Method and apparatus for wavefront sensing

Bahk, Seung-Whan

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Title: Method and apparatus for wavefront sensing

Abstract

A method of measuring characteristics of a wavefront of an incident beam includes obtaining an interferogram associated with the incident beam passing through a transmission mask and Fourier transforming the interferogram to provide a frequency domain interferogram. The method also includes selecting a subset of harmonics from the frequency domain interferogram, individually inverse Fourier transforming each of the subset of harmonics to provide a set of spatial domain harmonics, and extracting a phase profile from each of the set of spatial domain harmonics. The method further includes removing phase discontinuities in the phase profile, rotating the phase profile, and reconstructing a phase front of the wavefront of the incident beam.

Inventors:: Bahk, Seung-Whan

Issue Date:: 2016-08-23

Research Org.:: RAM PHOTONICS, LLC, San Diego, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1303529

Patent Number(s):: 9423306

Application Number:: 14/587,392

Assignee:: RAM PHOTONICS, LLC (San Diego, CA)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS

G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT

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G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
G01B9/02 - Interferometers {for determining dimensional properties of, or relations between, measurement objects}

G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
G01J2009/002 - {Wavefront phase distribution}
G01J9/02 - by interferometric methods
G01J9/0215 - {by shearing interferometric methods}

G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
G03F7/706 - {Aberration measurement

Show less

DOE Contract Number:: FC52-08NA28302

Resource Type:: Patent

Resource Relation:: Patent File Date: 2014 Dec 31

Country of Publication:: United States

Language:: English

Subject:: 47 OTHER INSTRUMENTATION; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS

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                    Bahk, Seung-Whan. Method and apparatus for wavefront sensing.  United States: N. p., 2016. 
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                    Bahk, Seung-Whan. Method and apparatus for wavefront sensing.  United States.

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                    Bahk, Seung-Whan. Tue .  
        "Method and apparatus for wavefront sensing".  United States.  https://www.osti.gov/servlets/purl/1303529.

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@article{osti_1303529,

  title        = {Method and apparatus for wavefront sensing},

  author       = {Bahk, Seung-Whan},

  abstractNote = {A method of measuring characteristics of a wavefront of an incident beam includes obtaining an interferogram associated with the incident beam passing through a transmission mask and Fourier transforming the interferogram to provide a frequency domain interferogram. The method also includes selecting a subset of harmonics from the frequency domain interferogram, individually inverse Fourier transforming each of the subset of harmonics to provide a set of spatial domain harmonics, and extracting a phase profile from each of the set of spatial domain harmonics. The method further includes removing phase discontinuities in the phase profile, rotating the phase profile, and reconstructing a phase front of the wavefront of the incident beam.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2016},

  month        = {8}

}

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Works referenced in this record:

Complex Spatial Filter Synthesis
patent, March 1971

Lu, Sun
US Patent Document 3572878
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/3572878

Method and apparatus for pattern analysis
patent, November 1976

Ginsburg, Arthur P.
US Patent Document 3,993,976
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/3993976

Broadband ultrashort pulse measuring device using non-linear electronic components
patent, February 2000

Diddams, Scott; Diels, Jean-Claude; Steffen, Prien
US Patent Document 6,025,911
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6025911

Optical pulse measurement using shearing interferometry, especially suitable for characterizing ultrashort pulses
patent, October 2003

Walmsley, Ian; Dorrer, Christophe
US Patent Document 6,633,386
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6633386

Frequency transform phase shifting interferometry
patent, April 2005

Deck, Leslie L.
US Patent Document 6,882,432
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6882432

System and methods for wavefront measurement
patent, October 2008

Horwitz, Larry S.
US Patent Document 7,440,115
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7440115

Compact achromatic optical interferometer of the three-wave lateral shearing type
patent, November 2010

Primot, Jerome; Guerineau, Nicolas; Velghe, Sabrina
US Patent Document 7,826,066
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7826066

Complex index refraction tomography with sub λ/6-resolution
patent, January 2015

Cotte, Yann; Pavillon, Nicolas; Depeursinge, Christian
US Patent Document 8,937,722
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8937722

Optical Pulse Measurement
patent-application, February 2003

Walmsley, Ian A.; Dorrer, Christophe
US Patent Application 10/200982; 20030025911
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030025911

