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Title: Magnetic-cusp, cathodic-arc source

Abstract

A magnetic-cusp for a cathodic-arc source wherein the arc is confined to the desired cathode surface, provides a current path for electrons from the cathode to the anode, and utilizes electric and magnetic fields to guide ions from the cathode to a point of use, such as substrates to be coated. The magnetic-cusp insures arc stability by an easy magnetic path from anode to cathode, while the straight-through arrangement leads to high ion transmission. 3 figs.

Inventors:
Issue Date:
Research Org.:
University of California
OSTI Identifier:
131941
Patent Number(s):
5,468,363
Application Number:
PAN: 8-232,661
Assignee:
Univ. of California, Oakland, CA (United States)
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 21 Nov 1995
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ION SOURCES; DESIGN; MATERIALS; ENERGY BEAM DEPOSITION; USES; CATHODES; ELECTRIC ARCS

Citation Formats

Falabella, S. Magnetic-cusp, cathodic-arc source. United States: N. p., 1995. Web.
Falabella, S. Magnetic-cusp, cathodic-arc source. United States.
Falabella, S. Tue . "Magnetic-cusp, cathodic-arc source". United States.
@article{osti_131941,
title = {Magnetic-cusp, cathodic-arc source},
author = {Falabella, S},
abstractNote = {A magnetic-cusp for a cathodic-arc source wherein the arc is confined to the desired cathode surface, provides a current path for electrons from the cathode to the anode, and utilizes electric and magnetic fields to guide ions from the cathode to a point of use, such as substrates to be coated. The magnetic-cusp insures arc stability by an easy magnetic path from anode to cathode, while the straight-through arrangement leads to high ion transmission. 3 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {11}
}