Global to push GA events into
skip to main content

Title: Micropores and methods of making and using thereof

Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2.times. a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.
Inventors:
; ;
Issue Date:
OSTI Identifier:
1280743
Assignee:
Sandia Corporation (Albuquerque, NM) SNL-A
Patent Number(s):
9,404,913
Application Number:
14/057,170
Resource Relation:
Patent File Date: 2013 Oct 18
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 59 BASIC BIOLOGICAL SCIENCES

Works referenced in this record:

Continuous inertial focusing, ordering, and separation of particles in microchannels
journal, November 2007
  • Di Carlo, D.; Irimia, D.; Tompkins, R. G.
  • Proceedings of the National Academy of Sciences, Vol. 104, Issue 48, p. 18892-18897
  • DOI: 10.1073/pnas.0704958104

Electrokinetically driven micro flow cytometers with integrated fiber optics for on-line cell/particle detection
journal, April 2004
  • Fu, Lung-Ming; Yang, Ruey-Jen; Lin, Che-Hsin
  • Analytica Chimica Acta, Vol. 507, Issue 1, p. 163-169
  • DOI: 10.1016/j.aca.2003.10.028

A trap-and-release integrated microfluidic system for dynamic microarray applications
journal, January 2007
  • Tan, W.-H.; Takeuchi, S.
  • Proceedings of the National Academy of Sciences, Vol. 104, Issue 4, p. 1146-1151
  • DOI: 10.1073/pnas.0606625104

Etch rates for micromachining processing-part II
journal, December 2003
  • Williams, K.R.; Gupta, K.; Wasilik, M.
  • Journal of Microelectromechanical Systems, Vol. 12, Issue 6, p. 761-778
  • DOI: 10.1109/JMEMS.2003.820936