Micropores and methods of making and using thereof

Title: Micropores and methods of making and using thereof

Abstract

Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2.times. a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.

Inventors:: Perroud, Thomas D.; Patel, Kamlesh D.; Meagher, Robert J.

Issue Date:: 2016-08-02

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1280743

Patent Number(s):: 9404913

Application Number:: 14/057,170

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

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B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B81B2201/058 - Microfluidics not provided for in B81B2201/051 - B81B2201/054

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T137/9464 - Faucets and spouts

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
B01L3/502776 - {specially adapted for focusing or laminating flows}

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01F - MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING
B01F13/0059 - {Micromixers}

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N33/5005 - {involving human or animal cells

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
B01L3/502784 - {specially adapted for droplet or plug flow, e.g. digital microfluidics
B01L3/502761 - {specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads, for physically stretching molecules

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B81C1/00047 - {Cavities}

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
B01L2300/0816 - Cards, e.g. flat sample carriers usually with flow in two horizontal directions

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B81C1/00404 - {Mask characterised by its size, orientation or shape}

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01F - MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING
B01F5/0471 - {the additional component being introduced at the circumference of the conduit}

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
B01L2300/0864 - comprising only one inlet and multiple receiving wells, e.g. for separation, splitting
B01L2200/0668 - Trapping microscopic beads
B01L2400/0688 - surface tension valves, capillary stop, capillary break

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B81C2201/0142 - Processes for controlling etch progression not provided for in B81C2201/0136 - B81C2201/014

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
B01L3/502707 - {characterised by the manufacture of the container or its components

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01F - MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING
B01F3/0807 - {Emulsifying

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T428/24479 - including variation in thickness

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B81C1/00119 - {Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems}
B81C2201/0133 - Wet etching
B81C1/00087 - {Holes}

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
B01L3/502753 - {characterised by bulk separation arrangements on lab-on-a-chip devices, e.g. for filtration or centrifugation

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Resource Type:: Patent

Resource Relation:: Patent File Date: 2013 Oct 18

Country of Publication:: United States

Language:: English

Subject:: 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 59 BASIC BIOLOGICAL SCIENCES

Citation Formats


                    Perroud, Thomas D., Patel, Kamlesh D., and Meagher, Robert J. Micropores and methods of making and using thereof.  United States: N. p., 2016. 
        Web.

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                    Perroud, Thomas D., Patel, Kamlesh D., & Meagher, Robert J. Micropores and methods of making and using thereof.  United States.

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                    Perroud, Thomas D., Patel, Kamlesh D., and Meagher, Robert J. Tue .  
        "Micropores and methods of making and using thereof".  United States.  https://www.osti.gov/servlets/purl/1280743.

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@article{osti_1280743,

  title        = {Micropores and methods of making and using thereof},

  author       = {Perroud, Thomas D. and Patel, Kamlesh D. and Meagher, Robert J.},

  abstractNote = {Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2.times. a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2016},

  month        = {8}

}

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Works referenced in this record:

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Di Carlo, D.; Irimia, D.; Tompkins, R. G.
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A high-discernment microflow cytometer with microweir structure
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Electrokinetically driven micro flow cytometers with integrated fiber optics for on-line cell/particle detection
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Fu, Lung-Ming; Yang, Ruey-Jen; Lin, Che-Hsin
Analytica Chimica Acta, Vol. 507, Issue 1, p. 163-169
https://doi.org/10.1016/j.aca.2003.10.028

Gravity-Driven Microfluidic Particle Sorting Device with Hydrodynamic Separation Amplification
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Analytical Chemistry, Vol. 79, Issue 4
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Dynamic Cell and Microparticle Control via Optoelectronic Tweezers
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Ohta, Aaron Takami; Chiou, Pei-Yu; Han, Tae H.
Journal of Microelectromechanical Systems, Vol. 16, Issue 3
https://doi.org/10.1109/JMEMS.2007.896717

A trap-and-release integrated microfluidic system for dynamic microarray applications
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Tu, Eugene; Zhang, Haichuan; Wang, Mark M.
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Microfluidic sorting of mammalian cells by optical force switching
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Wang, Mark M.; Tu, Eugene; Raymond, Daniel E.
Nature Biotechnology, Vol. 23, Issue 1
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Etch rates for micromachining processing-part II
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Journal of Microelectromechanical Systems, Vol. 12, Issue 6, p. 761-778
https://doi.org/10.1109/JMEMS.2003.820936

Isotropically etched radial micropore for cell concentration, immobilization, and picodroplet generation
journal, January 2009

Perroud, Thomas D.; Meagher, Robert J.; Kanouff, Michael P.
Lab on a Chip, Vol. 9, Issue 4, p. 507-515
https://doi.org/10.1039/B817285D

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Similar Records

Title: Micropores and methods of making and using thereof

Abstract

Citation Formats

Continuous inertial focusing, ordering, and separation of particles in microchannels journal, November 2007

A high-discernment microflow cytometer with microweir structure journal, May 2008

Electrokinetically driven micro flow cytometers with integrated fiber optics for on-line cell/particle detection journal, April 2004

Gravity-Driven Microfluidic Particle Sorting Device with Hydrodynamic Separation Amplification journal, February 2007

Dynamic Cell and Microparticle Control via Optoelectronic Tweezers journal, June 2007

A trap-and-release integrated microfluidic system for dynamic microarray applications journal, January 2007

Microfluidic cell analysis and sorting using photonic forces conference, October 2004

Microfluidic sorting of mammalian cells by optical force switching journal, December 2004

Etch rates for micromachining processing-part II journal, December 2003

Isotropically etched radial micropore for cell concentration, immobilization, and picodroplet generation journal, January 2009

Continuous inertial focusing, ordering, and separation of particles in microchannels
journal, November 2007

A high-discernment microflow cytometer with microweir structure
journal, May 2008

Electrokinetically driven micro flow cytometers with integrated fiber optics for on-line cell/particle detection
journal, April 2004

Gravity-Driven Microfluidic Particle Sorting Device with Hydrodynamic Separation Amplification
journal, February 2007

Dynamic Cell and Microparticle Control via Optoelectronic Tweezers
journal, June 2007

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journal, January 2007

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conference, October 2004

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journal, December 2004

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journal, January 2009