Method and Apparatus for Enhanced Spatial Bandwidth Wavefronts Reconstructed from Digital Interferograms or Holograms
patent-application, May 2012

Pavillon, Nicolas; Seelamantula, Chandra Sekhar; Unser, Michael
US Patent Application 13/266027; 20120116703
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120116703

Complex Index Refraction Tomography with Sub Lambda/6-Resolution
patent-application, March 2013

Cotte, Yann; Pavillon, Nicolas; Depeursinge, Christian
US Patent Application 13/637928; 20130057869
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130057869

Generation and characterization of the highest laser intensities (10²² W/cm²)
journal, January 2004

Bahk, S.-W.; Rousseau, P.; Planchon, T. A.
Optics Letters, Vol. 29, Issue 24, p. 2837-2839
https://doi.org/10.1364/OL.29.002837

Band-limited wavefront reconstruction with unity frequency response from Shack-Hartmann slopes measurements
journal, January 2008

Bahk, Seung-Whan
Optics Letters, Vol. 33, Issue 12, p. 1321-1323
https://doi.org/10.1364/OL.33.001321

A high-resolution, adaptive beam-shaping system for high-power lasers
journal, January 2010

Bahk, Seung-Whan; Fess, Ed; Kruschwitz, Brian E.
Optics Express, Vol. 18, Issue 9, p. 9151-9163
https://doi.org/10.1364/OE.18.009151

Highly accurate wavefront reconstruction algorithms over broad spatial-frequency bandwidth
journal, January 2011

Bahk, Seung-Whan
Optics Express, Vol. 19, Issue 20, p. 18997-19014
https://doi.org/10.1364/OE.19.018997

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Similar Records

Title: Method and apparatus for wavefront sensing

Abstract

Citation Formats

Complex Spatial Filter Synthesis patent, March 1971

Method and apparatus for pattern analysis patent, November 1976

Broadband ultrashort pulse measuring device using non-linear electronic components patent, February 2000

Optical pulse measurement using shearing interferometry, especially suitable for characterizing ultrashort pulses patent, October 2003

Frequency transform phase shifting interferometry patent, April 2005

System and methods for wavefront measurement patent, October 2008

Compact achromatic optical interferometer of the three-wave lateral shearing type patent, November 2010

Complex index refraction tomography with sub λ/6-resolution patent, January 2015

Optical Pulse Measurement patent-application, February 2003

Method and Apparatus for Enhanced Spatial Bandwidth Wavefronts Reconstructed from Digital Interferograms or Holograms patent-application, May 2012

Complex Index Refraction Tomography with Sub Lambda/6-Resolution patent-application, March 2013

Generation and characterization of the highest laser intensities (1022 W/cm2) journal, January 2004

Band-limited wavefront reconstruction with unity frequency response from Shack-Hartmann slopes measurements journal, January 2008

A high-resolution, adaptive beam-shaping system for high-power lasers journal, January 2010

Highly accurate wavefront reconstruction algorithms over broad spatial-frequency bandwidth journal, January 2011

Complex Spatial Filter Synthesis
patent, March 1971

Method and apparatus for pattern analysis
patent, November 1976

Broadband ultrashort pulse measuring device using non-linear electronic components
patent, February 2000

Optical pulse measurement using shearing interferometry, especially suitable for characterizing ultrashort pulses
patent, October 2003

Frequency transform phase shifting interferometry
patent, April 2005

System and methods for wavefront measurement
patent, October 2008

Compact achromatic optical interferometer of the three-wave lateral shearing type
patent, November 2010

Complex index refraction tomography with sub λ/6-resolution
patent, January 2015

Optical Pulse Measurement
patent-application, February 2003

Method and Apparatus for Enhanced Spatial Bandwidth Wavefronts Reconstructed from Digital Interferograms or Holograms
patent-application, May 2012

Complex Index Refraction Tomography with Sub Lambda/6-Resolution
patent-application, March 2013

Generation and characterization of the highest laser intensities (10²² W/cm²)
journal, January 2004

Band-limited wavefront reconstruction with unity frequency response from Shack-Hartmann slopes measurements
journal, January 2008

A high-resolution, adaptive beam-shaping system for high-power lasers
journal, January 2010

Highly accurate wavefront reconstruction algorithms over broad spatial-frequency bandwidth
journal, January 2011