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Title: Integrated field emission array for ion desorption

An integrated field emission array for ion desorption includes an electrically conductive substrate; a dielectric layer lying over the electrically conductive substrate comprising a plurality of laterally separated cavities extending through the dielectric layer; a like plurality of conically-shaped emitter tips on posts, each emitter tip/post disposed concentrically within a laterally separated cavity and electrically contacting the substrate; and a gate electrode structure lying over the dielectric layer, including a like plurality of circular gate apertures, each gate aperture disposed concentrically above an emitter tip/post to provide a like plurality of annular gate electrodes and wherein the lower edge of each annular gate electrode proximate the like emitter tip/post is rounded. Also disclosed herein are methods for fabricating an integrated field emission array.
Inventors:
; ; ;
Issue Date:
OSTI Identifier:
1303256
Assignee:
Sandia Corporation (Albuquerque, NM) SNL-A
Patent Number(s):
9,425,019
Application Number:
14/640,655
Contract Number:
AC04-94AL85000
Resource Relation:
Patent File Date: 2015 Mar 06
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 36 MATERIALS SCIENCE

Works referenced in this record:

All-metallic three-dimensional photonic crystals with a large infrared bandgap
journal, May 2002
  • Fleming, J. G.; Lin, S. Y.; El-Kady, I.
  • Nature, Vol. 417, Issue 6884, p. 52-55
  • DOI: 10.1038/417052a

An integrated field emission array for ion desorption
journal, May 2010
  • Resnick, P. J.; Holland, C. E.; Schwoebel, P. R.
  • Microelectronic Engineering, Vol. 87, Issue 5-8, p. 1263-1265
  • DOI: 10.1016/j.mee.2009.11.036