Integrated field emission array for ion desorption
An integrated field emission array for ion desorption includes an electrically conductive substrate; a dielectric layer lying over the electrically conductive substrate comprising a plurality of laterally separated cavities extending through the dielectric layer; a like plurality of conically-shaped emitter tips on posts, each emitter tip/post disposed concentrically within a laterally separated cavity and electrically contacting the substrate; and a gate electrode structure lying over the dielectric layer, including a like plurality of circular gate apertures, each gate aperture disposed concentrically above an emitter tip/post to provide a like plurality of annular gate electrodes and wherein the lower edge of each annular gate electrode proximate the like emitter tip/post is rounded. Also disclosed herein are methods for fabricating an integrated field emission array.
- Issue Date:
- OSTI Identifier:
- 1303256
- Assignee:
- Sandia Corporation (Albuquerque, NM) SNL-A
- Patent Number(s):
- 9,425,019
- Application Number:
- 14/640,655
- Contract Number:
- AC04-94AL85000
- Resource Relation:
- Patent File Date: 2015 Mar 06
- Research Org:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org:
- USDOE
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; 36 MATERIALS SCIENCE
- Full Text
- View Full Text
Works referenced in this record:
All-metallic three-dimensional photonic crystals with a large infrared bandgap
journal, May 2002
journal, May 2002
- Fleming, J. G.; Lin, S. Y.; El-Kady, I.
- Nature, Vol. 417, Issue 6884, p. 52-55
An integrated field emission array for ion desorption
journal, May 2010
journal, May 2010
- Resnick, P. J.; Holland, C. E.; Schwoebel, P. R.
- Microelectronic Engineering, Vol. 87, Issue 5-8, p. 1263-1265