T. and Beese, Steven C.},
abstractNote = {One embodiment of the present invention provides a gas-delivery system for delivering reaction gas to a reactor chamber. The gas-delivery system includes a main gas-inlet port for receiving reaction gases and a gas-delivery plate that includes a plurality of gas channels. A gas channel includes a plurality of gas holes for allowing the reaction gases to enter the reactor chamber from the gas channel. The gas-delivery system further includes a plurality of sub-gas lines coupling together the main gas-inlet port and the gas-delivery plate, and a respective sub-gas line is configured to deliver a portion of the received reaction gases to a corresponding gas channel.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {9}
}
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