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Title: High gain durable anti-reflective coating

Abstract

Disclosed herein are polysilsesquioxane-based anti-reflective coating (ARC) compositions, methods of preparation, and methods of deposition on a substrate. In one embodiment, the polysilsesquioxane of this disclosure is prepared in a two-step process of acid catalyzed hydrolysis of organoalkoxysilane followed by addition of tetralkoxysilane that generates silicone polymers with >40 mol % silanol based on Si-NMR. These high silanol siloxane polymers are stable and have a long shelf-life in polar organic solvents at room temperature. Also disclosed are low refractive index ARC made from these compositions with and without additives such as porogens, templates, thermal radical initiator, photo radical initiators, crosslinkers, Si--OH condensation catalyst and nano-fillers. Also disclosed are methods and apparatus for applying coatings to flat substrates including substrate pre-treatment processes, coating processes and coating curing processes including skin-curing using hot-air knives. Also disclosed are coating compositions and formulations for highly tunable, durable, highly abrasion-resistant functionalized anti-reflective coatings.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Enki Technology, Inc., San Jose, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1273457
Patent Number(s):
9399720
Application Number:
14/799,507
Assignee:
Enki Technology, Inc. (San Jose, CA)
Patent Classifications (CPCs):
C - CHEMISTRY C03 - GLASS C03C - CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
EE0006810
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015 Jul 14
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

Citation Formats

Maghsoodi, Sina, Brophy, Brenor L., Colson, Thomas E., Gonsalves, Peter R., and Abrams, Ze'ev R.. High gain durable anti-reflective coating. United States: N. p., 2016. Web.
Maghsoodi, Sina, Brophy, Brenor L., Colson, Thomas E., Gonsalves, Peter R., & Abrams, Ze'ev R.. High gain durable anti-reflective coating. United States.
Maghsoodi, Sina, Brophy, Brenor L., Colson, Thomas E., Gonsalves, Peter R., and Abrams, Ze'ev R.. Tue . "High gain durable anti-reflective coating". United States. https://www.osti.gov/servlets/purl/1273457.
@article{osti_1273457,
title = {High gain durable anti-reflective coating},
author = {Maghsoodi, Sina and Brophy, Brenor L. and Colson, Thomas E. and Gonsalves, Peter R. and Abrams, Ze'ev R.},
abstractNote = {Disclosed herein are polysilsesquioxane-based anti-reflective coating (ARC) compositions, methods of preparation, and methods of deposition on a substrate. In one embodiment, the polysilsesquioxane of this disclosure is prepared in a two-step process of acid catalyzed hydrolysis of organoalkoxysilane followed by addition of tetralkoxysilane that generates silicone polymers with >40 mol % silanol based on Si-NMR. These high silanol siloxane polymers are stable and have a long shelf-life in polar organic solvents at room temperature. Also disclosed are low refractive index ARC made from these compositions with and without additives such as porogens, templates, thermal radical initiator, photo radical initiators, crosslinkers, Si--OH condensation catalyst and nano-fillers. Also disclosed are methods and apparatus for applying coatings to flat substrates including substrate pre-treatment processes, coating processes and coating curing processes including skin-curing using hot-air knives. Also disclosed are coating compositions and formulations for highly tunable, durable, highly abrasion-resistant functionalized anti-reflective coatings.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {7}
}

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