Global to push GA events into
skip to main content

Title: Method for producing highly conformal transparent conducting oxides

A method for forming a transparent conducting oxide product layer. The method includes use of precursors, such as tetrakis-(dimethylamino) tin and trimethyl indium, and selected use of dopants, such as SnO and ZnO for obtaining desired optical, electrical and structural properties for a highly conformal layer coating on a substrate. Ozone was also input as a reactive gas which enabled rapid production of the desired product layer.
Inventors:
;
Issue Date:
OSTI Identifier:
1273245
Assignee:
UCHICAGO ARGONNE, LLC (Chicago, IL) ANL
Patent Number(s):
9,401,231
Application Number:
13/249,864
Contract Number:
AC02-06CH11357
Resource Relation:
Patent File Date: 2011 Sep 30
Research Org:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Works referenced in this record:

Atomic layer deposition growth of zirconium doped In2O3 films
journal, September 2003