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Title: Method for producing highly conformal transparent conducting oxides

Abstract

A method for forming a transparent conducting oxide product layer. The method includes use of precursors, such as tetrakis-(dimethylamino) tin and trimethyl indium, and selected use of dopants, such as SnO and ZnO for obtaining desired optical, electrical and structural properties for a highly conformal layer coating on a substrate. Ozone was also input as a reactive gas which enabled rapid production of the desired product layer.

Inventors:
;
Issue Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1273245
Patent Number(s):
9,401,231
Application Number:
13/249,864
Assignee:
UCHICAGO ARGONNE, LLC (Chicago, IL)
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2011 Sep 30
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Elam, Jeffrey W., and Mane, Anil U. Method for producing highly conformal transparent conducting oxides. United States: N. p., 2016. Web.
Elam, Jeffrey W., & Mane, Anil U. Method for producing highly conformal transparent conducting oxides. United States.
Elam, Jeffrey W., and Mane, Anil U. Tue . "Method for producing highly conformal transparent conducting oxides". United States. https://www.osti.gov/servlets/purl/1273245.
@article{osti_1273245,
title = {Method for producing highly conformal transparent conducting oxides},
author = {Elam, Jeffrey W. and Mane, Anil U.},
abstractNote = {A method for forming a transparent conducting oxide product layer. The method includes use of precursors, such as tetrakis-(dimethylamino) tin and trimethyl indium, and selected use of dopants, such as SnO and ZnO for obtaining desired optical, electrical and structural properties for a highly conformal layer coating on a substrate. Ozone was also input as a reactive gas which enabled rapid production of the desired product layer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {7}
}

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Works referenced in this record:

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