Integrated field emission array for ion desorption
Abstract
An integrated field emission array for ion desorption includes an electrically conductive substrate; a dielectric layer lying over the electrically conductive substrate comprising a plurality of laterally separated cavities extending through the dielectric layer; a like plurality of conically-shaped emitter tips on posts, each emitter tip/post disposed concentrically within a laterally separated cavity and electrically contacting the substrate; and a gate electrode structure lying over the dielectric layer, including a like plurality of circular gate apertures, each gate aperture disposed concentrically above an emitter tip/post to provide a like plurality of annular gate electrodes and wherein the lower edge of each annular gate electrode proximate the like emitter tip/post is rounded. Also disclosed herein are methods for fabricating an integrated field emission array.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1303256
- Patent Number(s):
- 9425019
- Application Number:
- 14/640,655
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2015 Mar 06
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; 36 MATERIALS SCIENCE
Citation Formats
Resnick, Paul J, Hertz, Kristin L., Holland, Christopher, and Chichester, David. Integrated field emission array for ion desorption. United States: N. p., 2016.
Web.
Resnick, Paul J, Hertz, Kristin L., Holland, Christopher, & Chichester, David. Integrated field emission array for ion desorption. United States.
Resnick, Paul J, Hertz, Kristin L., Holland, Christopher, and Chichester, David. Tue .
"Integrated field emission array for ion desorption". United States. https://www.osti.gov/servlets/purl/1303256.
@article{osti_1303256,
title = {Integrated field emission array for ion desorption},
author = {Resnick, Paul J and Hertz, Kristin L. and Holland, Christopher and Chichester, David},
abstractNote = {An integrated field emission array for ion desorption includes an electrically conductive substrate; a dielectric layer lying over the electrically conductive substrate comprising a plurality of laterally separated cavities extending through the dielectric layer; a like plurality of conically-shaped emitter tips on posts, each emitter tip/post disposed concentrically within a laterally separated cavity and electrically contacting the substrate; and a gate electrode structure lying over the dielectric layer, including a like plurality of circular gate apertures, each gate aperture disposed concentrically above an emitter tip/post to provide a like plurality of annular gate electrodes and wherein the lower edge of each annular gate electrode proximate the like emitter tip/post is rounded. Also disclosed herein are methods for fabricating an integrated field emission array.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Aug 23 00:00:00 EDT 2016},
month = {Tue Aug 23 00:00:00 EDT 2016}
}
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Works referenced in this record:
Array of field emission cathodes
patent, June 1994
- Watanabe, Hidetoshi; Ohoshi, Toshio
- US Patent Document 5,319,279
Field emission display devices, and field emission electron beam source and isolation structure components therefor
patent, July 1996
- Jones, Gary W.; Zimmerman, Steven M.
- US Patent Document 5,534,743
Field emission cathode with resistive gate areas and electron gun using same
patent, February 1998
- Imura, Hironori
- US Patent Document 5,717,279
Filamentary electron-emission device having self-aligned gate or/and lower conductive/resistive region
patent, March 2001
- Macaulay, John M.; Searson, Peter C.; Duboc, Jr., Robert M.
- US Patent Document 6,204,596
Manufacture of field emission device
patent, December 2001
- Hattori, Atsuo; Miyazawa, Kenichi
- US Patent Document 6,329,214
Matrix-type cold-cathode electron source device
patent, February 2013
- Yamamoto, Makoto; Koga, Keisuke
- US Patent Document 8,384,281
Radiation shielding for field emitters
patent-application, March 2003
- Williams, Terry N.; Rolfson, J. Brett
- US Patent Application 10/263490; 20030057861
Design, microfabrication, and analysis of micrometer-sized cylindrical ion trap arrays
journal, January 2007
- Cruz, D.; Chang, J. P.; Fico, M.
- Review of Scientific Instruments, Vol. 78, Issue 1
All-metallic three-dimensional photonic crystals with a large infrared bandgap
journal, May 2002
- Fleming, J. G.; Lin, S. Y.; El-Kady, I.
- Nature, Vol. 417, Issue 6884, p. 52-55
An integrated field emission array for ion desorption
journal, May 2010
- Resnick, P. J.; Holland, C. E.; Schwoebel, P. R.
- Microelectronic Engineering, Vol. 87, Issue 5-8, p. 1263-1265