Micropores and methods of making and using thereof

Title: Micropores and methods of making and using thereof

Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2.times. a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.

Inventors:: Perroud, Thomas D.; Patel, Kamlesh D.; Meagher, Robert J.

Issue Date:: 2016-08-02

OSTI Identifier:: 1280743

Assignee:: Sandia Corporation (Albuquerque, NM) SNL-A

Patent Number(s):: 9,404,913

Application Number:: 14/057,170

Resource Relation:: Patent File Date: 2013 Oct 18

Research Org:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org:: USDOE

Country of Publication:: United States

Language:: English

Subject:: 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 59 BASIC BIOLOGICAL SCIENCES

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Other works cited in this record:

Continuous inertial focusing, ordering, and separation of particles in microchannels
journal, November 2007

Di Carlo, D.; Irimia, D.; Tompkins, R. G.
Proceedings of the National Academy of Sciences, Vol. 104, Issue 48, p. 18892-18897
DOI: 10.1073/pnas.0704958104

Electrokinetically driven micro flow cytometers with integrated fiber optics for on-line cell/particle detection
journal, April 2004

Fu, Lung-Ming; Yang, Ruey-Jen; Lin, Che-Hsin
Analytica Chimica Acta, Vol. 507, Issue 1, p. 163-169
DOI: 10.1016/j.aca.2003.10.028

A trap-and-release integrated microfluidic system for dynamic microarray applications
journal, January 2007

Tan, W.-H.; Takeuchi, S.
Proceedings of the National Academy of Sciences, Vol. 104, Issue 4, p. 1146-1151
DOI: 10.1073/pnas.0606625104

Etch rates for micromachining processing-part II
journal, December 2003

Williams, K.R.; Gupta, K.; Wasilik, M.
Journal of Microelectromechanical Systems, Vol. 12, Issue 6, p. 761-778
DOI: 10.1109/JMEMS.2003.820936

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