Method for producing highly conformal transparent conducting oxides
Abstract
A method for forming a transparent conducting oxide product layer. The method includes use of precursors, such as tetrakis-(dimethylamino) tin and trimethyl indium, and selected use of dopants, such as SnO and ZnO for obtaining desired optical, electrical and structural properties for a highly conformal layer coating on a substrate. Ozone was also input as a reactive gas which enabled rapid production of the desired product layer.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1273245
- Patent Number(s):
- 9401231
- Application Number:
- 13/249,864
- Assignee:
- UCHICAGO ARGONNE, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01B - CABLES
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2011 Sep 30
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Elam, Jeffrey W., and Mane, Anil U. Method for producing highly conformal transparent conducting oxides. United States: N. p., 2016.
Web.
Elam, Jeffrey W., & Mane, Anil U. Method for producing highly conformal transparent conducting oxides. United States.
Elam, Jeffrey W., and Mane, Anil U. Tue .
"Method for producing highly conformal transparent conducting oxides". United States. https://www.osti.gov/servlets/purl/1273245.
@article{osti_1273245,
title = {Method for producing highly conformal transparent conducting oxides},
author = {Elam, Jeffrey W. and Mane, Anil U.},
abstractNote = {A method for forming a transparent conducting oxide product layer. The method includes use of precursors, such as tetrakis-(dimethylamino) tin and trimethyl indium, and selected use of dopants, such as SnO and ZnO for obtaining desired optical, electrical and structural properties for a highly conformal layer coating on a substrate. Ozone was also input as a reactive gas which enabled rapid production of the desired product layer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jul 26 00:00:00 EDT 2016},
month = {Tue Jul 26 00:00:00 EDT 2016}
}
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