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Title: Magnetic-cusp, cathodic-arc source

A magnetic-cusp for a cathodic-arc source wherein the arc is confined to the desired cathode surface, provides a current path for electrons from the cathode to the anode, and utilizes electric and magnetic fields to guide ions from the cathode to a point of use, such as substrates to be coated. The magnetic-cusp insures arc stability by an easy magnetic path from anode to cathode, while the straight-through arrangement leads to high ion transmission. 3 figs.
Inventors:
Issue Date:
OSTI Identifier:
131941
Assignee:
Univ. of California, Oakland, CA (United States) PTO; SCA: 360601; 360101; 360201; PA: EDB-95:156589; SN: 95001489052
Patent Number(s):
US 5,468,363/A/
Application Number:
PAN: 8-232,661
Contract Number:
W-7405-ENG-48
Resource Relation:
Other Information: PBD: 21 Nov 1995
Research Org:
University of California
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ION SOURCES; DESIGN; MATERIALS; ENERGY BEAM DEPOSITION; USES; CATHODES; ELECTRIC ARCS